A substrate support structure includes a substrate support structure body formed from a ceramic composite and having a first surface, a second surface spaced apart from the first surface, and a periphery spanning the first surface and the second surface of the substrate support structure body. The first surface, the second surface, and the periphery of the substrate support structure body are defined by the ceramic composite. The ceramic composite includes two or more of a (a) an aluminum nitride (AlN) constituent, (b) an aluminum oxynitride (Al.sub.2.81O.sub.3.56N.sub.0.44, AlON) constituent, (c) an alpha-alumina (α-Al.sub.2O.sub.3) constituent, (d) a yttrium alumina garnet (Y.sub.3Al.sub.5O.sub.12, YAG) constituent, (e) a yttrium alumina monoclinic (Y.sub.4Al.sub.2O.sub.9, YAM) constituent, (f) a yttrium alumina perovskite (YAlO.sub.3, YAP) constituent, and (g) a yttrium oxide (Y.sub.2O.sub.3) constituent. Semiconductor processing systems and methods of making substrate support structures are also described.

Provided is a ceramic composite material and a wavelength converter. The ceramic composite material includes: an alumina matrix, a fluorescent powder uniformly distributed in the alumina matrix, and scattering centers uniformly distributed in the alumina matrix, wherein the alumina matrix is an alumina ceramics, the scattering centers are alumina particles, the alumina particles each have a particle diameter of 1 μm to 10 μm, and the fluorescent powder has a particle diameter of 13 μm to 20 μm.

In an embodiment a conversion element includes a first phase and a second phase, wherein the first phase comprises lutetium, aluminum, oxygen and a rare-earth element, wherein the second phase comprises Al.sub.2O.sub.3 single crystals, and wherein the conversion element comprises at least one groove.

A porous refractory cast material contains a closed refractory aggregate fraction having a minimum particle size and a maximum particle size; the ratio of maximum particle size to minimum particle size is 10:1 or less. This closed refractory aggregate fraction comprises all of the porous refractory cast material having a particle diameter greater than 0.1 mm. The porous refractory cast material also contains a binder phase containing refractory selected from calcium aluminate cement, alumina phosphate, hydratable alumina, colloidal silica and combinations thereof. Also disclosed is a metallurgical vessel with an interior lining incorporating the porous refractory cast material.

A porous refractory cast material contains a closed refractory aggregate fraction having a minimum particle size and a maximum particle size; the ratio of maximum particle size to minimum particle size is 10:1 or less. This closed refractory aggregate fraction comprises all of the porous refractory cast material having a particle diameter greater than 0.1 mm. The porous refractory cast material also contains a binder phase containing refractory selected from calcium aluminate cement, alumina phosphate, hydratable alumina, colloidal silica and combinations thereof. Also disclosed is a metallurgical vessel with an interior lining incorporating the porous refractory cast material.

A paramagnetic garnet-type transparent ceramic is a sintered body of complex oxide represented by the following formula (1), comprising SiO.sub.2 as a sintering aid in an amount of more than 0% by weight to 0.1% by weight or less, and has a linear transmittance of 83.5% or more at the wavelength of 1,064 nm for an optical path length of 25 mm:
(Tb.sub.1-x-yY.sub.xSc.sub.y).sub.3(Al.sub.1-zSc.sub.z).sub.5O.sub.12  (1)
wherein 0.05≤x<0.45, 0<y<0.1, 0.5<1−x−y<0.95, and 0.004<z<0.2.

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.

Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.

The present disclosure provides a method of making a ceramic article. The method includes (a) obtaining a photopolymerizable slurry or sol including a plurality of ceramic particles distributed in the photopolymerizable slurry or sol and (b) selectively polymerizing the photopolymerizable slurry or sol using actinic radiation and continuous movement of a build substrate through the photopolymerizable slurry or sol to form a gelled article. The method also includes (c) extracting solvent from the gelled article to form an aerogel article or a xerogel article; (d) heat treating the aerogel article or the xerogel article to form a porous ceramic article; and (e) sintering the porous ceramic article to form a sintered ceramic article. The sintered ceramic article exhibits a particular density. Further, additive manufactured ceramic articles are provided that exhibit a particular density, opacity, or both. Preferably, all cross-sectional portions of an interior of the ceramic article having selected dimensions are free of a frequency analysis signal maxima larger than a background signal.