A nitrous oxide room temperature purification method, apparatus and system utilizing at least partially oxidized nickel. In an embodiment, a room temperature regenerable N.sub.2O purifier includes a vessel having an inlet and outlet, an active portion being at least partially filled with a purification material comprising nickel oxide and optional elemental nickel, wherein the weight ratio between the nickel oxide and the optional elemental nickel is equal or higher than 3 and the surface area of the nickel oxide and the optional elemental nickel is equal or higher than 50 m.sup.2/g.

A nitrous oxide room temperature purification method, apparatus and system utilizing at least partially oxidized nickel. In an embodiment, a room temperature regenerable N.sub.2O purifier includes a vessel having an inlet and outlet, an active portion being at least partially filled with a purification material comprising nickel oxide and optional elemental nickel, wherein the weight ratio between the nickel oxide and the optional elemental nickel is equal or higher than 3 and the surface area of the nickel oxide and the optional elemental nickel is equal or higher than 50 m.sup.2/g.

A method of recycling helium from a waste gas generated in a semiconductor process includes forming a first treatment gas by treating helium-containing waste gas emitted from a semiconductor process facility by using a scrubber module, transporting the first treatment gas to a purification facility, forming a first helium gas with a first purity by fractionating the first treatment gas in the purification facility, forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility, and providing the second helium gas to the semiconductor process facility.

Apparatus, system, and method for geothermally driven ammonia production. Hydrogen is generated using energy obtained from the underground magma reservoir and nitrogen is captured from air using the energy obtained from the underground magma reservoir. At least a portion of the generated hydrogen is combined with at least a portion of the generated nitrogen and heated at least to a reaction temperature using the energy obtained from the underground magma reservoir. The heated hydrogen contacts the heated nitrogen for a residence time to form the ammonia.

The present invention provides systems and methods for simultaneously producing a high-purity helium gas product, a methanol-water liquid mixture, and a methane-rich fuel product from a hydrogen-rich feedstock gas containing helium by treating the hydrogen-rich feedstock gas containing helium and carbon dioxide in a reverse water gas shift unit (1500) to produce carbon monoxide, which is then treated in a methanol production unit (300) and a methanol absorption unit (400) to produce a methanol-aqueous solution and a methanol-free gas. The methanol-free gas is then treated in a methane production unit (500) to produce methane, which is then treated in a carbon dioxide recovery membrane unit (1100) and a cryogenic nitrogen rejection unit (600) to produce the methanol-water liquid mixture, the methane-rich fuel product, and a helium-rich gas. The helium-rich gas is then treated to produce the high-purity helium gas product.

The apparatus includes one or more cylindrical housings connected to one another, a jacket on an outer side of a housing, an inner cylinder disposed at least in an interior of a first cylindrical housing, a heat insulation gasket, inner members, a corrosive high temperature gas inlet disposed on the heat insulation gasket, a gas and liquid phase outlet disposed at a bottom of the housing or a bottom of a last housing and a coolant inlet and outlet connected to an interior of the jacket. The heat insulation gasket seals the first cylindrical housing and a top of the inner cylinder in the interior of the first cylindrical housing. The inner members are distributed along a wall of the housing, communicate an interior of the jacket with an interior of the housing, and distribute a liquid in the interior of the jacket to the interior of the housing.

Provided is an apparatus/system for generating a nitrogen-enriched gas reliably and stably using a fuel cell. The nitrogen gas generation apparatus/system comprises: a fuel cell configured to operate by taking in air or a gas containing nitrogen and oxygen, and a fuel gas; and a catalyst combustion mechanism configured to cause an exhaust gas that is extracted from the fuel cell and has a lower oxygen concentration than air to react with the fuel gas on a combustion catalyst, and convert the exhaust gas having a lower oxygen concentration than air into a nitrogen-enriched gas having an increased nitrogen concentration.

Disclosed is a system developed for obtaining high purity (minimum 99.999%) nitrogen gas in nitrogen gas purification applications and drying obtained nitrogen gas before applying it on areas of use, and to an operating method of the system.