A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.

A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.

Thermal barrier coatings consist of a tantala-zirconia mixture that is stabilized with two or more stabilizers. An exemplary thermal barrier coating consists of, by mole percent: about 8% to about 30% YO.sub.1.5; about 8% to about 30% YbO.sub.1.5 or GdO.sub.1.5 or combination thereof; about 8% to about 30% TaO.sub.2.5; about 0% to about 10% HfO.sub.2; and a balance of ZrO.sub.2.

Thermal barrier coatings consist of a tantala-zirconia mixture that is stabilized with two or more stabilizers. An exemplary thermal barrier coating consists of, by mole percent: about 8% to about 30% YO.sub.1.5; about 8% to about 30% YbO.sub.1.5 or GdO.sub.1.5 or combination thereof; about 8% to about 30% TaO.sub.2.5; about 0% to about 10% HfO.sub.2; and a balance of ZrO.sub.2.

A prepreg including a support with, for more than 90% of the weight thereof, of ceramic fibers, and a thermoreversible liquefiable gel covering, at least in part, at least one portion of the ceramic fibers. The liquefiable gel including: 20% to 60% of ceramic particles and 0% to 10% of metal particles, both as percentage by volume based on the volume of the liquefiable gel; 0.2% to 10% of a thermoreversible hydrocolloid and 0% to 7% of one or more other constituents, both as a percentage by weight on the basis of the total weight of the ceramic particles and metal particles; the balance to 100% being water. It being possible for the ceramic particles and the metal particles to be replaced, partially or completely, by precursors of ceramic particles and of metal particles, respectively, capable of forming, by heat treatment above 200° C., ceramic particles and metal particles, respectively.

An exemplary embodiment of the present disclosure provides a method for manufacturing a transparent ceramic material. The method comprises providing a compact comprising a metal oxide and, during sintering, exposing the compact to a vapor comprising one of or both fluorine ions and lithium ions to form a transparent ceramic material comprising at least 90% of a theoretical transparency.

The present invention relates to a suspension comprising 50-95% by weight of the total suspension (w/w) of at least one metallic material and/or ceramic material and/or polymeric material and/or solid carbon containing material; and at least 5% by weight of the total suspension of one or more fatty acids or derivatives thereof. In addition, the invention relates to uses of such suspension in 3D printing processes.

The present invention relates to a suspension comprising 50-95% by weight of the total suspension (w/w) of at least one metallic material and/or ceramic material and/or polymeric material and/or solid carbon containing material; and at least 5% by weight of the total suspension of one or more fatty acids or derivatives thereof. In addition, the invention relates to uses of such suspension in 3D printing processes.

A solid composition according to the present disclosure is a solid composition to be used for forming a functional ceramic having a crystal phase, and contains an oxide constituted by a crystal phase different from the crystal phase of the functional ceramic at normal temperature and normal pressure, and an oxoacid compound. The oxoacid compound preferably contains at least one of a nitrate ion and a sulfate ion as an oxoanion. Further, the oxide preferably has a crystal grain size of 10 nm or more and 200 nm or less.

A solid composition according to the present disclosure is a solid composition to be used for forming a functional ceramic having a crystal phase, and contains an oxide constituted by a crystal phase different from the crystal phase of the functional ceramic at normal temperature and normal pressure, and an oxoacid compound. The oxoacid compound preferably contains at least one of a nitrate ion and a sulfate ion as an oxoanion. Further, the oxide preferably has a crystal grain size of 10 nm or more and 200 nm or less.