A resist composition comprising a base polymer and a quencher containing a sulfonium salt having an iodized benzene ring offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.

A resist composition comprising a base polymer and a quencher containing a sulfonium salt having an iodized benzene ring offers a high sensitivity, minimal LWR and improved CDU independent of whether it is of positive or negative tone.

A metal-free catalytic oxidation system, an oxygenation method and a method for producing benzoic acid derivatives. The system includes a feed device; a tubular reactor; a plurality of venturi nozzles mounted on the tubular reactor at intervals; a tubular filter; a discharge device for a solid phase product; and an intermediate tank for reaction mixture. A low-pressure zone is formed at an output end of each of the plurality of venturi nozzles, and an oxygen inlet corresponds to the low-pressure zone; the tubular filter comprises an inner tube and an outer tube connected to each other, where the inner tube is provided with small holes for solid-liquid separation; the discharge device for the solid phase product is located at an end of the inner tube; and the intermediate tank for reaction mixture is connected to the outer tube of the tubular filter through a pipeline.

A metal-free catalytic oxidation system, an oxygenation method and a method for producing benzoic acid derivatives. The system includes a feed device; a tubular reactor; a plurality of venturi nozzles mounted on the tubular reactor at intervals; a tubular filter; a discharge device for a solid phase product; and an intermediate tank for reaction mixture. A low-pressure zone is formed at an output end of each of the plurality of venturi nozzles, and an oxygen inlet corresponds to the low-pressure zone; the tubular filter comprises an inner tube and an outer tube connected to each other, where the inner tube is provided with small holes for solid-liquid separation; the discharge device for the solid phase product is located at an end of the inner tube; and the intermediate tank for reaction mixture is connected to the outer tube of the tubular filter through a pipeline.

A metal complex is disclosed. In an embodiment a metal complex includes at least one metal atom M and at least one ligand L attached to the metal atom M, wherein the ligand L has the following structure:

##STR00001## wherein E.sup.1 and E.sup.2 are oxygen, wherein the substituent R.sup.1 is selected from the group consisting of branched or unbranched, fluorinated aliphatic hydrocarbons with 1 to 10 C atoms, wherein n=1 to 5, wherein the substituent R.sup.2 is selected from the group consisting of branched or unbranched aliphatic hydrocarbons with 1 to 10 C atoms, aryl and heteroaryl, wherein m>0 to at most 5−n, and wherein the metal M is a main group metal of groups 13 to 15 of the periodic table of elements.

Disclosed is a method for preparing a benzofuran derivative. In particular, provided is a method for preparing a benzofuran derivative, wherein according to the method provided, reaction steps required to synthesize the benzofuran substance in the prior art can be effectively shortened.

Disclosed is a method for preparing a benzofuran derivative. In particular, provided is a method for preparing a benzofuran derivative, wherein according to the method provided, reaction steps required to synthesize the benzofuran substance in the prior art can be effectively shortened.

Disclosed is a resist composition including a compound represented by formula (I), a resin having an acid-labile group and an acid generator:

##STR00001##

wherein, in formula (I), R.sup.1 represents a halogen atom or an alkyl fluoride group having 1 to 6 carbon atoms, m1 represents an integer of 1 to 5, and when m1 is 2 or more, a plurality of R.sup.1 may be the same or different from each other.

A resist composition comprising a quencher containing a sulfonium salt having the formula (A).

##STR00001##

A resist composition comprising a quencher containing a sulfonium salt having the formula (A).

##STR00001##