A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.

A system for laser processing includes a plate assembly having a first plate, a second plate secured to the first plate, and a pressure chamber located between the plates, a connector extending into and in fluid communication with the pressure chamber, and a fixture having a first end attached to the second plate of the plate assembly, a second end having surface having at least one opening and shaped to fit a part to be retained and laser processed, and a conduit extending therethrough in fluid communication with the pressure chamber and the at least one opening. During use, a pressure generated by a pump may be communicated to the conduit of the fixture through the pressure chamber to provide pressure (e.g., a suction effect) at the opening(s) to secure the part in place, e.g., with respect to another part, so they can be laser processed.

A system for laser processing includes a plate assembly having a first plate, a second plate secured to the first plate, and a pressure chamber located between the plates, a connector extending into and in fluid communication with the pressure chamber, and a fixture having a first end attached to the second plate of the plate assembly, a second end having surface having at least one opening and shaped to fit a part to be retained and laser processed, and a conduit extending therethrough in fluid communication with the pressure chamber and the at least one opening. During use, a pressure generated by a pump may be communicated to the conduit of the fixture through the pressure chamber to provide pressure (e.g., a suction effect) at the opening(s) to secure the part in place, e.g., with respect to another part, so they can be laser processed.

In order to create a laser tool, in particular for the structuring of cylinder running surfaces, that offers the possibility of adjusting the focal position of the laser beam with high process reliability and with high repeatability, it is provided that the laser tool has a laser source for producing laser beams, a collimator for producing a parallel course of the laser beams from the laser source, which are passed through a lens that is located within a rotatable spindle, wherein an optical device for deflecting the laser beams onto a material surface is attached to an end of the spindle facing away from the laser source, wherein the collimator is movable parallel to the laser beam by means of a drive.

In order to create a laser tool, in particular for the structuring of cylinder running surfaces, that offers the possibility of adjusting the focal position of the laser beam with high process reliability and with high repeatability, it is provided that the laser tool has a laser source for producing laser beams, a collimator for producing a parallel course of the laser beams from the laser source, which are passed through a lens that is located within a rotatable spindle, wherein an optical device for deflecting the laser beams onto a material surface is attached to an end of the spindle facing away from the laser source, wherein the collimator is movable parallel to the laser beam by means of a drive.

Machining device (100) comprising: a light source (33); an optial system (2) for obtaining a spatially offest outgoing light beam (7) remaining parallel to a given position upstream focusing means (9), said optical system (2) comprising: a movable mirror (19) such that its normal is able to depict a trajectory in a three-dimensional space, said optical system (2) being configured such that said first incident light beam (4) and said normal to the movable mirror (19) are separated by an angle (15) comprised between 0° and 15° for all possible positions and orientations of said movable mirror (19); driving means (6) for moving said movable mirror (19); a retro refletion system (21) able to provide a second incident light beam (8) parallel to a first refelected light beam (23) on said movable mirror (19); focusing means (9) for focusing outgoing light beam (7) on a target (10).

Machining device (100) comprising: a light source (33); an optial system (2) for obtaining a spatially offest outgoing light beam (7) remaining parallel to a given position upstream focusing means (9), said optical system (2) comprising: a movable mirror (19) such that its normal is able to depict a trajectory in a three-dimensional space, said optical system (2) being configured such that said first incident light beam (4) and said normal to the movable mirror (19) are separated by an angle (15) comprised between 0° and 15° for all possible positions and orientations of said movable mirror (19); driving means (6) for moving said movable mirror (19); a retro refletion system (21) able to provide a second incident light beam (8) parallel to a first refelected light beam (23) on said movable mirror (19); focusing means (9) for focusing outgoing light beam (7) on a target (10).

A method of manufacturing a flexible device includes joining a first surface of a support substrate to a back surface of a flexible substrate, the first surface being opposite to a second surface of the support substrate; forming an element layer on a front surface of the flexible substrate; and performing multidirectional oblique irradiation of an interface and its vicinity between the support substrate and the flexible substrate with laser light from the second surface of the support substrate to detach the support substrate from the flexible substrate.

Methods and apparatus for separating substrates are disclosed, as are articles formed from the separated substrates. A method of separating a substrate having first and second surfaces includes directing a beam of laser light to pass through the first surface and, thereafter, to pass through the second surface. The beam of laser light has a beam waist located at a surface of the substrate or outside the substrate. Relative motion between the beam of laser light and the substrate is caused to scan a spot on a surface of the substrate to be scanned along a guide path. Portions of the substrate illuminated within the spot absorb light within the beam of laser light so that the substrate can be separated along the guide path.

Methods and apparatus for extending the lifetime of optical components are disclosed. A beam of laser energy directed along a beam path that intersects a scan lens, through which it can be transmitted. The beam path can be deflected within a scan region of the scan lens to process a workpiece with the laser energy transmitted by the scan lens. The scan region can be shifted to a different location within the scan lens, e.g., to delay or avoid accumulation of laser-induced damage within the scan lens, while processing a workpiece.