Provided is a device for producing a fine glass particle deposited body by depositing fine glass particles on a starting rod disposed within a reaction vessel, the device being provided with: a burner for synthesizing fine glass particles by jetting out a source gas; a transfer mechanism to which the burner is disposed and which causes the burner to move backward in association with an increase in the diameter of a fine glass particle deposited body; a vaporizer which is disposed to the transfer mechanism so as to be moved backward integrally with the burner and which converts a liquid siloxane into a source gas through vaporization; piping through which the source gas is fed from the vaporizer to the burner; and a heating mechanism which heats up the piping with a heating temperature of at least 230° C.

A method for the production of synthetic quartz glass using a special cleaning device is provided. The method includes (a) evaporating a production material containing a polymerizable polyalkylsiloxane compound while forming a production material vapor, (b) passing the production material vapor resulting from step (a) through a cleaning device to purify the production material vapor, (c) supplying the purified production material vapor resulting from step (b) to a reaction zone in which the purified production material vapor is converted to SiO.sub.2 particles through oxidation and/or through hydrolysis, (d) depositing the SiO.sub.2 particles resulting from step (c) on a deposition surface, and optionally drying and vitrifying the deposited SiO.sub.2 particles resulting from step (d) to form synthetic quartz glass. The cleaning device includes a bulk of porous silica particles which have a BET specific surface area of at least 2 m.sup.2/g. A device for carrying out the method is also provided.

A manufacturing method of a porous glass preform for optical fiber by depositing glass microparticles on a starting member, including supplying a vaporizer with organic silicon compound raw material in a liquid state and a carrier gas; in the vaporizer, mixing and vaporizing the organic silicon compound raw material in a liquid state and the carrier gas to convert the organic silicon compound raw material and the carrier gas into a raw material mixed gas; supplying a burner with the raw material mixed gas and a combustible gas, combusting the raw material mixed gas and the combustible gas in the burner, and ejecting SiO.sub.2 microparticles generated by the combustion from the burner; and depositing the SiO.sub.2 microparticles ejected from the burner on the starting member by repeatedly moving the vaporizer and the burner together, in a synchronized manner, parallel to the starting member in a longitudinal direction thereof.

A method for producing a glass particulate deposit, said method comprising using siloxane as a raw material for glass, discharging the siloxane gasified in a vaporizer and a combustion gas from a burner and combusting, and thus forming a glass particulate deposit in a reaction vessel, wherein: after producing a good section of the glass particulate deposit, the supply of the siloxane that is the raw material for glass to the burner is ceased while continuously supplying the combustion gas to the burner; then the glass particulate deposit is taken out from the reaction vessel; a raw material gas port from the vaporizer to the burner is purged by flowing an inert gas therethrough; and, when a color derived from the combustion of the siloxane gas is not observed any more in the flame of the burner, then the supply of the combustion gas is ceased.

A manufacturing method of a porous glass base material for optical fiber includes: supplying an organic siloxane raw material supplied from a raw material tank is fed to a vaporizer; mixing and vaporizing the raw material and carrier gas in the vaporizer; and externally depositing SiO.sub.2 fine particles through combustion reaction by supplying the mixed gas of raw the material and the carrier gas to the burner in the manufacturing apparatus of porous glass base material for optical fiber. Before starting to supply the raw material to a raw material gas supply pipe of the burner, the burner and the inside of a manufacturing apparatus of porous glass base material for optical fiber are pre-heated by flowing purge gas of 60° C. or higher into the raw material gas supply pipe and supplying combustible gas and combustion supporting gas to the burner.

Vaporizers and systems for vaporizing liquid precursor for forming glass optical fiber preforms are provided. The vaporizer includes an expansion chamber at least partially enclosed by a side wall, the expansion chamber comprising an upper end and a lower end with the side wall disposed between the upper end and the lower end. The vaporizer further includes a closed-loop liquid delivery conduit positioned in the expansion chamber proximate to the upper end of the expansion chamber, wherein the closed-loop liquid delivery conduit comprises a plurality of nozzles oriented to direct a spray of liquid precursor onto an inner surface of the side wall. Further, the vaporizer includes at least one supply conduit positioned proximate the upper end of the expansion chamber and coupled to the closed-loop liquid delivery conduit, and a vapor delivery outlet coupled to the expansion chamber and configured to direct vaporized liquid precursor from the expansion chamber.

This raw material supply device supplies a raw material for producing glass fine particle deposits, to a burner and includes a raw material tank; a liquid raw material pipe having one end thereof connected to the raw material tank; a liquid raw material pressure feed pump that pumps siloxane, being a liquid raw material, from the raw material tank via the liquid raw material pipe; a pressure adjustment valve provided on a secondary side of the liquid raw material pressure feed pump in the liquid raw material pipe; an MFC for liquid, connected to the other end of the liquid raw material pipe; and an aeration device that is connected to the secondary side of the MFC for liquid and aerates the liquid raw material. The pipe on the secondary side of the pressure adjustment valve is connected to a location having lower pressure than the primary side pressure.

A process for the production of a fluorinated quartz glass including the steps of generating SiO.sub.2 particles in a synthesis burner; depositing the resulting SiO.sub.2 particles into a body; and vitrifying the resulting body, wherein a fluorinating agent having a boiling point greater than or equal to ?10? C. is supplied to the synthesis burner.

A manufacturing method of a porous glass preform for optical fiber by depositing glass microparticles on a starting member, including supplying a vaporizer with organic silicon compound raw material in a liquid state and a carrier gas; in the vaporizer, mixing and vaporizing the organic silicon compound raw material in a liquid state and the carrier gas to convert the organic silicon compound raw material and the carrier gas into a raw material mixed gas; supplying a burner with the raw material mixed gas and a combustible gas, combusting the raw material mixed gas and the combustible gas in the burner, and ejecting SiO.sub.2 microparticles generated by the combustion from the burner; and depositing the SiO.sub.2 microparticles ejected from the burner on the starting member by repeatedly moving the vaporizer and the burner together, in a synchronized manner, parallel to the starting member in a longitudinal direction thereof.

A method for manufacturing a glass preform includes transporting a liquid-form raw material compound including an organic silicon compound by pressurizing the raw material compound using a pressurization gas, deaerating a dissolved gas from the pressurized raw material compound, controlling a flow rate of the deaerated raw material compound using a mass flow controller, gasifying the raw material compound transported through the mass flow controller, and combusting the gasified raw material compound using a burner to generate SiO.sub.2.