C07D333/46

Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blanks including actinic ray-sensitive or radiation-sensitive film, pattern forming method and photomask

An actinic ray-sensitive or radiation-sensitive resin composition includes; a compound (A) which generates an acid by irradiation with actinic rays or radiation, wherein the acid is linked with a group represented by the following general formula (M) through covalent bonding. In the formula, Y.sub.1 and Y.sub.2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group, or an acyl group. Z represents a hydrogen atom or a substituent. * represents a linking site with a residue of the compound (A) ##STR00001##

Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blanks including actinic ray-sensitive or radiation-sensitive film, pattern forming method and photomask

An actinic ray-sensitive or radiation-sensitive resin composition includes; a compound (A) which generates an acid by irradiation with actinic rays or radiation, wherein the acid is linked with a group represented by the following general formula (M) through covalent bonding. In the formula, Y.sub.1 and Y.sub.2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, an alkynyl group, an aryl group, or an acyl group. Z represents a hydrogen atom or a substituent. * represents a linking site with a residue of the compound (A) ##STR00001##

SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME

A salt represented by formula (I):

##STR00001##

wherein Q.sup.1 and Q.sup.2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group,
R.sup.1 and R.sup.2 independently each represent a hydrogen atom, a fluorine atom or a C1-C6 perfluoroalkyl group,
z represents an integer of 0 to 6,
X.sup.1 represents *C(O)O, *OC(O), *OC(O)O or O, where * represents a binding site to C(R.sup.1)(R.sup.2) or C(Q.sup.1)(Q.sup.2)-,
A.sup.1 represents a C2-C36 divalent hydrocarbon group in which a methylene group can be replaced by an oxygen atom, a sulfur atom, a carbonyl group or a sulfonyl group and in which a hydrogen atom can be replaced by a substituent,
R.sup.3 represents a hydrogen atom or a methyl group, and
Z.sup.+ represents an organic cation.

SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME

A salt represented by formula (I):

##STR00001##

wherein R.sup.1 and R.sup.2 independently each represent a C6-C18 unsubstituted or substituted aromatic hydrocarbon group,
X.sup.1 represents a C1-C12 divalent aliphatic saturated hydrocarbon group in which a methylene group can be replaced by an oxygen atom or a carbonyl group, and
A.sup. represents an organic anion.

Compound, active light sensitive or radiation sensitive resin composition, resist film using same, resist-coated mask blank, photomask, pattern forming method, method for manufacturing electronic device, and electronic device
09904167 · 2018-02-27 · ·

Provided is an active light sensitive or radiation sensitive resin composition which contains a compound (A) represented by General Formula (I) or (II): ##STR00001##
in the formulae, each of Y.sub.1 and Y.sub.2 represents a monovalent organic group; each of M.sub.1.sup.+ and M.sub.2.sup.+ represents an organic onium ion; each of X.sub.1 and X.sub.2 represents a group that is represented by S, NH, or NR.sup.1; R.sup.1 represents a monovalent organic group; each of n1 and n2 represents an integer of 1 or more; and R.sup.1 and Y.sub.1 or Y.sub.2 may bond with each other to form a ring.

Compound, active light sensitive or radiation sensitive resin composition, resist film using same, resist-coated mask blank, photomask, pattern forming method, method for manufacturing electronic device, and electronic device
09904167 · 2018-02-27 · ·

Provided is an active light sensitive or radiation sensitive resin composition which contains a compound (A) represented by General Formula (I) or (II): ##STR00001##
in the formulae, each of Y.sub.1 and Y.sub.2 represents a monovalent organic group; each of M.sub.1.sup.+ and M.sub.2.sup.+ represents an organic onium ion; each of X.sub.1 and X.sub.2 represents a group that is represented by S, NH, or NR.sup.1; R.sup.1 represents a monovalent organic group; each of n1 and n2 represents an integer of 1 or more; and R.sup.1 and Y.sub.1 or Y.sub.2 may bond with each other to form a ring.

PHOTOACID GENERATOR AND PHOTORESIST COMPOSITION INCLUDING THE SAME

A photoacid generator (PAG) and a photoresist composition, the PAG being represented by the following Chemical Formula (I):

##STR00001## wherein, in Chemical Formula (I), L is sulfur (S) or iodine (I), R.sub.3 being omitted when L is I; R.sub.1, R.sub.2, and R.sub.3 are each independently a C1 to C10 alkyl, alkenyl, alkynyl, or alkoxy group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L, or a C6 to C18 aryl, arylalkyl, or alkylaryl group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L; AL is an acid-labile group; m is 1 to 4; and M is a C1 to C30 hydrocarbon group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and a sulfur atom.

PHOTOACID GENERATOR AND PHOTORESIST COMPOSITION INCLUDING THE SAME

A photoacid generator (PAG) and a photoresist composition, the PAG being represented by the following Chemical Formula (I):

##STR00001## wherein, in Chemical Formula (I), L is sulfur (S) or iodine (I), R.sub.3 being omitted when L is I; R.sub.1, R.sub.2, and R.sub.3 are each independently a C1 to C10 alkyl, alkenyl, alkynyl, or alkoxy group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L, or a C6 to C18 aryl, arylalkyl, or alkylaryl group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L; AL is an acid-labile group; m is 1 to 4; and M is a C1 to C30 hydrocarbon group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and a sulfur atom.

Compound useful for manufacturing salacinol, method for manufacturing the compound, method for manufacturing salacinol, methods for protecting and deprotecting diol group, and protective agent for diol group

An object of the present invention is to provide a novel compound useful for manufacturing salacinol, a method for manufacturing the compound, a method for manufacturing salacinol, methods for protecting and deprotecting a diol group, and a protective agent for a diol group. A compound represented by Formula (1) is a compound useful for manufacturing salacinol. ##STR00001## (In the formula, each of R.sup.1a and R.sup.1b is a hydrogen atom or a hydroxy protective group; R.sup.2 is a hydroxy group or the like; and R.sup.3 is a hydroxy group or the like.)

Compound useful for manufacturing salacinol, method for manufacturing the compound, method for manufacturing salacinol, methods for protecting and deprotecting diol group, and protective agent for diol group

An object of the present invention is to provide a novel compound useful for manufacturing salacinol, a method for manufacturing the compound, a method for manufacturing salacinol, methods for protecting and deprotecting a diol group, and a protective agent for a diol group. A compound represented by Formula (1) is a compound useful for manufacturing salacinol. ##STR00001## (In the formula, each of R.sup.1a and R.sup.1b is a hydrogen atom or a hydroxy protective group; R.sup.2 is a hydroxy group or the like; and R.sup.3 is a hydroxy group or the like.)