A centerbody assembly for a valve includes: a centerbody having a process surface, at least one inlet orifice disposed in the centerbody and adapted to be disposed in fluid communication with a fluid at a process pressure, and at least one outlet orifice disposed in the centerbody separate from the at least one inlet orifice; an inlet port disposed in fluid communication with the at least one inlet orifice; an outlet port disposed in fluid communication with the at least one outlet orifice; and a flexible control diaphragm facing the process surface, wherein a perimeter of the control diaphragm is bonded to the centerbody so as to define a seal that blocks the passage of fluid.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The cover portion includes a central section and an inversion inhibitor circumscribing the central section. The inversion inhibitor projects into the chamber toward a central axis of the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The inversion inhibitor prevents the flexible member from reaching its natural-inverted position and creates a force within the flexible member that urges the flexible member to a seated position. In the partially inverted position, the upper surface of the flexible member conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet.

A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

A centerbody assembly for a valve includes: a centerbody having a process surface, at least one inlet orifice disposed in the centerbody and adapted to be disposed in fluid communication with a fluid at a process pressure, and at least one outlet orifice disposed in the centerbody separate from the at least one inlet orifice; an inlet port disposed in fluid communication with the at least one inlet orifice; an outlet port disposed in fluid communication with the at least one outlet orifice; and a flexible control diaphragm facing the process surface, wherein a perimeter of the control diaphragm is bonded to the centerbody so as to define a seal that blocks the passage of fluid.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The cover portion includes a central section and an inversion inhibitor circumscribing the central section. The inversion inhibitor projects into the chamber toward a central axis of the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The inversion inhibitor prevents the flexible member from reaching its natural-inverted position and creates a force within the flexible member that urges the flexible member to a seated position. In the partially inverted position, the upper surface of the flexible member conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet. The diaphragm is configured such that the diaphragm exclusively biases the flexible member from the first position to the second position so that the flexible member conforms to and seals against the elongated seat member when the flexible member is in the second position.

A fluid control valve includes a cover portion having a first channel and a body portion having a second channel. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet and a lip member circumscribing the flexible member. When the cover portion and the body portion are joined, the first channel and the second channel define a cavity that circumscribes the chamber and the cavity is configured such that each channel receives a portion of the lip member and pinches the lip member to seal the fluid control valve and hold the diaphragm.

A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet. The diaphragm is configured such that the lower surface of the flexible member and a seat member on the body portion have corresponding radius of curvatures such that the flexible member conforms to and seals against the seat member when the flexible member is not in the inverted position.

A diaphragm valve capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member; a housing that is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member; and a humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing.

To prevent a defect in which particles such as impurities flow into a liquid that flows in from an inlet flow path and discharged from an outlet flow path. Provided is a suck-back valve including: a housing part; a valve element part; a diaphragm part; an open-close mechanism that brings the valve element part and a valve seat part into contact or separates the valve element part and the valve seat part from each other to switch between a closed state and an open state; and a suck-back mechanism that moves the diaphragm part in a direction in which the diaphragm part separates from the valve seat part to increase a volume of a valve chamber. The valve element part and the diaphragm part are molded integrally, the open-close mechanism is disposed in an adjacent space, and the valve element part and the open-close mechanism are coupled in the adjacent space.