Patent classifications
C
CHEMISTRY; METALLURGY
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C04
CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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C04B
LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
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2237/00
Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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C04B2237/50
Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
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C04B2237/66
Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
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C04B2237/66

Multi-layer ceramic plate device
12558734 · 2026-02-24 · ·

An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.