A plasma etching method using a Faraday cage, comprising: providing a Faraday cage having a mesh portion on an upper surface thereof in a plasma etching apparatus; providing a quartz substrate having a metal mask with an opening provided on one surface of the metal mask in the Faraday cage; and patterning the quartz substrate with plasma etching.

Methods for manufacturing and/or reinforcing a carbon-containing glass material are disclosed. The method includes supplying a non-thermal equilibrium plasma including a plurality of positive charged gas particles and a plurality of ionized inert gas particles into a reaction chamber, and accelerating at least the plurality of positive charged gas particles through the reaction chamber based on application of an external electric potential to the non-thermal equilibrium plasma. The method includes bombarding a surface-to-air interface of the glass material with the accelerated positive charged gas particles and the ionized inert gas particles, and forming an interphase region in the glass material in response to the bombardment. The method includes forming a compressive stress layer in the glass material in response to the bombardment by at least the ionized inert gas particles. The compressive stress layer may be disposed between the interphase region and the surface-to-air interface of the carbon-containing glass material.

In some implementations, a carbon-containing glass material includes a surface-to-air interface and an interphase region extending from the surface-to-air interface along a direction to a depth within the carbon-containing glass material. The surface-to-air interface may be exposed to ambient air, and the interphase region may include a plurality of few layer graphene (FLG) nanoplatelets formed in response to recombination and/or self-nucleation of a plurality of carbon-containing radicals implanted within the interphase region. The FLG nanoplatelets have a non-periodic orientation configured to at least partially inhibit formation or propagation of microcracks and/or micro-voids in the carbon-containing glass material. The glass material may also include a compressive stress layer disposed between the interphase region and the surface-to-air interface of the carbon-containing glass material, the compressive stress layer induced by ion bombardment of the carbon-containing glass material by a plurality of ionized inert gas particles.

Methods for manufacturing a carbon-containing glass material are disclosed. The method includes flowing a hydrocarbon gas and silane into a reactor, and providing an additive to the reactor. The method includes generating a non-thermal equilibrium plasma based on excitement of the hydrocarbon gas and the silane by a microwave energy, where the non-thermal equilibrium plasma includes a plurality of methyl radicals. The method includes ion-bombarding the glass material with at least the methyl radicals to create an interphase region. The method includes forming a plurality of FLG nanoplatelets within the interphase region based on recombination or self-nucleation of the methyl radicals. The FLG nanoplatelets may be dispersed throughout the interphase region in a non-periodic orientation that at least partially inhibits formation of cracks in the glass material. The method includes doping surfaces of the FLG nanoplatelets with the additive, and intercalating the additive between adjacent graphene layers within the FLG nanoplatelets formed in the glass material.

A method of controllably bonding a thin sheet having a thin sheet bonding surface with a carrier having a carrier bonding surface, by depositing a carbonaceous surface modification layer onto at least one of the thin sheet bonding surface and the carrier bonding surface, incorporating polar groups with the surface modification layer, and then bonding the thin sheet bonding surface to the carrier bonding surface via the surface modification layer. The surface modification layer may include a bulk carbonaceous layer having a first polar group concentration and a surface layer having a second polar group concentration, wherein the second polar group concentration is higher than the first polar group concentration. The surface modification layer deposition and the treatment thereof may be performed by plasma polymerization techniques.

A glass composite includes a first glass member and a second glass member. The first glass member and the second glass member are at least partially connected with each other at the surfaces. The glass composite has a light transmittance not lower than 95% of the light transmittance of the one, with the lower light transmittance, of the first glass member and the second glass member.

A glass composite includes a first glass member and a second glass member. The first glass member and the second glass member are at least partially connected with each other at the surfaces, and a contact interface is formed on the contacting position of the first glass member and the second glass member. The contact interface is visually observed to have no crevices; and when the glass composite is in contact with an acid solution, crevices are suitably formed in the glass composite at the contact interface.

A method of making a display area and a glass tile as well as a display area that includes the glass tile. Prior to assembling the glass tile into the array, an edge treatment is performed on the glass tile, the edge treatment increasing an edge strength of the glass tile, as measured by the four point bend test, to at least about 200 MPa. The edge treatment can, for example, include at least one of plasma jet treatment and protective material application.

It is not preferable to use a material other than materials that are used in the related art in order to prevent a section from peeling from a microscope slide. This is because, even if adhesiveness is improved, it is necessary to eliminate influence on processes such as dyeing. An object of the invention is to provide a technique for preventing a section from peeling off without applying an additional material. In the invention, the above-described problem is solved by etching at least a part of a region of a surface of a substrate with reactive ions.

Antireflective nanoparticle coatings and methods of forming the coatings on substrates are disclosed. One method for forming an antireflective coating includes depositing a nanoparticle coating layer on a substrate, wherein the nanoparticle coating layer includes a colloidal solution of nanoparticles and a solidifying material. The solidifying material includes a silica precursor. The method further includes curing the solidifying material to form silica inter-particle connections between adjacent nanoparticles and between at least some of the nanoparticles and the substrate to bind the nanoparticles to each other and to the substrate to form the antireflective coating.