An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.

An embodiment of the present invention relates to a silicon-based carbon composite, a preparation method therefor, and an anode active material for a lithium secondary battery, comprising same, and, more specifically, the silicon-based carbon composite of the present invention is a silicon-based carbon composite having a core-shell structure, wherein the core comprises silicon, silicon oxide compound and magnesium silicate, the shell comprises at least two carbon layers comprising a first carbon layer and a second carbon layer, and the second carbon layer is reduced graphene oxide, and thus, during application of the silicon-based carbon composite to an anode active material for a secondary battery, the charge/discharge capacity, initial charge/discharge efficiency and capacity retention of the secondary battery can be improved.

An embodiment of the present invention relates to a silicon-based carbon composite, a preparation method therefor, and an anode active material for a lithium secondary battery, comprising same, and, more specifically, the silicon-based carbon composite of the present invention is a silicon-based carbon composite having a core-shell structure, wherein the core comprises silicon, silicon oxide compound and magnesium silicate, the shell comprises at least two carbon layers comprising a first carbon layer and a second carbon layer, and the second carbon layer is reduced graphene oxide, and thus, during application of the silicon-based carbon composite to an anode active material for a secondary battery, the charge/discharge capacity, initial charge/discharge efficiency and capacity retention of the secondary battery can be improved.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film consists essentially of 40 mol % to less than 100 mol % of Y.sub.2O.sub.3, over 0 mol % to 60 mol % of ZrO.sub.2, and 0 mol % to 9 mol % of Al.sub.2O.sub.3.

The present invention relates to a granular thermal insulation material comprising hydrophobized silicon dioxide and at least one IR opacifier, having a tamped density of up to 250 g/l and a compressive strength according to DIN EN 826:2013 at 50% compression of 150 to 300 kPa or greater than 300 kPa, to processes for production thereof and to the use thereof for thermal insulation.

The present invention relates to a granular thermal insulation material comprising hydrophobized silicon dioxide and at least one IR opacifier, having a tamped density of up to 250 g/l and a compressive strength according to DIN EN 826:2013 at 50% compression of 150 to 300 kPa or greater than 300 kPa, to processes for production thereof and to the use thereof for thermal insulation.

Provided are a powder for laser manufacturing which can be stably manufactured and from which a three-dimensional manufactured object ensuring a manufacturing accuracy can be obtained and a using method thereof. A powder for ceramic manufacturing for obtaining a manufactured object by repeatedly sintering or fusing and solidifying in sequence a powder in an irradiation portion with laser light, in which the powder includes a plurality of compositions, at least one composition of the compositions is an absorber that relatively strongly absorbs the laser light compared to other compositions, and at least a part of the absorber changes to a different composition that relatively weakly absorbs the laser light by irradiation with the laser light and a using method of a powder in which the powder is used.

Provided are a powder for laser manufacturing which can be stably manufactured and from which a three-dimensional manufactured object ensuring a manufacturing accuracy can be obtained and a using method thereof. A powder for ceramic manufacturing for obtaining a manufactured object by repeatedly sintering or fusing and solidifying in sequence a powder in an irradiation portion with laser light, in which the powder includes a plurality of compositions, at least one composition of the compositions is an absorber that relatively strongly absorbs the laser light compared to other compositions, and at least a part of the absorber changes to a different composition that relatively weakly absorbs the laser light by irradiation with the laser light and a using method of a powder in which the powder is used.

Provided is a refractory product which is not impregnated with pitch or the like, wherein it has higher corrosion-erosion resistance and thermal shock resistance as compared to a refractory product subjected to pitch or the like-impregnation treatment. The refractory product which is not impregnated with tar or pitch is characterized in that, in terms of values of physical properties of a sample of the refractory product as measured after heat-treating the sample in a non-oxidizing atmosphere at 1200° C.: an apparent porosity is 7% or less; a total void volume of pores having a pore diameter of 1 μm or less is 80% or more of an integrated void volume of pores of the entire sample of the refractory product; and a gas permeability is 50×10.sup.−17 m.sup.2 or less.