A deposition system for depositing a chemical vapor onto a workpiece is disclosed, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The workpiece is held by a lathe that rotates the workpiece relative to chemical burners that deposit silica soot on the workpiece. The deposition system has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber. Multiple sets of chemical burners are disposed longitudinally along the length of the workpiece. Each set of burners is separated from other sets, such that each set of burners deposit silica particles onto generally different portions of a workpiece. The respective portions include an overlap segment in which one or more burners from one burner set will deposit silica particles on the same portion of the workpiece as one or more burners from another set.

A method for depositing SiO2 soot particles on a deposition surface using at least two mutually spaced and adjacent build-up burners, and a corresponding device for carrying out the method.

In order to improve the yield of an optical fiber base material, provided is a manufacturing apparatus for manufacturing an optical fiber base material by forming a soot deposition body on a surface of a target rod, including a main burner that generates glass microparticles to be deposited on the target rod while moving in a longitudinal direction of the target rod; a pair of side burners that are arranged outside a movement range of the main burner and heat both ends of the soot deposition body formed on the surface of the target rod; and a shielding member that prevents the glass microparticles generated by the main burner from being deposited on the target rod farther outward than a segment of the target rod sandwiched by the pair of side burners.

Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 m in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm.sup.3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fiber reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.