A microfluidic device includes a flow channel disposed in a glass-based substrate; and a cover bonded to the glass-based substrate and at least partially covering the flow channel, such that the cover has a thickness of at most 200 μm.

An object is to enable suppression of thermal leakage at a peripheral portion of a pair of glass plates disposed so as to be opposed to each other with a gap interposed therebetween. A pair of glass plates 1A, 1B are disposed so as to be opposed to each other with a gap V interposed therebetween, and a periphery sealing metal material 3 is provided which joins the pair of glass plates 1A, 1B at a peripheral portion V1 thereof so as to seal the gap V in an airtight state. The periphery sealing metal material 3 interposed between opposed inner surfaces of the pair of glass plates 1A, 1B contains, in a mixed manner, a thermal insulation material 30 having lower thermal conductivity than that of the periphery sealing metal material 3.

An object is to enable suppression of thermal leakage at a peripheral portion of a pair of glass plates disposed so as to be opposed to each other with a gap interposed therebetween. A pair of glass plates 1A, 1B are disposed so as to be opposed to each other with a gap V interposed therebetween, and a periphery sealing metal material 3 is provided which joins the pair of glass plates 1A, 1B at a peripheral portion V1 thereof so as to seal the gap V in an airtight state. The periphery sealing metal material 3 interposed between opposed inner surfaces of the pair of glass plates 1A, 1B contains, in a mixed manner, a thermal insulation material 30 having lower thermal conductivity than that of the periphery sealing metal material 3.

Provided is a glass panel capable of, even after elapse of a long period, reliably sealing a suction hole and keeping a gap in an airtight state. A suction hole sealing metal material 15 has a first protruding portion 15a formed on an atmospheric side around a suction hole 4, and a second protruding portion 15b formed on a gap side around the suction hole 4, and as seen in a thickness direction of the glass plates 1A, 1B, a first contour 16a which is an outermost edge of a first adhesion surface portion S1 where the first protruding portion 15a is in contact with an atmospheric-side surface 17A of the glass plate 1A, and a second contour 16b which is an outermost edge of a second adhesion surface portion S2 where the second protruding portion 15b is in contact with a gap-side surface 17B of the glass plate 1A, are on an outer side of a third contour 16c which is a gap-side hole edge of the suction hole 4.

A method for manufacturing a glass panel unit includes an assembling step, a bonding step, a gas exhausting step, a sealing step, and an activating step. The bonding step includes melting a peripheral wall in a baking furnace at a first predetermined temperature to hermetically bond a first glass pane and a second glass pane together with the peripheral wall thus melted. The gas exhausting step includes exhausting a gas from an internal space through an exhaust port in the baking furnace to turn the internal space into a vacuum space. The sealing step includes locally heating to a temperature higher than a second predetermined temperature, and thereby melting, either a port sealing material or an exhaust pipe to seal the exhaust port and thereby obtain a work in progress. The activating step includes activating a gas adsorbent after the sealing step to obtain a glass panel unit.

The disclosure discloses a manufacturing method of tempered vacuum glass. At least one glass substrate constituting the tempered vacuum glass is reserved with an extraction opening, and the manufacturing method comprises the following steps: (1) manufacturing metalized layers, and performing tempering or thermal enhancement on the glass substrates; (2) placing a metal solder on the metalized layers; (3) superposing the glass substrates; (4) heating the overall glass substrates to 60-150° C.; (5) hermetically sealing the glass substrates under the condition of ensuring the heating temperature; (6) heating; (7) vacuumizing; and (8) closing the extraction opening, thus accomplishing the manufacturing process. The manufacturing method in the present disclosure can greatly reduce the stress when the two glass substrates are sealed, improve the soldering strength and prolong the service life of the tempered vacuum glass. The disclosure further discloses a tempered vacuum glass production line based on the above manufacturing method.

The disclosure discloses a manufacturing method of tempered vacuum glass. At least one glass substrate constituting the tempered vacuum glass is reserved with an extraction opening, and the manufacturing method comprises the following steps: (1) manufacturing metalized layers, and performing tempering or thermal enhancement on the glass substrates; (2) placing a metal solder on the metalized layers; (3) superposing the glass substrates; (4) heating the overall glass substrates to 60-150° C.; (5) hermetically sealing the glass substrates under the condition of ensuring the heating temperature; (6) heating; (7) vacuumizing; and (8) closing the extraction opening, thus accomplishing the manufacturing process. The manufacturing method in the present disclosure can greatly reduce the stress when the two glass substrates are sealed, improve the soldering strength and prolong the service life of the tempered vacuum glass. The disclosure further discloses a tempered vacuum glass production line based on the above manufacturing method.

A method of separating a portion of an object comprising: presenting an object having a thickness; using a laser emission at a wavelength to perforate at least a portion of the thickness of the object sequentially over a length to form a series of perforations between a first portion of the object on one side of the series of perforations and a second portion of the object on the other side of the series of perforations; and applying a stress to the object at the series of perforations to separate the first portion of the object from the second portion of the object, wherein the thickness of the object, at the series of perforations, is transparent to the wavelength of the laser emission.

A method of separating a portion of an object comprising: presenting an object having a thickness; using a laser emission at a wavelength to perforate at least a portion of the thickness of the object sequentially over a length to form a series of perforations between a first portion of the object on one side of the series of perforations and a second portion of the object on the other side of the series of perforations; and applying a stress to the object at the series of perforations to separate the first portion of the object from the second portion of the object, wherein the thickness of the object, at the series of perforations, is transparent to the wavelength of the laser emission.

A method for manufacturing a microfluidic device (100) includes depositing a bonding layer (106) on a surface of a second glass layer (104a) of a glass substrate having a first glass layer (102) and the second glass layer (104a) fused to the first glass layer (102), such that a masked region of the surface is covered by the bonding layer, and an exposed region of the surface is uncovered by the bonding layer; removing a portion of the second glass layer corresponding to the exposed region of the surface to form a flow channel (112) in the glass substrate; and bonding a cover (108) to the glass substrate with the bonding layer (106).