Patent classifications
H
H10
H10W
72/00
H10W72/581
SEMICONDUCTOR PACKAGES WITH PLASMA-ETCHED SCALLOPS
In examples, a semiconductor package includes a substrate including a first opening; a first semiconductor die coupled to the substrate and including a microelectromechanical systems (MEMS) membrane, the first semiconductor die including a scalloped outer surface having multiple concavities; a second semiconductor die coupled to the substrate and configured to control the first semiconductor die; bond wires coupling the first and second semiconductor dies to the substrate; and a protective enclosure covering the substrate, the first and second semiconductor dies, and the bond wires.