The present invention relates to an integrated gas system for a substrate processing apparatus, the system including: a plurality of base blocks connected sequentially to one another to extend a gas supply flow passage passing through the interiors thereof to flow gas therealong, the gas supply flow passage having a gas inlet connected to one side surface of the first base block and a gas outlet connected to one side surface of the last base block; and a flow rate control unit disposed on the base blocks along the gas supply flow passage and having at least one of valves and a flow rate controller, wherein each base block has a first heater groove formed close to the gas supply flow passage on one side surface thereof.

The present invention relates to an integrated gas system for a substrate processing apparatus, the system including: a plurality of base blocks connected sequentially to one another to extend a gas supply flow passage passing through the interiors thereof to flow gas therealong, the gas supply flow passage having a gas inlet connected to one side surface of the first base block and a gas outlet connected to one side surface of the last base block; and a flow rate control unit disposed on the base blocks along the gas supply flow passage and having at least one of valves and a flow rate controller, wherein each base block has a first heater groove formed close to the gas supply flow passage on one side surface thereof.

A fluid heating apparatus according to an embodiment disclosed herein may include a burner, a heat exchanger, a first flow rate sensor that detects a flow rate of a fluid supplied to the heat exchanger, a temperature sensor that detects a temperature of a fluid discharged from the heat exchanger, and a controller that controls a first pump provided in an internal circulation flow path on the basis of the flow rate detected by the first flow rate sensor to manage the flow rate of the fluid supplied to the heat exchanger and controls an operation of the burner on the basis of the temperature detected by the temperature sensor.

A fluid heating apparatus according to an embodiment disclosed herein may include a burner, a heat exchanger, a first flow rate sensor that detects a flow rate of a fluid supplied to the heat exchanger, a temperature sensor that detects a temperature of a fluid discharged from the heat exchanger, and a controller that controls a first pump provided in an internal circulation flow path on the basis of the flow rate detected by the first flow rate sensor to manage the flow rate of the fluid supplied to the heat exchanger and controls an operation of the burner on the basis of the temperature detected by the temperature sensor.

A system and method for controlling a boiler comprising a microcomputer operatively connected to a microcontroller wherein the microcontroller is configured to provide flame safeguard operations and the microcomputer is configured to provide operating control instructions to the microcontroller. The boiler control system may operate either in a stand-alone, cascade master or cascade slave configuration.

The present invention relates to an instantaneous heater, comprising a heating assembly, wherein the heating assembly includes a heating element, a first shell, a first inlet tube, a first water outlet, a hot water cavity, a cold water cavity and a capillary tube, the hot water cavity is in the first shell, the heating element is in the hot water cavity, the hot water cavity communicates with the cold water cavity, the first inlet tube communicates with the cold water cavity, the first water outlet is on the top of the first shell and communicates with the hot water cavity, the capillary tube is in the cold water cavity, one end of the capillary tube communicates with the hot water cavity and the other end communicates with the outside of the first shell. The instantaneous heater boasts simple structure, low cost and effective prevention of vapor from rapidly erupting.

A heat pump may include a compressor configured to compress a refrigerant, a first temperature sensor configured to detect an outdoor temperature, a second temperature sensor provided in heating pipes connected to a heating device, and a controller. Based on a first sensing value of the first temperature sensor, the controller may be configured to control a compressor, control power to a boiler, and/or calculate an expected efficiency of the heat pump. Based on the expected efficiency and/or a second sensing value of a second temperature sensor, the controller may be configured to control power to the boiler.

A heating device as well as a method for the operation thereof. The heating device has an outer housing that surrounds an installation space. The components of heating device are arranged inside or on the outer housing, particularly a burner unit, a fan, a fuel valve and as an option a circulation pump. At least one of these units comprises at least one electrical and/or electronic component. On one or more of the anyway present electrical and/or electronic components at least one gas sensor is arranged on the outer housing and/or inside the installation space, particularly on a support or a circuit board of the respective electrical and/or electronic component. The at least one gas sensor is configured to create a sensor signal that describes the presence and/or concentration of at least one gas component in the atmosphere. Based thereon leakages, faults, undesired backflow, etc. can be determined. Thereupon a respective measure can be initiated, e.g. the output of a warning message and/or suction of the atmosphere by means of fan.

An electrode boiler control apparatus includes a control circuit formed in an electrode boiler in which an intake electronic valve and an exhaust electronic valve in addition to an intake control valve and an exhaust control valve corresponding to air control valves formed at both sides of an upper portion of the electrode boiler, connected to the intake electronic valve and the exhaust electronic valve to control the intake electronic valve and the exhaust electronic valve; a current controller connected to a current transformer connected between electrode bars of the electrode boiler to control the current transformer; and a temperature controller connected to a temperature sensor formed on a hot water tank of the electrode boiler, and configured to control the temperature sensor and receive a temperature value measured by the temperature sensor.

An aspect of some embodiments of the current invention relates to an integrated system for heat distribution among a plurality of users. In some embodiments, the system includes a separate automatic control of heat distribution to each user and/or separate billing to each user. For example, a system may supply hot fluid to a plurality of apartments in a building and/or in multiple buildings. Optionally, each apartment has separate remote controlled valves controlling flow of heated fluid to the apartment and/or a sensor sensing how much heat enters and leaves the apartment in the hot fluid. In some embodiments, a processor controls the valve and/or receives data from sensors. The processor optionally controls devices that generate and/or store and/or dissipate heat. Optionally the processor predicts energy availability, costs and needs controls valves and/or devices to provide for predicted and/or unexpected needs while reduce cost of the energy.