F27B2014/045

CRUCIBLE LIFTING DEVICE

A crucible lifting device includes a vacuum chamber, a vacuum chamber lower seat and a crucible lifting assembly. The vacuum chamber lower seat is arranged orthogonally at the bottom of the vacuum chamber, the vacuum chamber lower seat including a plurality of coupling parts arranged orthogonally at the vacuum chamber lower seat and on a side away from the vacuum chamber. The crucible lifting assembly is arranged on the vacuum chamber lower seat and on the side away from the vacuum chamber. The crucible lifting assembly includes a plurality of multi-rotation angle guides, one end of each multi-rotation angle guide connected to each coupling part; a plurality of guide rods, one end of each guide rod connected to the other end of each multi-rotation angle guide; and a plurality of guide rod accommodating parts, each guide rod accommodating part configured to correspond to each guide rod.

System for maintaining interior volume integrity in an induction vacuum furnace and method of making same

An induction furnace for heating a workpiece includes a chamber and an insulation cylinder positioned therein, with the insulation cylinder including a base cover movable between first and second positions, and the first position positioning the workpiece within a heating zone and the second position positioning the workpiece within a cooling zone. A translation system in the furnace includes a first member coupled to the base cover of the insulation cylinder and extending through a wall of the chamber, an actuator coupled to the first member, the actuator configured to translate the first member to move the base cover of the insulation cylinder between the first and second positions, and an expansion member encircling a portion of the first member and configured to hermetically seal an interior volume of the chamber from an environment volume external to the chamber.

Ion implanter, ion implantation method, and semiconductor device manufacturing method
12255039 · 2025-03-18 · ·

An ion implanter includes a crucible provided inside a vacuum chamber, and including an internal space configured to accommodate a solid sample which is a raw material of a source gas, a laser source provided outside the vacuum chamber, and irradiating the crucible with a laser beam, an arc chamber including an internal space for converting the source gas into plasma to generate ions, and in which an ion beam is extracted from the internal space, and a nozzle connecting the internal space of the crucible and the internal space of the arc chamber, and introducing the source gas vaporized in the internal space of the crucible into the internal space of the arc chamber.

TWIN COIL ARC SWEEP SYSTEM FOR VACUUM ARC REMELTING FURNACES

A vacuum arc remelting (VAR) system for forming an ingot from an electrode is disclosed. The system includes a crucible assembly configured to accommodate the electrode and the ingot. The system includes a primary electromagnetic energy source arranged about the crucible assembly. The primary electromagnetic energy source and the crucible assembly are configured to move relative to one another along a longitudinal axis of the crucible assembly. The system includes a secondary electromagnetic energy source arranged about an upper end portion of the crucible assembly. The secondary electromagnetic energy source is stationary and fixed to the upper end portion of the crucible assembly.

Crucible lifting device

A crucible lifting device includes a vacuum chamber, a vacuum chamber lower seat and a crucible lifting assembly. The vacuum chamber lower seat is arranged orthogonally at the bottom of the vacuum chamber, the vacuum chamber lower seat including a plurality of coupling parts arranged orthogonally at the vacuum chamber lower seat and on a side away from the vacuum chamber. The crucible lifting assembly is arranged on the vacuum chamber lower seat and on the side away from the vacuum chamber. The crucible lifting assembly includes a plurality of multi-rotation angle guides, one end of each multi-rotation angle guide connected to each coupling part; a plurality of guide rods, one end of each guide rod connected to the other end of each multi-rotation angle guide; and a plurality of guide rod accommodating parts, each guide rod accommodating part configured to correspond to each guide rod.