One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

A method of inhibiting an irregular aggregation of a nanosized powder includes (A) providing a nanosized ceramic powder to perform thereon a thermal analysis and thereby attain an endothermic peak temperature; (B) performing an impurity-removal heat treatment on the nanosized ceramic powder at a temperature higher than the endothermic peak temperature; (C) switching the nanosized ceramic powder from a temperature environment of the impurity-removal heat treatment to an environment of a temperature higher than a phase change temperature of the nanosized ceramic powder, followed by performing a calcination heat treatment on the nanosized ceramic powder in the environment of the temperature higher than the phase change temperature of the nanosized ceramic powder, wherein the nanosized ceramic powder skips the temperature environment between impurity-removal heat treatment and calcination heat treatment to shun generating a vermicular structure, avoid crystalline irregularity and abnormal growth, reduce particle aggregation, and achieve satisfactory distribution.

A method of inhibiting an irregular aggregation of a nanosized powder includes (A) providing a nanosized ceramic powder to perform thereon a thermal analysis and thereby attain an endothermic peak temperature; (B) performing an impurity-removal heat treatment on the nanosized ceramic powder at a temperature higher than the endothermic peak temperature; (C) switching the nanosized ceramic powder from a temperature environment of the impurity-removal heat treatment to an environment of a temperature higher than a phase change temperature of the nanosized ceramic powder, followed by performing a calcination heat treatment on the nanosized ceramic powder in the environment of the temperature higher than the phase change temperature of the nanosized ceramic powder, wherein the nanosized ceramic powder skips the temperature environment between impurity-removal heat treatment and calcination heat treatment to shun generating a vermicular structure, avoid crystalline irregularity and abnormal growth, reduce particle aggregation, and achieve satisfactory distribution.

The invention provides a lighting device comprising a plurality of solid state light sources and an elongated ceramic body having a first face and a second face defining a length (L) of the elongated ceramic body, the elongated ceramic body comprising one or more radiation input faces and a radiation exit window, wherein the second face comprises the radiation exit window, wherein the plurality of solid state light sources are configured to provide blue light source light to the one or more radiation input faces and are configured to provide to at least one of the radiation input faces a photon flux of at least 1.0*10.sup.17 photons/(s.Math.mm.sup.2), wherein the elongated ceramic body comprises a ceramic material configured to wavelength convert at least part of the blue light source light into at least converter light, wherein the ceramic material comprises an A.sub.3B.sub.5O.sub.12:Ce.sup.3+ ceramic material, wherein A comprises one or more of yttrium (Y), gadolinium (Gd) and lutetium (Lu), and wherein B comprises aluminum (Al).

The invention provides a lighting device comprising a plurality of solid state light sources and an elongated ceramic body having a first face and a second face defining a length (L) of the elongated ceramic body, the elongated ceramic body comprising one or more radiation input faces and a radiation exit window, wherein the second face comprises the radiation exit window, wherein the plurality of solid state light sources are configured to provide blue light source light to the one or more radiation input faces and are configured to provide to at least one of the radiation input faces a photon flux of at least 1.0*10.sup.17 photons/(s.Math.mm.sup.2), wherein the elongated ceramic body comprises a ceramic material configured to wavelength convert at least part of the blue light source light into at least converter light, wherein the ceramic material comprises an A.sub.3B.sub.5O.sub.12:Ce.sup.3+ ceramic material, wherein A comprises one or more of yttrium (Y), gadolinium (Gd) and lutetium (Lu), and wherein B comprises aluminum (Al).

A heat-insulating protective member for skid posts contains a needled blanket of inorganic fibers. At least some of the needled blanket has, disposed therein, an impregnation part where an oxide-precursor-containing liquid is adherent in an undried state. The impregnation part has a water content of 50-400 parts by mass per 100 parts by mass of the inorganic fibers of the impregnation part. The water content of the heat-insulating protective member is 50-400 parts by mass per 100 parts by mass of the inorganic fibers of the heat-insulating protective member. The oxide-precursor-containing liquid contains ingredients that, upon burning, yield a composition containing Al.sub.2O.sub.3 and CaO. The oxide-precursor-containing liquid is adherent in an amount of 2-50 parts by mass in terms of oxide amount per 100 parts by mass of the inorganic fibers of the impregnation part. A molar ratio of Al/Ca, in the whole impregnation part is 10-330.

A method is for the production of a scintillator fiber. In an embodiment, the method includes provisioning a suspension of a binder dissolved in a solvent and a scintillator material; and pressing the suspension into a precipitation bath in which the binder is insoluble.

A method is for the production of a scintillator fiber. In an embodiment, the method includes provisioning a suspension of a binder dissolved in a solvent and a scintillator material; and pressing the suspension into a precipitation bath in which the binder is insoluble.

Green ceramic batch mixtures include: at least one inorganic batch component, preferably cordierite; at least one binder, preferably polyisoprene, poly(vinyl formal), poly(vinyl methyl ether), polybutadiene carboxy terminated; and an inverse emulsion having a continuous phase, an aqueous dispersed phase, and at least one emulsifier, preferably at least one functionalized silicone compound having at least one functional group chosen from a hydroxyl group, a carboxyl group, hydroxyl-terminated ethylene oxide groups.

A gas nozzle according to an embodiment of the present invention includes a columnar main body including a ceramic sintered body having a through hole through which gas flows. An outlet of the through hole for the gas is formed on one end face of the main body. An inner wall of the through hole has a first region located in a vicinity of the outlet, and a second region located further inward of the main body than the first region. The first region and the second region each include a sintered surface of the ceramic sintered body. Average crystal grain size in the first region is larger than average crystal grain size in the second region.