A method for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the method comprising: delivering a cleaning liquid over a surface of a semiconductor wafer during a cleaning process; and imparting sonic energy to the cleaning liquid from a sonic transducer during the cleaning process, wherein power is alternately supplied to the sonic transducer at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, the first predetermined period of time and the second predetermined period of time consecutively following one another, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.

An ultrasonic vibrator driving apparatus performs driving by applying an alternating voltage as a drive voltage to an ultrasonic vibrator that includes a piezoelectric element and has a unique resonance frequency. The drive voltage is generated with a variable frequency in a frequency range including the resonance frequency of the ultrasonic vibrator. The frequency of the drive voltage is repeatedly swept with a predetermined sweep width and a predetermined sweep period so as to include the resonance frequency, based on a reference frequency set according to the resonance frequency of the ultrasonic vibrator. The sweep period and the sweep width are restricted by being associated so as to fall within a predetermined allowed range on a two-dimensional map divided by the sweep period and the sweep width.

A system and method include vibrating a needle of a phacoemulsification handpiece by driving one or more piezoelectric crystals in the handpiece with one or more electrical signals having different respective frequencies using one or more respective drive modules. The needle is inserted into an eye of a patient. The frequencies of the electrical signals are tuned to respective one or more target frequencies, and respective electrical impedances seen by the drive modules are registered. In response to an electrical impedance seen by at least one of the drive modules undergoing a change exceeding a preset impedance change, an indication is provided that material in the eye surrounding the needle has changed, a level of vibration of the needle is changed, and/or the frequency of at least one of the drive modules is adjusted to an electrical resonant frequency thereof.

A system includes an enclosure, an irrigation retainer, one or more sensors, and a processor. The irrigation retainer is coupled with the enclosure and configured to accept an irrigation container holding irrigation fluid for pumping to a phacoemulsification handpiece. The one or more sensors are coupled with the irrigation retainer and configured to provide at least one signal indicative of a remaining amount of the irrigation fluid. The processor is configured to receive the at least one signal, and in response to the at least one signal, output an estimation of the remaining amount of the irrigation fluid in the irrigation container or an estimation of the amount of irrigation fluid used.

An eye surgery system includes an Input/Output (I/O) device and a processor. The I/O device is configured to enable a user to define one or more eye surgery protocols, and further configured to, using the I/O device, present a graphical user interface (GUI) that displays one or more user defined eye surgery protocols. The processor is configured to (a) present the one or more user defined eye surgery protocols on the I/O device using the GUI, (b) test compatibility of the one or more user defined eye surgery protocols with the eye surgery system, and (c) provide an indication of the compatibility to a user of the eye surgery system.

Techniques are disclosed for systems and methods to provide accurate and reliable compact sonar systems for mobile structures. A sonar system includes multiple sensor channels, each comprising a sonar transmitter and a sonar receiver, and a logic device configured to provide control signals and receive sensor signals from the sensor channels. The logic device is configured to provide transmission signals to sonar transducer assemblies, where signal patterns of the transmission signals are differentiated based at least in part on frequency content. Acoustic returns are processed using the signal patterns to reduce inter-channel pickup between the sensor channels. Resulting sonar data and/or imagery may be displayed to a user and/or used to adjust a steering actuator, a propulsion system thrust, and/or other operational systems of the mobile structure.

The invention relates to devices and methods in the field of mechanical vibrational energy therapy, in particular oscillation stimulation of a subject. A device comprises a housing and the housing comprises a contact surface for being put in contact with the subject; a sensor element configured to detect a contact between the contact surface and the subject and optionally to transform a contact pressure between the contact surface of the device and the subject to which the mechanical vibrational energy is to be applied into a pressure dependent output signal; and a transducer configured to convert an electric input signal into an axial oscillatory motion of a mass, wherein the transducer comprises a coil and a permanent magnet, wherein the mass can be moved relative to the housing, wherein the relative movement of the mass is configured to cause at least the contact surface to vibrate, and wherein the mass comprises the permanent magnet.

A method is in particular a computer-implemented method and comprises a step S3 of detecting a contact between the device as described and the subject and generating an output signal, wherein a characteristic of the output signal is different in case a contact is detected compared to a case in which no contact is detected. The method comprises further a step S5 of comparing the characteristic of the output signal with a pre-set threshold value.

Apparatus for controlling algae and bio-organisms in bodies of fluids, such as water. The algae control system includes a power unit and a transducer unit that includes a sonic head that radiates in multiple directions. The power unit connects to various power sources, including a mains supply connection, a solar panel array, and/or a battery. The power unit is electrically connected to the transducer unit. The sonic head includes a driver and a transducer subassembly. The driver excites the transducer assembly to emit ultrasonic waves at various frequencies with varying durations of on/off periods. Emissions at a high density of frequencies are enabled by the transducers. The frequencies include the critical structural resonant frequency for each microorganism to be controlled. The power unit and driver each include a processor in communication with each other. The processors store and execute a program for a selected application configuration.

In some embodiments according to the present disclosure, methods for mitigating particle retention are provided including the use of frequency sweep excitation to eject particle in the sweep. In some embodiments according to the present disclosure, the acoustically driven fluid ejector can be capable of being switched between multiple modes of operation. In other embodiments according to the present disclosure, the acoustically driven fluid ejector can be altered such that it includes the capability to be filled with a biocompatible material to aid in the mitigation of particle aggregation in the acoustically driven fluid ejector. In some embodiments according to the present disclosure, the solid structure and number of nozzles of the acoustically driven fluid ejector can be adjusted such that the ejector of the acoustically driven fluid ejector can be self-pumping, i.e. no external pumping mechanism other than acoustics driven flow drag is used.

A vibration control device is provided which enables an awakening effect for a user to be increased while making it difficult to give discomfort to the user. A harmonic signal generating section of a vibration control device is configured to successively output a plurality of alternating signals for driving a vibration unit. By way of the plurality of alternating signals which is successively output and has a frequency ratio represented with a predetermined integer ratio, vibration generated with the plurality of alternating signals can more easily awaken a user while making it difficult to give discomfort to the user.