A ceramic structure of the present disclosure is provided with: a first member made of a single crystal of sapphire or an yttrium aluminum composite oxide; and a second member in contact with the first member, the second member being made of ceramic containing an aluminum oxide or an yttrium aluminum composite oxide as a principal component, wherein, of crystal grains constituting the second member, contact grains of the second member, which are grains in contact with the first member, include a first curved surface part that is convex toward the first member.

A rotor assembly is provided for a gas turbine engine. This rotor assembly includes a first rotor disk, a second rotor disk, a plurality of rotor blades and a plurality of disk mounts. The first rotor disk is configured to rotate about a rotational axis. The second rotor disk is configured to rotate about the rotational axis. The rotor blades are arranged circumferentially around the rotational axis. Each of the rotor blades is mounted to the first rotor disk and to the second rotor disk. The rotor blades include a first rotor blade. Each of the disk mounts connects the first rotor disk and the second rotor disk together. The disk mounts include a first disk mount that further supports the first rotor blade.

A porous ceramic laminate, which can reduce pressure loss of a fluid, includes a first porous layer and a second porous layer. The second porous layer is laminated on, in contact with or via air, the first porous layer. A part of the second porous layer is laminated on, in contact with, the first porous layer. Each of the first porous layer and the second porous layer contains a metal oxide. A ratio Da/Db of an average pore diameter Da of the first porous layer relative to an average pore diameter Db of the second porous layer is 10 or more. A proportion of a portion in which a distance between the first porous layer and the second porous layer is smaller than 1 μm is 70% or less.

A method for producing a member for a semiconductor manufacturing apparatus includes (a) a step of providing an electrostatic chuck, a supporting substrate, and a metal bonding material, the electrostatic chuck being made of a ceramic and having a form of a flat plate, the supporting substrate including a composite material having a difference in linear thermal expansion coefficient at 40 to 570° C. from the ceramic of 0.2×10.sup.−6/K or less in absolute value, and (b) a step of interposing the metal bonding material between a concave face of the supporting substrate and a face of the electrostatic chuck opposite to a wafer mounting face, and thermocompression bonding the supporting substrate and the electrostatic chuck at a predetermined temperature to deform the electrostatic chuck to the shape of the concave face.

An epitaxy substrate and a method of manufacturing the same are provided. The epitaxy substrate includes a device substrate and a handle substrate. The device substrate has a first surface and a second surface opposite to each other, and a bevel disposed between the first and the second surfaces. The handle substrate is bonded to the second surface of the device substrate, wherein the oxygen content of the device substrate is less than the oxygen content of the handle substrate, and a bonding angle greater than 90° is between the bevel of the device substrate and the handle substrate.

Methods for manufacturing composite components having complex geometries are provided. In one exemplary aspect, a method includes laying up each of a plurality of laminates to an initial shape with a substantially planar geometry or a gently curved geometry. Then, a laid up laminate is formed to a final shape for each predefined section defined by the composite component to be manufactured. Thereafter, the laminates formed to their respective final shapes are stacked to build up the complex geometry of the composite component. Next, the composite component can be cured and finish machined as necessary to form the completed composite component.

A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

A rotor assembly is provided for a gas turbine engine. This rotor assembly includes a first rotor disk, a second rotor disk, a plurality of rotor blades and a plurality of vanes. The first rotor disk is configured to rotate about a rotational axis. The first rotor disk is configured from or otherwise includes disk material. The second rotor disk is configured to rotate about the rotational axis. The rotor blades are arranged circumferentially around the rotational axis. Each of the rotor blades is axially between and mounted to the first rotor disk and the second rotor disk. The vanes are arranged circumferentially around the rotational axis and axially between the first rotor disk and the second rotor disk. The vanes include a first vane, which first vane is configured from or otherwise includes vane material that is different than the disk material.

A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

A method of producing a ceramic matrix composite component. The method includes positioning a first plurality of ceramic matrix composite plies on top of one another, disposing a filler pack on the first plurality of ceramic matrix composite plies, and positioning a second plurality of ceramic matrix composite plies on top of the filler pack. One of the first plurality of ceramic composite plies or the second plurality of ceramic composite plies includes a bend angle, to define an interstice between the plurality of ceramic matrix composite plies with the filler pack disposed in the interstice. The filler pack includes one or more sacrificial fibers disposed therein, that subsequent to removal provide a functional feature, such as a cooling manifold in the filler pack. The method further includes forming one or more channels coupled to the one or more functional features for the flow of a cooling fluid therethrough. A ceramic matrix composite is also disclosed.