A machining device is adapted to be provided on a mount provided with a toolholder. The toolholder is controllable to rotate and is adapted to be engaged with a tool. A primary coil engaged with the toolholder includes a first ferrite core and a first coil assembly detachably engaged with the first ferrite core. The first coil assembly is modular molded, and is adhered to be an annular body having a first hollow portion. A piezoelectric actuator is electrically connected to the primary coil to drive the tool to vibrate. The secondary coil includes a second ferrite core and a second coil assembly detachably engaged with the second ferrite core. The second coil assembly is modular molded to be an annular body having a second hollow portion.

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

A position adjustment device for adjusting the height of an object to be supported includes: a fixed portion; a movable portion provided to be movable in the height direction relative to the fixed portion and supporting the object to be supported; an expanding and contracting portion coupled to the fixed portion and the movable portion and configured to expand and contract in the height direction; an adjustment mechanism configured to adjust the position of the movable portion in the height direction relative to the fixed portion; and a metal member fixed to the fixed portion and the movable portion.

A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.

A positioning apparatus comprises a base element provided for fastening to a robot, a base movably supported at the base element, and a piezoactuator by which the base is movable in a direction relative to the base element. A second piezoactuator is provided by which a counterweight is simultaneously movable in an opposite direction.

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

A device for microscopically precise positioning and guidance of a measurement or manipulation element in at least two spatial axes, comprising an outer base with side walls defining a base interior, and an xy-stage having side walls and mounting means for at least one measurement or manipulation element, the xy-stage being arranged inside of the base interior and being displaceable in an XY-plane relative to the outer base. The xy-stage is coupled to the outer base with bending elements, and with actuators designed for displacing the xy-stage relative to the outer base. The outer base is provided with at least one stiffening element rigidly connected to the side walls of the outer base, and/or that the xy-stage is provided with at least one stiffening element rigidly connected to the side walls of the xy-stage.

A drive device for a vibration actuator, which makes it possible to perform low-speed and stable driving and expand a dynamic range of driving speed, includes first and second switching circuits, a position detection sensor, and a microprocessing unit (MPU). The first switching circuit and the second switching circuit apply a first drive signal and a second drive signal, for exciting vibration, to an electromechanical energy conversion element of a vibrating body. The position detection sensor acquires information on a relative position between the vibrating body and a driven body in press contact with each other. The MPU switches the first and second drive signals to third drive and fourth drive signals, respectively, based on the acquired information, to thereby change a position at which a highest one of peaks of amplitude of vibration excited in the vibrating body is formed.

A drive device for a vibration actuator, which makes it possible to perform low-speed and stable driving and expand a dynamic range of driving speed, includes first and second switching circuits, a position detection sensor, and a microprocessing unit (MPU). The first switching circuit and the second switching circuit apply a first drive signal and a second drive signal, for exciting vibration, to an electromechanical energy conversion element of a vibrating body. The position detection sensor acquires information on a relative position between the vibrating body and a driven body in press contact with each other. The MPU switches the first and second drive signals to third drive and fourth drive signals, respectively, based on the acquired information, to thereby change a position at which a highest one of peaks of amplitude of vibration excited in the vibrating body is formed.