A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.

The level of cleanliness of a hollow fiber membrane device is evaluated before it is installed in an ultrapure water production system. A method of evaluating the level of cleanliness of the hollow fiber membrane device includes capturing fine particles in permeating water by means of a first filter membrane, wherein the permeating water is ultrapure water that permeates through the hollow fiber membrane device before the hollow fiber membrane device is installed in an ultrapure water production system; and analyzing the fine particles that are captured by the filter membrane.

A management method of a system for producing an ultrapure water, the system including a boron removal tower including an accommodation space through which water to be processed passes and a boron adsorption resin filling the accommodation space of the boron removal tower, and the boron removal tower including a plurality of sample ports through which a plurality of sample waters to be processed passing through portions having different heights of the boron adsorption resin, are respectively discharged, and determining a replacement cycle of the boron adsorption resin by increasing a passing flow rate of the boron removal tower.

An ultrapure water (UPW) production facility includes a polisher filled with an ion exchange resin, an inflow line, an inflow valve connected to the inflow line and upstream of the polisher, an outflow line, an outflow valve connected to the outflow line and downstream of the polisher, a first drain line connected to the polisher, a first drain valve connected to the first drain line and downstream of the polisher, a second drain line branched from the outflow line, a second drain valve connected to the second drain line, a discharge line branched from the second drain line, a discharge valve connected to the discharge line, wherein the inflow valve, the outflow valve, the first drain valve, the second drain valve, and the outflow valve are automatic valves.

An ultrapure water manufacturing facility includes: a first tank; a plurality of reverse osmosis membranes sequentially arranged downstream of the first tank; an electrodeionization device arranged downstream of the plurality of reverse osmosis membranes; an ion exchange resin tower arranged downstream of the electrodeionization device and filled with a boron selective resin; and a chemical supplier arranged between the plurality of reverse osmosis membranes and configured to supply a pH regulator to treatment-target water.

A thermal disinfection system and a method to perform a thermal disinfection procedure of fluid lines of a medical apparatus are disclosed herein. In an example, the thermal disinfection procedure comprises at least the steps of receiving a temperature signal from a temperature sensor, determining a measured temperature value of a fluid within a hydraulic circuit, receiving a pressure signal from a pressure sensor, determining a measured local atmospheric pressure value, and driving a heating unit to heat the fluid based on the measured temperature value and the measured local atmospheric pressure value.

A water dispenser which is connected to a pure water source and used for dispensing pure water includes: an arm mounting unit; a water dispensing gun including a nozzle for discharging pure water; a holding unit for holding the water dispensing gun; and at least two arms connecting the holding unit to the arm mounting unit. The at least two arms constitute a parallel link mechanism in which a trajectory of each arm when the at least two arms move is within the same vertical plane.

A medicament preparation system includes a disposable cartridge with a flow path. Various sensors may be placed on the cartridge to measure qualities of the fluid flowing through the flow path. The sensors are placed in precise locations using various approaches that make manufacturing of the cartridge efficient and repeatable. A drain line that is susceptible to fouling may be preattached and various approaches are used to remove or reduce the fouling. An elastomeric contact can also be present in the medical preparation system and used in a conductivity measurement subsystem.

Provided is a process for treating water, wherein the water comprises dissolved ions that comprise an undesired cation, wherein the processes comprises (a) providing a collection of specified polymeric beads wherein 90% or more of the beads by volume are uniform beads; (b) then passing the water through a bed of the collection of polymeric beads to exchange the undesired ion for ions (iv), (c) then passing a regeneration solution comprising dissolved ions (v) of the same species as ions (iv) through the bed of the collection of polymeric beads to exchange ions (v) for the undesired ions.

Disclosed is an ion exchange resin comprising a polymer having strong acid and strong base groups on the same polymer. In some forms the resin comprises a high density of polymers having strong acid and strong base groups on the same polymer. In some forms the strong acid and strong base groups are in close proximity to one another on the polymer. The disclosure further relates to a mixed bead resin for high salt level desalination.

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