An airfoil for a gas turbine engine is made from ceramic matrix composite materials. The airfoil has an inner surface that defines a cooling cavity in the body and an outer surface that defines a leading edge, a trailing edge, a pressure side, and a suction side of the body. The airfoil is formed with a hollow tube that extends through the body to define a cooling passage that extends from the cooling cavity through the airfoil to provide fluid communication between the cooling cavity and a gas path environment surrounding the airfoil.

A corrosion-resistant component configured for use with a semiconductor processing reactor, the corrosion-resistant component comprising: a) a ceramic insulating substrate; and, b) a white corrosion-resistant non-porous outer layer associated with the ceramic insulating substrate, the white corrosion-resistant non-porous outer layer having a thickness of at least 50 μm, a porosity of at most 1%, and a composition comprising at least 15% by weight of a rare earth compound based on total weight of the corrosion-resistant non-porous layer; and, c) an L* value of at least 90 as measured on a planar surface of the white corrosion-resistant non-porous outer layer. Methods of making are also disclosed.

A ceramic structure includes a base body, and a thermoelectric device having a part in directly contact with the base body. The base body is a ceramic consisting of aluminum oxide. The thermoelectric device comprises a conductor part that is a sintered body having an alloy of tungsten and rhenium, as a main component, and including nickel oxide, aluminum oxide and silicon dioxide.

A method for the layered production of a green body (10) from powdery material, including insert elements which are placed at defined positions in the powdery material, in which the green body (10) is segmented in a building direction (16) into N, N≥2 consecutive, cylindrical cross-sectional areas (11, 12, 13, 14, 15) made up of a two-dimensional cross-sectional surface and a layer thickness. Setting areas for the insert elements are defined in the cross-sectional areas of the green body (10) which include the defined positions for the insert elements, and loose powder particles surrounding the setting elements are at least partially bonded to each other before the insert elements are placed into the powdery material.

A coil component includes a porous ceramic portion having pores, a coil portion embedded in the porous ceramic portion, and outer electrodes which are provided on an outer surface of the porous ceramic portion and electrically connected to the coil portion. The porous ceramic portion has a porosity of 10% by volume or more and 90% by volume or less (i.e., from 10% by volume to 90% by volume), and the pores are filled with a cured product of a resin composition containing a cycloaliphatic epoxy resin and an acid anhydride-based curing agent.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A method of forming one or more high temperature co-fired ceramic articles, comprising the steps of:— a) forming a plurality of green compacts, by a process comprising dry pressing a powder comprising ceramic and organic binder to form a green compact; b) disposing a conductor or conductor precursor to at least one surface of at least one of the plurality of green compacts to form at least one patterned green compact; c) assembling the at least one patterned green compact with one or more of the plurality of green compacts or patterned green compacts or both to form a laminated assembly; d) isostatically pressing the laminated assembly to form a pressed laminated assembly; e) firing the pressed laminated assembly at a temperature sufficient to sinter the ceramic layers together.

A multilayer ceramic capacitor includes: a multilayer structure in which each of dielectric layers and each of internal electrode layers are alternately stacked, a main component of the dielectric layers being ceramic, wherein: a second-phase has an average diameter of 150 nm or less and is in at least one of interfaces between the dielectric layers and the internal electrode layers; and at least one of the internal electrode layers includes a grain of which a main component is ceramic.

A ceramic structure includes a ceramic base member having a main face; a hole extending from the main face into the ceramic base member; a metal electrode layer embedded in the ceramic base member; a conductive member embedded in the ceramic base member so as to be electrically connected to the metal electrode layer and form a bottom of the hole; a first metal member joined to the conductive member by a brazing material and having an average linear expansion coefficient not less than the average linear expansion coefficient of the conductive member; one or a plurality of second metal members having a greater average linear expansion coefficient than the first metal member; and a metal terminal joined to the one or the plurality of second metal members and having a greater average linear expansion coefficient than each second metal member.

Spherical ceramic-glass nanocomposite dielectrics made from ceramics and glasses that are separately pre-milled by mechanical ball milling using selected ball-to-powder weight ratios and combined to form a mixture that is ball milled. A stable liquid suspension of the milled mixture including an added dispersant such as polyacrylic acid to improve uniformity is spray dried through a nozzle and recovered product is annealed. The novel dielectrics have a microstructure where ceramic primary particles are uniformly distributed and fully embedded in a glass matrix. The dielectrics have a mean particle size of about 1-20 um and a sphericity of about 0.8 or higher which are suitable for fabricating multilayer ceramic capacitors for high temperature applications. The novel dielectrics afford decreased sintering temperature, enhanced breakdown strength, lower dielectric lose tangent, and lower costs. Calcium titanate zirconate with manganese-doping-based or barium titanate-based dielectric ceramics and alkali-free borosilicate glass produce superior nanocomposite dielectrics.