In a polymeric microfluidic valve, an adhesion control surface with discrete micro- or nano-scale structured surfaces are separated by fluid filled voids at an interface between an elastomeric membrane seals against a substrate layer. The structured surfaces reduce adhesion between the membrane layer and the substrate layer and prevent permanent bonding, while at the same time providing a good balance of adhesion at the valve seat to provide a sealing engagement. Microstructured adhesion control surfaces on and around valve bodies permit opening the valve, by reducing contact surface area.

In a polymeric microfluidic valve, an adhesion control surface with discrete micro- or nano-scale structured surfaces are separated by fluid filled voids at an interface between an elastomeric membrane seals against a substrate layer. The structured surfaces reduce adhesion between the membrane layer and the substrate layer and prevent permanent bonding, while at the same time providing a good balance of adhesion at the valve seat to provide a sealing engagement. Microstructured adhesion control surfaces on and around valve bodies permit opening the valve, by reducing contact surface area.

A portable vaporizing device and/or cartridge comprises a product chamber capable of holding a vaporizable product therein, and a porous valve element configured to be heated to flow the vaporizable product therethrough and generate vapor from the vaporizable product, and optionally including a heat transfer element to heat the vaporizable product as it flows through the product chamber towards the porous valve element.

A portable vaporizing device and/or cartridge comprises a product chamber capable of holding a vaporizable product therein, and a porous valve element configured to be heated to flow the vaporizable product therethrough and generate vapor from the vaporizable product, and optionally including a heat transfer element to heat the vaporizable product as it flows through the product chamber towards the porous valve element.

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve are disclosed. The micro-valve device has a wide range of applications, including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The discloses three-way micro-valve device and method of fabrication that can be tailored to the requirements of a wide range of applications and fluid types, and can also use a number of different actuation methods, including actuation methods that have very small actuation pressures and energy densities even at higher fluidic pressures. This is enabled by a novel pressure-balancing scheme, wherein the fluid pressure balances the actuator mechanism so that only a small amount of actuation pressure (or force) is needed to switch the state of the actuator and device from open to closed, or closed to open.

A flow control device comprises a laminate structure of an electroactive material layer and a non-actuatable layer. An array of orifices is formed in one of the layers wherein the orifices are open in one of the rest state and actuated state and the orifices are closed in the other of the rest state and actuated state. Actuation of the electroactive material layer causes orifices to open and close so that flow control function may be implemented.

A portable vaporizing device and/or cartridge comprises a product chamber capable of holding a vaporizable product therein, and a porous valve element configured to be heated to flow the vaporizable product therethrough and generate vapor from the vaporizable product, and optionally including a heat transfer element to heat the vaporizable product as it flows through the product chamber towards the porous valve element.

Fluidic devices may include a monolithic gate substrate and a channel substrate coupled to the monolithic gate substrate. The monolithic gate substrate may include a gate chamber and a flexible membrane located adjacent to the gate chamber. The channel substrate may include a source channel and a drain channel that are in fluid communication with the flexible membrane on an opposite side of the flexible membrane from the gate chamber. Various other related devices, systems, and methods are also disclosed.

A three-way (3-way) Micro-Electro-Mechanical Systems (MEMS)-based micro-valve device and method of fabrication for the implementation of a three-way MEMS-based micro-valve are disclosed. The micro-valve device has a wide range of applications, including medical, industrial control, aerospace, automotive, consumer electronics and products, as well as any application(s) requiring the use of three-way micro-valves for the control of fluids. The discloses three-way micro-valve device and method of fabrication that can be tailored to the requirements of a wide range of applications and fluid types, and can also use a number of different actuation methods, including actuation methods that have very small actuation pressures and energy densities even at higher fluidic pressures. This is enabled by a novel pressure-balancing scheme, wherein the fluid pressure balances the actuator mechanism so that only a small amount of actuation pressure (or force) is needed to switch the state of the actuator and device from open to closed, or closed to open.

A microfluidic valve provided herein is configured to mix or capable of mixing a sample and/or a reagent in addition to controlling liquid flow. In one embodiment, the microfluidic valve comprises a rotor (3) and one or more micro-structures (2) that move with the rotation of the rotor (3). In one embodiment, the one or more micro-structures (2) stir and/or mix content in a mixing chamber (5) formed by the rotor (3), a base (1), and a sleeve (4) of the microfluidic valve. A microfluidic chip or chip system comprising one or more of the microfluidic valves, and methods of use, are also provided.