An apparatus includes a sampling circuit to sample input from a sensor circuit. The input includes a cosine coil waveform and a sine coil waveform. The sampling circuit is to generate a cosine coil sampled data stream and a sine coil sampled data stream. The apparatus includes an adjustment circuit to, based upon a characterization of the sensor circuit, delay the cosine coil sampled data stream or the sine coil sampled data stream.

A sensor arrangement includes a ring magnet linearly displaceable along its vertical axis of the ring magnet and including an outer ring section of a first pole pair, an inner ring section of a second pole pair. At least one magnetic sensor circuitry is positioned a non-centered offset distance apart from the ring magnet in a plane perpendicular to the ring magnet's vertical axis. The at least one magnetic sensor can generate spatial magnetic data produced by linear displacement of the ring magnet. A computing unit coupled to the at least one magnetic sensor circuitry and configured to obtain the spatial magnetic data and to determine amount of displacement of the ring magnet after a linear displacement of the ring magnet based on the obtained spatial magnetic data.

A system for monitoring the axial position of a rotating shaft includes a phonic wheel mounted coaxially to the shaft for rotation with a circumferential row of teeth. The system includes a sensor configured to detect the passage of the teeth by generating an alternating measurement signal. First and second portions of the teeth alternate around the row and contribute respective first and second components to the alternating measurement signal. The first portion of teeth vary in height in an axial direction of the wheel such that the relative height of the first and second portions varies with axial distance across the phonic wheel, and the sensor is positioned relative to the phonic wheel such that axial displacement of the shaft causes the signal to vary the first component's amplitude relative to the second component's amplitude due to the height variation, to monitor the axial position of the shaft.

A sensor system for a volumetric pump operating according to the linear peristalsis principle includes at least one sensor unit; at least one sensor transmitter unit; and a sensor output signal processing unit. The sensor transmitter unit is arranged to apply a detection variable varying as a function of a travel position to the sensor unit along a predetermined travel along which a fixedly arranged sensor unit and a movably arranged sensor transmitter unit or a movably arranged sensor unit and a fixedly arranged sensor transmitter unit are moving relative to each other. The sensor unit is configured to output a detection signal corresponding to a travel position on the basis of the varying detection variable. The sensor output signal processing unit is arranged to receive the detection signal output by the sensor unit and discriminate at least three travel positions on the basis of the received detection signal.

A magnetic sensor includes first to fourth resistors, a power supply port, a ground port, a first output port, and a second output port. The first resistor and the second resistor are located in a first region and connected in series via a first connection point connected to the first output port. The third resistor and the fourth resistor are located in a second region and connected in series via a second connection point connected to the second output port, at least a part of the second region being located at a position different from the first region in a direction parallel to an X direction. The first and second resistors are located between the third and fourth resistors in a direction parallel to a Y direction.

A variable reluctance position sensor includes a first element having magnetic sensor sections having excitation coils, first detection coils, and second detection coils, and a second element moveable with respect to the first element. An airgap surface of the second element is periodically meandering. When an alternating signal is supplied to the excitation coils, envelopes of alternating signals induced in the first and second detection coils are dependent on a position of the second element so that the envelopes have a phase shift with respect to each other. The number of the magnetic sensor sections is 1+nP.sub.2/P.sub.1, where P.sub.1 is a spatial shift between successive magnetic sensor sections, P.sub.2 is a spatial meandering period of the airgap surface, and n is an integer. The magnetic sensor section in addition to the nP.sub.2/P.sub.1 magnetic sensor sections is suitable for compensating for unwanted effects caused by ends of the first element.

The embodiments described herein are directed to systems and devices for electronically measuring the absolute position of one or more moving targets e.g., along the length of a metal beam using mutual capacitive sensing. The beam may be made of metal and may have a limited inset area to fit a position detection sensor device along its length. The moving targets may have no active elements and the position of multiple targets may be detected simultaneously along the beam. The systems and devices described herein do not utilize electronic position feedback and instead rely on an integrated ruler and minimize the total number of sensors required to support recalibration, thereby minimizing scan time (more sensors results in a linear increase in scan time).

Disclosed embodiments include a multi-mode sensor including an elastomeric strand having a first multi-mode sensing region configured to sense at least two different physical parameters, and a second multi-mode sensing region, space apart from the first multi-mode sensing region, and configured to sense at least two different physical parameters. In some disclosed embodiments the first multi-mode sensing region is configured to measure the physical parameters of angular displacement and strain.

The present disclosure is an inspection apparatus that makes an inspection of electrical characteristics of an object to be inspected. using a contactor brought into electrical contact with an electrode of the object to be inspected, the inspection apparatus including: a position adjusting unit including the contactor, a position adjusting section that adjusts a tip position of the contactor, and a load. detecting section that detects a value of contact load between the contactor and the electrode; a position deriving section that derives an initial position of the contactor in a specific direction based on a relationship between an amount of contact displacement of the contactor in the specific direction and the value of contact load between the contactor and the electrode; and a movement performing section that moves the tip position of the contactor based on the initial position in the specific direction derived by the position deriving section.

The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.