A method of coupling two ceramic matrix composite components comprises procuring a first ceramic matrix composite component, procuring a second ceramic matrix composite component, and applying a melt alloy between the first and second ceramic matrix components. The melt alloy comprises a homogeneous mixture of two or more materials in powder form, where the two or more materials include a braze alloy comprising silicon and a high melting point material or alloy. The first and second ceramic matrix composite components and the melt alloy are heat treated to a temperature, and the temperature is maintained for a length of time, followed by cooling, thereby coupling the first and second ceramic matrix composite components.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

In one aspect, articles are described herein comprising refractory coatings employing alumina-based hybrid nanocomposite architectures. A coated article described herein comprises a substrate and a coating deposited by CVD adhered to the substrate, the coating including a composite refractory layer having a matrix phase comprising alumina and at least one particulate phase within the matrix phase, the particulate phase comprising nanoscale to submicron particles formed of at least one of an oxycarbide and oxycarbonitride of one or more metals selected from the group consisting of aluminum and Group IVB metals.

Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding materials. One embodiment of the present disclosure provides a method for fabricating a composite structure. The method includes applying a bonding material to a first component, and converting the bonding material applied to the first component to an enhanced bonding layer by heating the bonding material to outgas volatile species from the bonding material. The outgassed volatile species accumulates to at least 0.05% in mass of the bonding material. The method further includes contacting a second component and the enhanced bonding layer to join the first and second components.

According to the state of the art, piezoceramic multi-layer elements are sintered in air at temperatures of approximately 1100 DEG C or higher. Therefore, only a noble metal having a high melting temperature can be used as the inner electrode. Non-noble metals would oxidize. Therefore, a silver-palladium alloy having up to 40% palladium is normally used. However, such a measure is associated with high material costs. Lower melting temperatures of the inner electrode material, however, also require a ceramic material having correspondingly low sintering temperatures. The invention therefore proposes that an electrically non-conductive sintering additive added be added to the base material, and that the inner electrode comprise silver, preferably pure silver, as the main material component thereof, and an electrically non-conductive material component and/or a metal alloy or metal oxide mixture.

A method for the repair of a heater, or an electrostatic chuck, using a ceramic top layer joined with a hermetically sealed joint. The heater or electrostatic chuck may be machined down to remove a damaged top surface, and to allow for the joining of a new top surface. The new top pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

In some examples, a method may include depositing, from a slurry comprising particles including silicon metal, a bond coat precursor layer including the particles comprising silicon metal directly on a ceramic matrix composite substrate. The method also may include locally heating the bond coat precursor layer to form a bond coat comprising silicon metal. Additionally, the method may include forming a protective coating on the bond coat. In some examples, an article may include a ceramic matrix composite substrate, a bond coat directly on the substrate, and a protective coating on the bond coat. The bond coat may include silicon metal and a metal comprising at least one of Zr, Y, Yb, Hf, Ti, Al, Cr, Mo, Nb, Ta, or a rare earth metal.

A method for joining engine components includes positioning a first plurality of thermal protection structures across a thermal protection space between a first thermal protection surface and a second thermal protection surface. The first and second engine components are locally joined by forming a first plurality of transient liquid phase (TLP) or partial transient liquid phase (PTLP) bonds along corresponding ones of the first plurality of thermal protection structures between the first thermal protection surface and the second thermal protection surface. The second thermal protection surface is formed from a second surface material different from a first surface material of the first thermal protection surface.

A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.

A pillar shaped honeycomb structure for induction heating, the honeycomb structure being made of ceramics and including: an outer peripheral wall; and a partition wall disposed on an inner side of the outer peripheral wall, the partition wall defining a plurality of cells, each of the cells penetrating from one end face to other end face to form a flow path, wherein a composite material containing a conductor and a non-conductor is provided in the cells in a region of 50% or less of the total length of the honeycomb structure from one end face, and wherein the conductor is a conductor that generates heat in response to a change in a magnetic field.