A machine tool includes a main spindle movably supported in an axial direction, and two gang tool posts disposed opposed to each other with an axis of the main spindle located therebetween. Each of the two gang tool posts is supported movably in X and Y directions that are perpendicular to the axial direction of the main spindle. Each of the two gang tool posts is provided with tools arranged parallel to each other in the Y direction. One of the two gang tool posts is movably disposed in a Z direction that is a same direction as the axial direction of the main spindle. Any one of the two gang tool posts is integrally provided with a turning tool base that turnably supports tools about a Y-axis along the Y direction.

A servo control device controls a combined position of a first servo system and a second servo system having higher response than response of the first servo system. The servo control device includes a first axis target value creation unit and a correction unit. The first axis target value creation unit creates a first axis target value based on a combined command value which is a position command value of the combined position. The correction unit converts the first axis target value into a first axis command value by using a first transfer function. In addition, the correction unit converts the first axis target value by using a second transfer function, and calculates a second axis command value by subtracting the converted first axis target value from the combined command value. The product of the first transfer function and a first model transfer function which models characteristics of the first servo system is equal to the product of the second transfer function and a second model transfer function which models characteristics of the second servo system.

A cooling lubricant supply device for supply of a cooling lubricant to a grinding wheel is rotatably mounted as a tool on a grinding spindle of a processing unit in a grinding machine. The device has a feed shoe, which is mounted at least indirectly on a grinding spindle housing and seated on a circumferential surface of the grinding wheel and which has a seating surface facing the grinding wheel. The seating surface has a shape substantially complementary with the circumferential surface of the grinding wheel and is provided centrally with a pocket-like recess into which the cooling lubricant can be fed under pressure. A spring mechanism is provided, by which the feed shoe is biased with the seating surface thereof against the circumferential surface of the grinding wheel.

The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.

A machining unit for machining, in particular turning and/or milling, workpieces, in particular elongate workpieces, in particular shafts, includes a machining tool. The machining tool can be moved along at least two different, in particular combined, motion paths in a motion plane. The machining until also includes at least one drive unit, which is designed for moving the machining tool along a first motion path and along a second motion path, which is different from the first motion path, possibly in a combined manner.

The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large load-bearing guide mechanism comprises: a rigid frame for generating a large-stroke displacement to realize high-speed motion; a core motion platform connected with a motion portion of a non-contact actuator, connected with the rigid frame by a primary flexible hinge group and a secondary flexible hinge group, and used for generating a small-stroke precise displacement by elastic deformation of the flexible hinge groups under driving of the actuator.

A servo control device controls a combined position of a first servo system and a second servo system having higher response than response of the first servo system. The servo control device includes a first axis target value creation unit and a correction unit. The first axis target value creation unit creates a first axis target value based on a combined command value which is a position command value of the combined position. The correction unit converts the first axis target value into a first axis command value by using a first transfer function. In addition, the correction unit converts the first axis target value by using a second transfer function, and calculates a second axis command value by subtracting the converted first axis target value from the combined command value. The product of the first transfer function and a first model transfer function which models characteristics of the first servo system is equal to the product of the second transfer function and a second model transfer function which models characteristics of the second servo system.

Machine for laser processing of relatively large workpieces, the processing comprising a stationary process and a scanning process comprises: a mechanical stage configured to hold the workpiece; a stage controller configured to operate the mechanical stage; a scanner configured to scan a laser beam over the workpiece; and a scanner controller configured to operate the scanner. The stage controller operates the stationary process by moving either one of the workpiece or the processing device. The scanner controller operates the scanning process by scanning a beam over the workpiece, and also moving the mechanical stage, which is done via the stage controller. The stage controller is thus enslaved to the scanner controller during the scanning process but remains independent of the scanner controller during the stationary process.