Methods related generally to the removal of atmospheric pollutants from the gas phase, are provided, as well as related apparatus, processes and uses thereof. A single-stage air scrubbing apparatus is provided that includes at least one reaction vessel, at least one introduction duct, and a turbulence component, wherein a residence time is sufficient to allow the conversion of at least one atmospheric pollution compound to at least one other compound, molecule or atom. In some embodiments, the at least one atmospheric pollution compound comprises nitrogen oxide, sulfur oxide or a combination thereof. Additionally, methods of removing atmospheric pollution compounds from a waste gas stream are disclosed that include introducing a waste gas stream and at least one additional gas stream, mist stream, liquid stream or combination thereof into a single-stage air scrubbing apparatus at a flow rate sufficient to allow for conversion of the at least one atmospheric pollution compound.

A system for directly capturing and measuring greenhouse gasses from a mixture of gasses over a wide range of concentrations from ambient air to combustion exhaust products including: an emissions capture reaction vessel; a reaction media container configured to house a volume of reaction media, the reaction media configured to extract a constituent gas from gas flowing through the emissions capture reaction vessel and capture constituent gas; an intake and exhaust manifold configured to receive and release, respectively a portion of a gas stream via a first access tap on the exhaust stack; a computer system comprised of sensors and actuators connected to a network to directly measure efficiency and uptake of a system, and a fan arranged within the housing and configured to influence the amount and speed of the gas stream processed.

Some embodiments of the disclosure correspond to, for example, a method for controlling a scrubber containing an adsorbent. The scrubber may be configured to cycle between scrubbing at least one pollutant/gas from a stream of gases with the pollutant/gas being adsorbed onto the adsorbent, and regenerating at least some of the adsorbent and thereby purging at least some of the one pollutant and/or first gas from the adsorbent via a regeneration gas flow. The method may include flowing a stream of gases through the scrubber, the scrubber including the adsorbent and adsorbing at least some of the one pollutant/gas from the stream of gases onto the adsorbent during an adsorption phase over a first time period. The method may also include purging at least a portion of the one pollutant/gas from the adsorbent during a regeneration phase over a second time period with a regeneration gas flow, and cycling therebetween.

A gas processing apparatus includes a duct, a partition plate and a liquid supply. The duct has therein a flow path through which a gas passes. The partition plate is configured to divide the flow path into multiple spaces, and is formed of a porous material, through which the gas passes, configured to retain a liquid. The liquid supply is configured to supply a dissolving liquid configured to dissolve a target component contained in the gas to the partition plate. The gas passing through the flow path is brought into contact with the dissolving liquid retained in the partition plate.

A substrate processing apparatus includes processing units, an exhaust path, a gas processing apparatus and a controller. Each processing unit is configured to process a substrate by using a chemical. A gas exhausted from the processing units flows through the exhaust path. The gas processing apparatus is provided in the exhaust path to remove a target component contained in the gas. The gas processing apparatus includes a duct, a partition plate and a liquid supply. The duct has therein a flow path. The partition plate divides the flow path into spaces, and is formed of a porous material, through which the gas passes, configured to retain a liquid. The liquid supply is configured to supply a dissolving liquid configured to dissolve the target component to the partition plate. The controller adjusts a flow rate of the dissolving liquid according to operation information indicating an operational status of the processing units.

Embodiments may include a hydrogen sulfide scrubber system that includes a charging chamber, a reaction vessel, and a treated gas trap. Embodiments may include a mobile vehicle, vessel, or platform that includes a mobile vehicle, vessel, or platform with a mounted hydrogen sulfide scrubber system. The hydrogen sulfide scrubber system is configured as previously described. Embodiments may include a method of using a hydrogen sulfide scrubber system.

Disclosed is a hybrid system of carbon dioxide compact separation membrane and carbon recycling for an urban power plant for effluent carbon dioxide concentration control, including a blower into which an exhaust gas is input and which distributes the exhaust gas, a photo-culture process unit which receives the exhaust gas from the blower, performs a photo-culture process using microalgae, and discharges a first treatment gas, a mixing tank into which the exhaust gas supplied from the blower and the first treatment gas are input, a separation membrane process unit which receives a second treatment gas mixed in the mixing tank, and separates a third enriched gas from the second treatment gas using a plurality of separation membranes, a mineralization reaction unit which mineralizes carbon dioxide using the third enriched gas separated in the separation membrane process unit and discharges a third treatment gas to the mixing tank, a sensor unit which measures a carbon dioxide concentration discharged from each process using a plurality of sensors, and a control unit which controls operations of the photo-culture process unit, the separation membrane process unit and the mineralization reaction unit according to a carbon dioxide content of the inflow exhaust gas.

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.

A gas treatment device that treats a gas to be treated, including oxygen, introduced at a gas inlet and that exhausts a treated gas at a gas outlet, the gas treatment device includes: a gas channel that communicates the gas inlet with the gas outlet; a blower that allows the gas to be treated to flow from the gas inlet to the gas outlet; an ultraviolet light source that is disposed in the gas channel and radiates ultraviolet light having a wavelength of 230 nm or less; a filter that is disposed at a side at which the gas outlet is located from the ultraviolet light source in the gas channel, and that adsorbs at least ozone; and a control unit that controls the blower to operate, wherein the control unit controls the blower to start a blowing operation after the ultraviolet light source starts radiating the ultraviolet light.

A system and method for filtering exhaust gases of a vehicle is disclosed, that are based on an exhaust filter assembly includes an enclosure having an inlet coupled with an end of an exhaust pipe to allow exhaust gases of the vehicle into the enclosure, a filter element fitted with the enclosure to adsorb gaseous particles, moisture, and unburned fuel mist particles of the exhaust gases, sensors to sense gaseous particles adsorbed on the filter element, and generate first signals based on the sensed gaseous particles; a control unit; and a communication unit. The control unit includes processors to: receive the generated first signals, and generate second signals based on the received first signals. The communication is configured to transmit the second signals to computing devices of users to notify the users. Thermoelectric generator is adapted to convert heat energy of the exhaust gases into electric power.