Patent classifications
C09D131/02
Pattern forming material, composition for pattern formation, pattern forming method and method of manufacturing semiconductor device
According to one embodiment, a pattern forming material is disclosed. The pattern forming material contains a polymer. The polymer includes a specific first monomer unit. The monomer unit has a structure having ester of a carboxyl group at a terminal of a side chain. In the ester, a carbon atom bonded to an oxygen atom next to a carbonyl group is a primary carbon, a secondary carbon or a tertiary carbon. The pattern forming material is used for manufacturing a composite film as a mask pattern for processing a target film on a substrate. The composite film is formed by a process including, forming an organic film on the target film with the pattern forming material, patterning the organic film, and forming the composite film by infiltering a metal compound into the patterned organic film.
Pattern forming material, composition for pattern formation, pattern forming method and method of manufacturing semiconductor device
According to one embodiment, a pattern forming material is disclosed. The pattern forming material contains a polymer. The polymer includes a specific first monomer unit. The monomer unit has a structure having ester of a carboxyl group at a terminal of a side chain. In the ester, a carbon atom bonded to an oxygen atom next to a carbonyl group is a primary carbon, a secondary carbon or a tertiary carbon. The pattern forming material is used for manufacturing a composite film as a mask pattern for processing a target film on a substrate. The composite film is formed by a process including, forming an organic film on the target film with the pattern forming material, patterning the organic film, and forming the composite film by infiltering a metal compound into the patterned organic film.
ONE PACK AMBIENT CURE CROSSLINKABLE COPOLYMERS OF VINYL BRANCHED ESTER AND VINYL SILANE COMPOSITIONS AND USE THEREOF
The invention relates to an one pack ambient cure crosslinkable modified vinyl branched ester polymer with vinyl silane and a water scavanger. The copolymer composition can be formulated to the desired viscosity that allows the application by standard technics, and the curing is optimized in the presence of an appropriated catalyst as one pack system to be cure at room temperature.
ONE PACK AMBIENT CURE CROSSLINKABLE COPOLYMERS OF VINYL BRANCHED ESTER AND VINYL SILANE COMPOSITIONS AND USE THEREOF
The invention relates to an one pack ambient cure crosslinkable modified vinyl branched ester polymer with vinyl silane and a water scavanger. The copolymer composition can be formulated to the desired viscosity that allows the application by standard technics, and the curing is optimized in the presence of an appropriated catalyst as one pack system to be cure at room temperature.
WATER/OIL REPELLENT COMPOSITION, METHOD FOR ITS PRODUCTION AND ARTICLE
A water/oil repellent composition which can provide an article with high and durable water repellency is provided. A water/oil repellent composition comprising units based on a fluoroolefin represented by the formula (1): CH.sub.2═CH—R.sup.f (wherein R.sup.f is a C.sub.1-8 perfluoroalkyl group), units based on a vinyl carboxylate (b1) having a C.sub.12 or higher alkyl group and units based on a vinyl carboxylate (b2) having a C.sub.1-6 alkyl group, wherein the ratio of units based on the fluoroolefin is from 20 to 35 mol %, the ratio of units based on the vinyl carboxylate (b1) is from 30 to 70 mol %, and the ratio of units based on the vinyl carboxylate (b2) is from 5 to 50 mol %, relative to all the units in the fluorinated polymer.
WATER/OIL REPELLENT COMPOSITION, METHOD FOR ITS PRODUCTION AND ARTICLE
A water/oil repellent composition which can provide an article with high and durable water repellency is provided. A water/oil repellent composition comprising units based on a fluoroolefin represented by the formula (1): CH.sub.2═CH—R.sup.f (wherein R.sup.f is a C.sub.1-8 perfluoroalkyl group), units based on a vinyl carboxylate (b1) having a C.sub.12 or higher alkyl group and units based on a vinyl carboxylate (b2) having a C.sub.1-6 alkyl group, wherein the ratio of units based on the fluoroolefin is from 20 to 35 mol %, the ratio of units based on the vinyl carboxylate (b1) is from 30 to 70 mol %, and the ratio of units based on the vinyl carboxylate (b2) is from 5 to 50 mol %, relative to all the units in the fluorinated polymer.
WATER/OIL REPELLENT COMPOSITION, METHOD FOR ITS PRODUCTION AND ARTICLE
A water/oil repellent composition which can provide an article with high and durable water repellency is provided. A water/oil repellent composition comprising units based on a fluoroolefin represented by the formula (1): CH.sub.2═CH—R.sup.f (wherein R.sup.f is a C.sub.1-8 perfluoroalkyl group), units based on a vinyl carboxylate having a C.sub.12 or higher alkyl group, and units based on a haloolefin other than the fluoroolefin or a derivative thereof, wherein the ratio of units based on the fluoroolefin is from 15 to 35 mol %, the ratio of units based on the vinyl carboxylate is from 30 to 60 mol %, and the ratio of units based on the haloolefin or derivative thereof is from 5 to 55 mol %, relative to all the units constituting the fluorinated polymer:
WATER/OIL REPELLENT COMPOSITION, METHOD FOR ITS PRODUCTION AND ARTICLE
A water/oil repellent composition which can provide an article with high and durable water repellency is provided. A water/oil repellent composition comprising units based on a fluoroolefin represented by the formula (1): CH.sub.2═CH—R.sup.f (wherein R.sup.f is a C.sub.1-8 perfluoroalkyl group), units based on a vinyl carboxylate having a C.sub.12 or higher alkyl group, and units based on a haloolefin other than the fluoroolefin or a derivative thereof, wherein the ratio of units based on the fluoroolefin is from 15 to 35 mol %, the ratio of units based on the vinyl carboxylate is from 30 to 60 mol %, and the ratio of units based on the haloolefin or derivative thereof is from 5 to 55 mol %, relative to all the units constituting the fluorinated polymer:
Hydrophobic, water-redispersible polymer powder composition
A hydrophobic, water-redispersible polymer powder composition contains a) a main polymer having a1) more than 60 parts by weight of vinyl laurate monomer units a2) 5 to 30 parts by weight of vinyl acetate monomer units, a3) 5 to 30 parts by weight of ethylene monomer units, a4) 0 to 10 parts by weight of other ancillary monomer units,
where the parts by weight total 100 parts by weight, b) 0.5 to 30% by weight of one or more protective colloids, c) 0 to 30% by weight of antiblocking agent, d) 0 to 20% by weight of organosilicon compound, and e) 0 to 20% by weight of fatty acid or derivatives of the fatty acids,
where the % s by weight are based on the total weight of the polymer a).
Hydrophobic, water-redispersible polymer powder composition
A hydrophobic, water-redispersible polymer powder composition contains a) a main polymer having a1) more than 60 parts by weight of vinyl laurate monomer units a2) 5 to 30 parts by weight of vinyl acetate monomer units, a3) 5 to 30 parts by weight of ethylene monomer units, a4) 0 to 10 parts by weight of other ancillary monomer units,
where the parts by weight total 100 parts by weight, b) 0.5 to 30% by weight of one or more protective colloids, c) 0 to 30% by weight of antiblocking agent, d) 0 to 20% by weight of organosilicon compound, and e) 0 to 20% by weight of fatty acid or derivatives of the fatty acids,
where the % s by weight are based on the total weight of the polymer a).