C04B2235/604

SINTERED MATERIAL, SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING THE SINTERED MATERIAL

Provided are a sintered material having high corrosion resistance, a method of manufacturing the sintered material, a member for a semiconductor manufacturing apparatus, a method of manufacturing a member for a semiconductor manufacturing apparatus, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor manufacturing apparatus. The sintered material according to an embodiment includes 50 mass% or more of yttrium oxyfluoride, has a relative density of 97.0% or more, and has a Vickers hardness of 5.0 GPa or more. The method of manufacturing a sintered material according to an embodiment includes forming a molded body including yttrium oxyfluoride powder having a particle size of 0.3 .Math.m or less, and sintering the molded body under an atmospheric pressure at a temperature of 800° C. or less.

Pressure forming of metal and ceramic powders

A method of pressure forming a brown part from metal and/or ceramic particle feedstocks includes: introducing into a mold cavity or extruder a first feedstock and one or more additional feedstocks or a green or brown state insert made from a feedstock, wherein the different feedstocks correspond to the different portions of the part; pressurizing the mold cavity or extruder to produce a preform having a plurality of portions corresponding to the first and one or more additional feedstocks, and debinding the preform. Micro voids and interstitial paths from the interior of the preform part to the exterior allow the escape of decomposing or subliming backbone component substantially without creating macro voids due to internal pressure. The large brown preform may then be sintered and subsequently thermomechanically processed to produce a net wrought microstructure and properties that are substantially free the interstitial spaces.

MgF2—CaF2 binary system sintered body for radiation moderator and method for producing the same

A MgF.sub.2—CaF.sub.2 binary system sintered body for a radiation moderator having a compact polycrystalline structure excellent in radiation moderation performance, especially neutron moderation performance, comprises MgF.sub.2 containing CaF.sub.2 from 0.2% by weight to 90% by weight inclusive, having a bulk density of 2.96 g/cm.sup.3 or more, and a bending strength of 15 MPa or more and a Vickers hardness of 90 or more as regards mechanical strengths.

Sintered electrically conductive oxide, thermistor element employing the oxide, and temperature sensor employing the thermistor

A sintered electroconductive oxide having a perovskite oxide type crystal structure represented by a compositional formula: M1.sub.aM2.sub.bMn.sub.cAl.sub.dCr.sub.eO.sub.f wherein M1 represents at least one element selected from group 3 elements; and M2 represents at least one element selected from among Mg, Ca, Sr and Ba, wherein element M1 predominantly includes at least one element selected from Nd, Pr and Sm, and a, b, c, d, e and f satisfy the following relationships: 0.6005≦a<1.000, 0<b≦0.400, 0≦c<0.150, 0.400≦d<0.950, 0.050<e≦0.600, 0.50<e/(c+e)≦1.00, and 2.80≦f≦3.30. Also disclosed is a thermistor element including a thermistor portion which is formed of the sintered electroconductive oxide as well as a temperature sensor employing the thermistor element.

Metal borides and uses thereof

Disclosed herein are compounds, methods, and tools which comprise tungsten borides and mixed transition metal borides.

PROCESS FOR RAPID PROCESSING OF SiC AND GRAPHITIC MATRIX TRISO-BEARING PEBBLE FUELS
20170287577 · 2017-10-05 · ·

A method for producing microencapsulated fuel pebble fuel more rapidly and with a matrix that engenders added safety attributes. The method includes coating fuel particles with ceramic powder; placing the coated fuel particles in a first die; applying a first current and a first pressure to the first die so as to form a fuel pebble by direct current sintering. The method may further include removing the fuel pebble from the first die and placing the fuel pebble within a bed of non-fueled matrix ceramic in a second die; and applying a second current and a second pressure to the second die so as to form a composite fuel pebble.

ZIRCONIA SINTERED BODY

The present invention provides a zirconia sintered body that has less excess material to be removed when making a prosthesis by milling, providing a reduction of work time, more durability for a working tool, and a faster treatment for patients, and that undergoes little deformation during firing, and provides enhanced aesthetics. The present invention relates to a columnar zirconia sintered body having a base and a side face, the base having a surface shape that is neither square nor rectangular but has at least one straight portion.

Piezoelectric material, piezoelectric element, and electronic apparatus

The present invention provides a piezoelectric material not containing lead and potassium, having a high relative density, a high Curie temperature, and a high mechanical quality factor, and exhibiting good piezoelectricity. The piezoelectric material contains 0.04 percent by mole or more and 2.00 percent by mole or less of Cu relative to 1 mol of metal oxide represented by General formula (1) below.
((Na.sub.1-zLi.sub.z).sub.xBa.sub.1-y)(Nb.sub.yTi.sub.1-y)O.sub.3 (in Formula, 0.70≦x≦0.99, 0.75≦y≦0.99, and 0<z<0.15, and x<y)  General formula (1)

DIELECTRIC THIN FILM AND ELECTRONIC COMPONENT

A dielectric thin film containing MgO as a main component, wherein the dielectric thin film is composed of a columnar structure group containing at least one columnar structure A constructed by single crystal and at least one columnar structure B constructed by polycrystal, respectively, and in the cross section of the direction perpendicular to the dielectric thin film, when the area occupied by the columnar structure A is set as C.sub.A and the area occupied by the columnar structure B is set as C.sub.B, the relationship between C.sub.A and C.sub.B satisfies 0.4≦C.sub.B/C.sub.A≦1.1.

CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE

A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.