Patent classifications
C
CHEMISTRY; METALLURGY
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C02
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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C02F
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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2103/00
Nature of the water, waste water, sewage or sludge to be treated
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C02F2103/34
from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
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C02F2103/346
from semiconductor processing, e.g. waste water from polishing of wafers
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