Patent classifications
C04B38/0054
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.
Highly efficient manufacturing of silicon-carbon composites materials comprising ultra low Z
Silicon-carbon composite materials and related processes are disclosed that overcome the challenges for providing amorphous nano-sized silicon entrained within porous carbon. Compared to other, inferior materials and processes described in the prior art, the materials and processes disclosed herein find superior utility in various applications, including energy storage devices such as lithium ion batteries.
Highly efficient manufacturing of silicon-carbon composites materials comprising ultra low Z
Silicon-carbon composite materials and related processes are disclosed that overcome the challenges for providing amorphous nano-sized silicon entrained within porous carbon. Compared to other, inferior materials and processes described in the prior art, the materials and processes disclosed herein find superior utility in various applications, including energy storage devices such as lithium ion batteries.
ALUMINUM NITRIDE STRUCTURE AND METHOD FOR PRODUCING SAME
Provided is an aluminum nitride structure that includes a plurality of aluminum nitride particles, wherein aluminum nitride particles that are adjacent are bound to each other through a boehmite phase containing boehmite, and the porosity is 30% or less. Also provided is a method for producing an aluminum nitride structure that includes: obtaining a mixture by mixing an aluminum nitride powder with a solvent containing water; and pressurizing and heating the mixture under conditions of a pressure of 10 to 600 MPa and a temperature of 50 to 300° C.
ALUMINUM NITRIDE STRUCTURE AND METHOD FOR PRODUCING SAME
Provided is an aluminum nitride structure that includes a plurality of aluminum nitride particles, wherein aluminum nitride particles that are adjacent are bound to each other through a boehmite phase containing boehmite, and the porosity is 30% or less. Also provided is a method for producing an aluminum nitride structure that includes: obtaining a mixture by mixing an aluminum nitride powder with a solvent containing water; and pressurizing and heating the mixture under conditions of a pressure of 10 to 600 MPa and a temperature of 50 to 300° C.
SINTERED BODY HAVING PORES AND METHOD FOR PRODUCING THE SAME
Disclosed is a sintered body comprising (a) a matrix material comprising at least one selected from ZnS and ZnSe, (b) an oxide that is present in a form of islands in the matrix material, comprising at least one metal selected from the group consisting of Ca, Sr and Ba, and (c) pores that are present in a form of islands in the matrix material. The sintered body has sufficient strength and an infrared stealth effect in an infrared region such as a MWIR and LWIR region.
SINTERED BODY HAVING PORES AND METHOD FOR PRODUCING THE SAME
Disclosed is a sintered body comprising (a) a matrix material comprising at least one selected from ZnS and ZnSe, (b) an oxide that is present in a form of islands in the matrix material, comprising at least one metal selected from the group consisting of Ca, Sr and Ba, and (c) pores that are present in a form of islands in the matrix material. The sintered body has sufficient strength and an infrared stealth effect in an infrared region such as a MWIR and LWIR region.
Ultra-high temperature carbide foams and methods of fabricating the same
Ultra-high temperature carbide (UHTC) foams and methods of fabricating and using the same are provided. The UHTC foams are produced in a three-step process, including UHTC slurry preparation, freeze-drying, and spark plasma sintering (SPS). The fabrication methods allow for the production of any kind of single- or multi-component UHTC foam, while also providing flexibility in the shape and size of the UHTC foams to produce near-net-shape components.
Ultra-high temperature carbide foams and methods of fabricating the same
Ultra-high temperature carbide (UHTC) foams and methods of fabricating and using the same are provided. The UHTC foams are produced in a three-step process, including UHTC slurry preparation, freeze-drying, and spark plasma sintering (SPS). The fabrication methods allow for the production of any kind of single- or multi-component UHTC foam, while also providing flexibility in the shape and size of the UHTC foams to produce near-net-shape components.