A radiation-sensitive composition is to be used in exposure with an extreme ultraviolet ray or an electron beam, and includes a first polymer and a solvent, wherein the first polymer includes a first structural unit including: at least one metal atom; and at least one carbon atom that each bonds to the metal atom by a chemical bond and does not constitute an unsaturated bond, and at least one chemical bond is a covalent bond. Every chemical bond is preferably a covalent bond. The metal atom is preferably tin, germanium, lead or a combination thereof.

The present invention is a polymer for forming a metal-containing film including a repeating unit represented by the following general formula (1A), where W.sub.1 represents a divalent organic group having 1 to 31 carbon atoms; and each Q represents a group selected from the group consisting of an alkyl group having 1 to 20 carbon atoms, a cycloalkyl group having 3 to 20 carbon atoms, an aliphatic unsaturated organic group having 2 to 20 carbon atoms and having one or more double bonds or triple bonds, an aryl group having 6 to 30 carbon atoms, and an aralkyl group having 7 to 31 carbon atoms. This provides: a polymer for forming a metal-containing film having excellent dry etching resistance and also having high filling and planarizing properties; a composition for forming a metal-containing film containing the polymer; and a patterning process in which the composition is used.

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A modified solid polyalkylaluminoxane is provided, which is capable of providing -olefin suppressing adhesion of any polymer produced as a by-product onto the reactor wall and the stirrer, and which is capable of providing a highly active olefin oligomerization reaction catalyst. An olefin oligomerization reaction catalyst containing the modified solid polyalkylaluminoxane is also provided. The modified solid polyalkylaluminoxane for olefin oligomerization reactions contains structural units represented by general formula (a) and structural units represented by general formula (b), whose median diameter is equal to or larger than 0.1 m and equal to or smaller than 50 m, ##STR00001##
in which R in the general formula (a) represents an alkyl group having 1 to 20 carbon atoms, and R in the general formula (b) represents a halogenated alkoxy group having 1 to 20 carbon atoms or a halogenated aryloxy group having 6 to 20 carbon atoms.

A modified solid polyalkylaluminoxane is provided, which is capable of providing -olefin suppressing adhesion of any polymer produced as a by-product onto the reactor wall and the stirrer, and which is capable of providing a highly active olefin oligomerization reaction catalyst. An olefin oligomerization reaction catalyst containing the modified solid polyalkylaluminoxane is also provided. The modified solid polyalkylaluminoxane for olefin oligomerization reactions contains structural units represented by general formula (a) and structural units represented by general formula (b), whose median diameter is equal to or larger than 0.1 m and equal to or smaller than 50 m, ##STR00001##
in which R in the general formula (a) represents an alkyl group having 1 to 20 carbon atoms, and R in the general formula (b) represents a halogenated alkoxy group having 1 to 20 carbon atoms or a halogenated aryloxy group having 6 to 20 carbon atoms.

Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.

Precursor solutions for radiation patternable coatings are formed with an organic solvent and monoalkyl tin trialkoxides in which the water content of the solvent is adjusted to be within 10 percent of a selected value. Generally, the water content of the solvent is adjusted through water addition, although water removal can also be used. In some embodiments, the adjusted water content of the solvent can be from about 250 ppm by weight to about 10,000 ppm by weight. With the appropriate selection of ligands, the adjusted precursor solutions can be stable for at least about 42 days, and in some cases at least 8 months.

A method of preparing an organotin containing hyperbranched polysiloxane structure includes the following steps: (1) by weight, 0.5-1.5 portions of hyperbranched polysiloxane with reactive functional groups is dissolved in 50-100 portions of an alcohol solvent, to obtain a solution A; (2) by weight, 0.5-0.9 portions of a tin-based initiator and 50-100 portions of the alcohol solvent are mixed to obtain a solution B, wherein said tin-based initiator is selected from dihydroxy butyl tin chloride, butyl tin trichloride, and dibutyl tin dichloride; and (3) dropping the solution B into the solution A at the temperature of 0 C.-60 C., reacting for 3-6 h, filtering and drying to obtain the organotin containing hyperbranched polysiloxane structure.

A method of preparing an organotin containing hyperbranched polysiloxane structure includes the following steps: (1) by weight, 0.5-1.5 portions of hyperbranched polysiloxane with reactive functional groups is dissolved in 50-100 portions of an alcohol solvent, to obtain a solution A; (2) by weight, 0.5-0.9 portions of a tin-based initiator and 50-100 portions of the alcohol solvent are mixed to obtain a solution B, wherein said tin-based initiator is selected from dihydroxy butyl tin chloride, butyl tin trichloride, and dibutyl tin dichloride; and (3) dropping the solution B into the solution A at the temperature of 0 C.-60 C., reacting for 3-6 h, filtering and drying to obtain the organotin containing hyperbranched polysiloxane structure.

The present disclosure relates to a modified conjugated diene-based polymer having excellent affinity with a filler, a method for preparing the same, a rubber composition including the same and a tire manufactured using the rubber composition. The modified conjugated diene-based polymer according thereto has a tin-based compound-derived group bind on one end, and a silane-based compound-derived group bind on the other end, and therefore, may have excellent affinity with a carbon black-based filler as well as a silica-based filler. Accordingly, a rubber composition including the modified conjugated diene-based polymer may have excellent processability, and as a result, processed goods (for example, tires) manufactured using the rubber composition may have excellent tensile strength, wear resistance and viscoelastic property.

The present disclosure relates to a modified conjugated diene-based polymer having excellent affinity with a filler, a method for preparing the same, a rubber composition including the same and a tire manufactured using the rubber composition. The modified conjugated diene-based polymer according thereto has a tin-based compound-derived group bind on one end, and a silane-based compound-derived group bind on the other end, and therefore, may have excellent affinity with a carbon black-based filler as well as a silica-based filler. Accordingly, a rubber composition including the modified conjugated diene-based polymer may have excellent processability, and as a result, processed goods (for example, tires) manufactured using the rubber composition may have excellent tensile strength, wear resistance and viscoelastic property.