A system and method for maintaining, monitoring and improving air quality and purity in a room or environment, such as a hospital room or operating room.

Articles and methods involving filter media are generally provided. In certain embodiments, the filter media includes at least a first layer, a second layer, and an adhesive resin positioned between the first layer and the second layer. In some embodiments, the first layer may be a pre-filter layer or a support layer. The second layer may, for example, comprise fibers formed by a solution spinning process and/or may comprise fine fibers. In some embodiments, the adhesive resin may be present in a relatively low amount and/or may have a low glass transition temperature. The filter media as a whole may have one or more advantageous properties, including one or more of a high stiffness, a high bond strength between the first layer and the second layer, a high gamma, and/or a low increase in air resistance after being subjected to an IPA vapor discharge. The filter media may be, for example, a HEPA filter and/or an ULPA filter.

A HEPA/VOC air handling system is disclosed. It has a HEPA air filtration unit and an air handling unit. The HEPA air filtration unit has a fresh air intake, an inside air intake, a pre-filter unit, a HEPA air filter, and HEPA fan. The HEPA fan draws fresh air and inside air into a HEPA chamber to form combined air that moderates the fresh air toward the inside air's temperature and humidity to inhibit shocking or damaging the components in the HEPA air filtration unit. The combined air passes through the pre-filter unit and then the HEPA air filter to form HEPA filtered combined air. The air handling unit has a HEPA filtered combined air intake, a return air intake, an air handling device fan, and a supply outlet wherein the HEPA filtered combined air mixes with the return air to (A) form mixed air and (B) further moderate the HEPA filtered combined air toward the return air's temperature and humidity to inhibit shocking or damaging the components in the air handling device, and the rooms that receive the mixed air.

The disclosed apparatus make possible the maintenance, repair, alteration, and upgrade of walls and wall mounted facilitates within hospitals and cleanrooms while occupying a minimum area. In one embodiment the apparatus is a six-sided box with an open side, a transparent side, and a side with two hand ports. To operate, the apparatus is placed, from the open side, against the wall or the wall facility that needs repair or upgrade. Afterwards the air inside the apparatus is vacuumed to lower the air pressure with respect to the surrounding pressure before the hands of a repairman enters the apparatus through the two hand ports. Repair can start at this time while the apparatus maintains a negative inside air pressure and while no particles of contaminants can escape the apparatus. The vacuumed air may be released back into the room or hallway after it is filtered.

A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.

A mask machine protection frame device with function of air filtering includes an outer frame being a hollow frame for receiving a mask machine therein; an outlook of the outer frame; and at least one air filter installed at an upper side of the outer frame for sucking outer air into the outer frame; the air filter including at least one fan and at least one filter device; the fan serving to suck outer air into the filter device for air filtering so as to flow out clean air; and the clean air then flowing to the mask machine. The outer frame can be installed with at least one fire proof plate and a surface of the fire proof plate is coated with an anti-electric static layer.

An apparatus for collecting a by-product, includes: a chamber provided with a gas inlet and a gas outlet and having an internal space; a heater disposed on the gas inlet side of the internal space within the chamber and varying a heating temperature in time series; a vortex forming member disposed around the heater; a plurality of first collecting members disposed below the heater; a second collecting member disposed below the first collecting member so that a plurality of second collecting members intersect each other; and a third collecting member disposed on the gas outlet side of the internal space within the chamber.

A system includes a filter purge apparatus configured to supply a flushing gas to a portion of a factory interface chamber located upstream of a chamber filter to minimize moisture contamination of the chamber filter by ambient air. The filter purge apparatus is configured to supply the flushing gas in association with breach of the factory interface chamber which compromises controlled environment of the factory interface chamber.

An improved isolation ward structure includes a top portion further comprising a space, a fresh-air pipe, a communication pipe and a an exhaust-connected pipe wherein the space is furnished with an air filtration unit (FFU); an end of the communication pipe is communicated with the fresh-air pipe while its other end is communicated with the air filtration unit (FFU), an end of the exhaust-connected pipe is communicated with the fresh-air pipe; a bedroom being positioned under the air filtration unit (FFU) will let the air which is filtered through the air filtration unit (FFU) enter the bedroom; a bottom portion being positioned under the bedroom has a semi-hermetic space formed by the plurality of elevated honeycomb floors; the air within the bedroom will enter the semi-hermetic space which will let the pathogenic air within the bedroom (10) flow therein via the plurality of honeycomb floors (22) and re-circulate through the air filtration unit (FFU) to be filtered; and a backflow circulation portion being positioned above the semi-hermetic space and below the space with its upper end communicates with the other end of the exhaust-connected pipe; the backflow circulation portion is adjacent to the bedroom for re-circulating the air waited to be filtered within the semi-hermetic space to the fresh-air pipe therein.

An air mover for forcing air through the system, a pre-treating stage with a particulate filter for removing larger contaminants from the air and an antimicrobial (e.g., copper and silver) filter for killing or damaging microorganisms, a UV chamber including an ultraviolet lamp that emits radiation and a catalytic (e.g., TiO.sub.2-coated) device and a reflective (e.g., mirror-finish anodized aluminum) lining for amplifying the UV radiation for killing microorganisms, a post-UV stage including a VOC-reducing (e.g., activated-charcoal) filter for removing odors and VOCs from the air, and optionally a supply of a surface disinfectant (e.g., ClO.sub.2). In example embodiments, the UV lamps and VOC filters are selected and configured for controlling microbial pathogens, and in other example embodiments they are selected and configured for removing ethylene from the air.