G01B2290/60

INTERFEROMETRIC DUAL-COMB DISTANCE MEASURING DEVICE AND MEASURING METHOD

An opto-electronic dual-comb interferometric distance measuring method and device wherein a signal comb is chromatically divided into a target signal comb and a non-target signal comb at a emission position, preferably by an optical interleaver in a measurement probe of the device. Only the target signal comb serves as a free beam emitted to the target. The non-target signal comb serves for generation of additional or compensation internal phase differences. Thus, the distance to the target is based on first, target related phase differences and on the second, internal compensation phase differences.

PRECISION POSITIONING SYSTEM USING A WAVELENGTH TUNABLE LASER
20170356739 · 2017-12-14 ·

A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.

Method for monitoring time-dependent properties of light during scanning swept-source optical coherence tomography
11262185 · 2022-03-01 · ·

A method comprises: splitting laser light into sample light, reference light, and monitor light; routing the reference light into a reference arm of an OCT interferometer; routing the monitor light into a monitor device, which generates at least one optical monitor signal representing at least one time-dependent property of the monitor light; generating at least one electric monitor signal from the at least one optical monitor signal; illuminating in a point-shaped manner a sample with sample light, wherein the illumination point is guided on the surface of the sample along a predetermined trajectory; superimposing the light scattered by the sample with the reference light emerging from the reference arm to generate an electric OCT signal; wherein the at least one electric monitor signal and the electric OCT signal are AD-converted in alternating sequence, in each case equidistantly in time, to form a single digital data stream.

SWEPT-SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) PHASE STABILIZATION WITH REFERENCE SIGNAL CALIBRATION
20170307353 · 2017-10-26 ·

A reference signal having a known induced optical delay is used for phase stabilization of optical coherence tomography (OCT) interferograms, and for correcting sampling differences within OCT interferograms, in single mode and multimodal OCT systems. The reference signal can then be used to the measure time shift or sample clock period shifts induced in the interferogram signal by the OCT system. A corresponding OCT interferogram signal can then be corrected to remove the shift induced by the system based on the determination.

Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method

The disclosure discloses a differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method. The beam output from the single-frequency laser is converted into a 45° linearly polarized beam after passing through the polarizer, then projected onto two sets of sinusoidal phase modulation interferometers consisting of the beam splitter, the electro-optic phase modulator, the half wave plate, three pyramid prisms, two polarization beam splitters, thereby forming measurement and reference interference signals which are received by two photodetectors. A high-frequency sinusoidal voltage signal is applied to the electro-optic phase modulator placed in the common reference arm of the two interferometers, thereby modulating the interference signal into a high-frequency AC signal. By detecting the difference between the phase change amounts of the two interference signals when the measured object moves, the measured displacement can be obtained.

Multiple target LIDAR system
11668805 · 2023-06-06 · ·

A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

METHODS AND APPARATUS FOR PHASE STABILIZED SWEPT-SOURCE OPTICAL COHERENCE TOMOGRAPHY (SS-OCT) INCLUDING RESCALING AND DYNAMIC RANGE ENHANCEMENT
20170241763 · 2017-08-24 ·

An optical coherence tomography (OCT) system electrically mixes a signature signal with an OCT signal (e.g., an interferogram) output by a photodetector of the OCT system. The signature signal may be a signal output by a photodetector that detects an optical signal from a fiber Bragg grating. The signature signal may then be time delayed before combination with the OCT signal. A series of interferograms are then aligned according to the signature signal. A rescaling signal may be similarly electrically mixed with the signature and OCT signals.

Five-degree-of-freedom heterodyne grating interferometry system
20220042792 · 2022-02-10 ·

A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multi-mode optical fibers respectively receiving signals at different positions on the same plane. The present measurement system has the advantages of high measurement precision, a large measurement range, not being sensitive to temperature drift, and small overall size, and can be used as a photoetching machine ultra-precision workpiece table position measurement system.

Digitizer for an optical coherence tomography imager

A digitizer and processor device for a swept-source optical coherence tomography (SS-OCT) imaging system, comprising: an input configured to receive an OCT signal; a control input configured to receive a k-clock signal; a combiner unit (130) receiving the OCT signal and the k-clock signal configured to output a composite signal; a digitizing unit (60) arranged to convert the composite signal into a digital composite signal (69); a data processing unit (70) arranged to determine a profile of optical density in a sample that generated the OCT signal based on the digital composite signal (69).

Optical Deflector Parameter Measurement Device, Method, and Program
20210404908 · 2021-12-30 ·

A parameter measurement device of a light deflector includes a photodetector that receives output light from the light deflector, a biaxial translation automatic stage that moves the photodetector to a plurality of positions, and a signal processing device that calculates the wavelength of the output light of a wavelength sweeping light source for each time, calculates the wavelength of the light received from the light deflector by the photodetector based on the output signal of the photodetector and a previously-calculated wavelength, and calculates the incident angle of the output light beam of the wavelength sweeping light source onto the diffraction grating and an angle formed by an L-axis and a line perpendicular to the surface of the diffraction grating by performing fitting so that the coordinates of the photodetector that are obtained for each position of the photodetector and the wavelength of the light conform to a prescribed relational expression.