Methods of synthesizing SiH containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.

Chlorosilanes are produced in exalted yield in a fluidized bed process when the reactor hydraulic diameter, Sauter particle diameter, and superficial gas velocity are used to define a parameter space as a function of Reynolds number and Archimedes number.

Chlorosilanes are produced in exalted yield in a fluidized bed process when the reactor hydraulic diameter, Sauter particle diameter, and superficial gas velocity are used to define a parameter space as a function of Reynolds number and Archimedes number.

An object of the present invention is to prevent stress-corrosion cracking of a header (40) of a reactor. A reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other includes a cooler (70), the cooler including a plurality of heat transfer medium pipes (30) and a header (40), the plurality of heat transfer medium pipes being provided in a fluid bed (60) inside the reactor, the header being provided in a freeboard section (50) inside the reactor, the header being comprised of a corrosion-resistant material.

An object of the present invention is to prevent stress-corrosion cracking of a header (40) of a reactor. A reactor for producing trichlorosilane by causing metal silicon powder and a hydrogen chloride gas to react with each other includes a cooler (70), the cooler including a plurality of heat transfer medium pipes (30) and a header (40), the plurality of heat transfer medium pipes being provided in a fluid bed (60) inside the reactor, the header being provided in a freeboard section (50) inside the reactor, the header being comprised of a corrosion-resistant material.

Provided is a fluidized bed reactor (1) that makes it possible to stably measure a temperature distribution in the fluidized bed reactor (1) while no damage is caused to a temperature measuring section. Provided is a fluidized bed reactor (1) configured to generate trichlorosilane by reacting metallurgical grade silicon powder and hydrogen chloride gas, the fluidized bed reactor (1) including: a reaction vessel (10); and a plurality of temperature measuring sections (50), provided on an outer surface of the reaction vessel (10), each for measuring a temperature inside the reaction vessel (10).

A process for removal of impurities, in particular of dopants, from chlorosilanes which includes the following steps: (a) heating a deposition surface (3); (b) contacting the heated deposition surface (3) with at least one gaseous chlorosilane mixture, the gaseous chlorosilane mixture including at least one chlorosilane and at least one impurity, in particular at least one dopant; (c) at least partially removing the impurity, in particular the dopant, by forming polycrystalline silicon depositions on the deposition surface (3), the polycrystalline silicon depositions being enriched with the impurity, in particular with the dopant; (d) discharging the purified gaseous chlorosilane mixture; (e) contacting the heated deposition surface (3) with an etching gas to return the polycrystalline silicon depositions and the impurity, in particular the dopant, into the gas phase to form a gaseous etching gas mixture; and (f) discharging the gaseous etching gas mixture.

It is an object of the invention to provide a rapid and economically viable process which is notable for efficient use of material, especially of the silylating agent, and by means of which organically modified lyo- or aerogels are obtained in a rapid and simple manner. This object is achieved by virtue of the invention providing a process for producing organically modified gels selected from lyo- and aerosols by (i) emulsifying a basic polar phase comprising water and starting materials for silicatic gels in a nonpolar phase containing a water-immiscible precursor for an active silylating agent, (ii) starting formation of gel and ageing by lowering the pH, and then (iii) starting the silylation and the exchange of solvent by lowering the pH. If the gels are aerogels, the gels provided can be used for thermal and/or acoustic insulation.

It is an object of the invention to provide a rapid and economically viable process which is notable for efficient use of material, especially of the silylating agent, and by means of which organically modified lyo- or aerogels are obtained in a rapid and simple manner. This object is achieved by virtue of the invention providing a process for producing organically modified gels selected from lyo- and aerosols by (i) emulsifying a basic polar phase comprising water and starting materials for silicatic gels in a nonpolar phase containing a water-immiscible precursor for an active silylating agent, (ii) starting formation of gel and ageing by lowering the pH, and then (iii) starting the silylation and the exchange of solvent by lowering the pH. If the gels are aerogels, the gels provided can be used for thermal and/or acoustic insulation.

An object is to prevent corrosion and stress-corrosion cracking that would be caused by hydrochloric acid which would be formed at or near a filter element (80). A trichlorosilane production apparatus (1) includes: a reactor (2) configured to produce trichlorosilane; and a filter device (3) configured to remove a reaction residue, the filter device (3) including a filter element that is comprised of a corrosion-resistant material.