Patent classifications
C01B33/146
Modified colloidal silica and method for producing the same, and polishing agent using the same
To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica. Modified colloidal silica, being obtained by modifying raw colloidal silica, wherein the raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
Modified colloidal silica and method for producing the same, and polishing agent using the same
To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica. Modified colloidal silica, being obtained by modifying raw colloidal silica, wherein the raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
SURFACE MODIFIED SILANIZED COLLOIDAL SILICA PARTICLES
Modified silanized colloidal silica particles are reaction products of silanized colloidal silica particles having epoxy moieties with a nitrogen of an amino group of an amino acid to form stable modified silanized colloidal silica particles. The modified silanized colloidal silica particles can be used as an abrasive in chemical mechanical polishing of various substrates.
SURFACE MODIFIED SILANIZED COLLOIDAL SILICA PARTICLES
Modified silanized colloidal silica particles are reaction products of silanized colloidal silica particles having epoxy moieties with a nitrogen of an amino group of an amino acid to form stable modified silanized colloidal silica particles. The modified silanized colloidal silica particles can be used as an abrasive in chemical mechanical polishing of various substrates.
Method for producing chain-like particle dispersion, and dispersion of chain-like particles
There is provided a production method of a chain silica particle dispersion. This production method includes a dispersion preparation step of hydrolyzing alkoxysilane in the presence of ammonia to prepare a silica particle dispersion, an ammonia removal step of removing the ammonia from the silica particle dispersion such that an ammonia amount relative to silica contained in the silica particle dispersion is 0.3% by mass or less, and a hydrothermal treatment step of hydrothermally treating the silica particle dispersion having a silica concentration of 12% by mass or more, from which the ammonia has been removed, at a temperature of not lower than 150° C. and lower than 250° C. An abrasive including such chain silica particles is high in polishing rate and excellent in polishing properties.
Silica fiber compositions and methods of use
Embodiments of the invention include silica fiber compositions useful for treatment of animal wounds and tissue, as well as for other applications in industry. The fiber compositions may be formed via electrospinning of a sol gel produced with a silicon alkoxide reagent, such as tetraethyl ortho silicate, alcohol solvent, and an acid catalyst.
METHOD FOR PRODUCING SILICA AEROGEL BLANKET AND APPARATUS FOR PRODUCING SAME
The present invention relates to a method for producing a silica aerogel blanket and an apparatus for producing the same, which are capable of easily controlling the physical properties of a silica aerogel blanket by separately injecting silica sol and a gelation catalyst to control gelation time, improving aerogel pore structure to be uniform and improving thermal insulation performance by sufficiently and uniformly impregnating the silica and the gelation catalyst into a blanket, reducing the loss of silica sol and gelation catalyst by allowing the silica sol and the gelation catalyst to pass on an ascending slope before gelation to remove any excessive silica sol and gelation catalyst exceeding an appropriate impregnation amount, and providing a silica aerogel blanket having less process trouble, and less dust.
METHOD FOR PRODUCING SILICA AEROGEL BLANKET AND APPARATUS FOR PRODUCING SAME
The present invention relates to a method for producing a silica aerogel blanket and an apparatus for producing the same, which are capable of easily controlling the physical properties of a silica aerogel blanket by separately injecting silica sol and a gelation catalyst to control gelation time, improving aerogel pore structure to be uniform and improving thermal insulation performance by sufficiently and uniformly impregnating the silica and the gelation catalyst into a blanket, reducing the loss of silica sol and gelation catalyst by allowing the silica sol and the gelation catalyst to pass on an ascending slope before gelation to remove any excessive silica sol and gelation catalyst exceeding an appropriate impregnation amount, and providing a silica aerogel blanket having less process trouble, and less dust.
MODIFIED COLLOIDAL SILICA AND METHOD FOR PRODUCING THE SAME, AND POLISHING AGENT USING THE SAME
To provide modified colloidal silica capable of improving the stability of the polishing speed with time when used as abrasive grains in a polishing composition for polishing a polishing object that contains a material to which charged modified colloidal silica easily adheres, such as a SiN wafer, and to provide a method for producing the modified colloidal silica.
Modified colloidal silica, being obtained by modifying raw colloidal silica, wherein
the raw colloidal silica has a number distribution ratio of 10% or less of microparticles having a particle size of 40% or less relative to a volume average particle size based on Heywood diameter (equivalent circle diameter) as determined by image analysis using a scanning electron microscope.
Composite sols
A colloidal dispersion of particles of silica having a particle size of from 3 nm to 100 nm, to which ions of one or more metals are adsorbed, selected from metals having atomic numbers 21-31, 39-46, 48-50, 57-82, and 89-93, and a method for preparing the dispersion. The dispersion may be used in various fields of use of metals.