Patent classifications
G01B9/02007
Optical coherence tomographic apparatus and optical coherence tomographic method performing spectrum conversion based on single gaussian distribution curve
To optimize an imaging range in a depth direction in terms of a relationship with a resolution, an OCT apparatus includes a signal processor that determines a reflected light intensity distribution of an imaging object on the basis of a spectrum of a detected interference light. The signal processor performs spectrum conversion, having a conversion characteristic with which a light source spectrum is converted to a Gaussian distribution curve, on the spectrum of the interference light, and determines the reflected light intensity distribution by Fourier-transforming a spectrum resulting from the spectrum conversion. In the conversion characteristic, the light source spectrum and the Gaussian distribution curve have center wavelengths differing from each other.
Spectral contrast optical coherence tomography angiography
In an aspect, a method for imaging a target comprises steps of: performing optical coherence tomography (OCT) scanning on the target with one or more beams of source light, the one or more beams of source light comprising a plurality of wavelengths; wherein performing OCT scanning comprises: providing the source light to a reference optical path and to a sample optical path, wherein providing the source light to a sample optical path comprises illuminating the target with the source light; and recording interference data corresponding to an interaction of a light from the reference optical path and a light from the sample optical path; processing the interference data; and identifying blood or one or more blood-features in the target based on an optical attenuation of light in or associated with the sample optical path by the blood or the one or more blood-features.
OPTICAL SENSOR FOR SURFACE INSPECTION AND METROLOGY
A method of improving axial resolution of interferometric measurements of a 3D feature of a sample may comprise illuminating the feature using a first limited number of successively different wavelengths of light at a time; generating an image of at least the 3D feature based on intensities of light reflected from the feature at each of the successively different wavelengths of light; measuring a fringe pattern of intensity values for each corresponding pixel of the generated images; resampling the measured fringe patterns as k-space interferograms; estimating interference fringe patterns for a spectral range that is longer than available from the generated images using the k-space interferograms; appending the estimated interference fringe patterns to the respective measured fringe patterns; and measuring the height or depth of the 3D feature using the measured interference fringe patterns and appended estimated fringe patterns.
System and method for stabilization of multi-path optical interferometers
A system and a method for phase extraction of a multi-path interferometer, the method comprising generating a reference signal of a coherence length longer than an arm length difference of the multi-path interferometer; splitting the reference signal into a frequency shifted reference signal and an unshifted reference signal; recombining the frequency shifted reference signal and the unshifted reference signal into a polarization- and frequency-multiplexed reference signal, and feeding the polarization- and frequency-multiplexed reference signal to the multi-path interferometer; detecting frequency shifted and unshifted output signals of the multi-path interferometer; and determining the interferometer phase from the detected signal.
Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System
The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.
FREQUENCY SHIFTER FOR HETERODYNE INTERFEROMETRY MEASUREMENTS AND DEVICE FOR HETERODYNE INTERFEROMETRY MEASUREMENTS HAVING SUCH A FREQUENCY SHIFTER
The invention refers to a frequency shifter for heterodyne interferometry measurements, comprising a chip, an input waveguide configured to guide a light beam, at least four phase modulators, each being arranged to receive the light beam from the input waveguide and configured to modulate a phase of the light beam, an output combiner being arranged to let the light beams modulated by each phase modulator interfere, a first output waveguide coupled to the output combiner and configured to receive the modulated light beams constructively interfering at the output combiner, a second output waveguide coupled to the output combiner and configured to receive the modulated light beams destructively interfering at the output combiner, wherein the input waveguide, the phase modulators, the output combiner, the first output waveguide and the second output waveguide are arranged on the chip.
APPARATUS AND METHOD FOR SPECTRAL DOMAIN OPTICAL IMAGING
Apparatus and methods are presented for spectral domain optical imaging, in particular for single shot 3-D spectral domain imaging of the retina of the human eye. In certain embodiments one or more 3-D images across elongated areas of an object are acquired, with scanning perpendicular to the long axis of the elongated areas for imaging extended volumes of the object. In preferred embodiments the captured light is sampled in the Fourier plane, in a dimension substantially perpendicular to the long axis, with a cylindrical lenslet array, while in other embodiments the captured light is sampled in the image plane. Apparatus and methods are also presented for hyperspectral imaging of the retina, with the illuminating beams preferably angled to suppress interference from corneal reflections. Apparatus and methods are also presented for multi-wavelength wavefront sensing, with simultaneous capture of light in two or more paths with different delays.
Methods, systems and apparatus of interferometry for imaging and sensing
Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λ.sub.i); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λ.sub.i). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λ.sub.i). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λ.sub.i).
OPTICAL METROLOGY SYSTEM AND METHOD
A measurement system is provided for use in optical metrology measurements. The measurement system comprises a control system which processes raw measured data indicative of spectral interferometric signals measured on a sample in response to illuminating electromagnetic field incident onto a top portion of the sample and comprising at least one spectral range to which said sample is substantially not absorbing. The processing comprises: extracting, from the raw measured data, a portion of spectral interferometric signals describing signal intensity variation with change of optical path difference during interferometric measurements, the extracted signal portion being independent of interferometric signals returned from a bottom portion of the sample in response to said illuminating electromagnetic field; and directly determining, from said extracted portion, both spectral amplitude and phase of reflection of the electromagnetic field from the top portion of the sample, thereby determining measured spectral signature characterizing the SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW.
MULTI-FREQUENCY HYBRID HETERODYNE LASER TRACKER SYSTEM BASED ON SINGLE LIGHT SOURCE
The present disclosure provides a multi-frequency hybrid heterodyne laser tracker system based on a single light source. According to the laser tracking system proposed in the present disclosure, multi-frequency laser is obtained by conducting multi-acousto-optic frequency shift on a dual-longitudinal-mode laser unit, and an absolute ranging precision gauge is constructed by using a dual-longitudinal-mode interval of a light source. With the frequency shift difference of a multi-acousto-optic frequency shifter, an absolute ranging roughness gauge is constructed, and the relative displacement measurement of dual-frequency light interference is achieved. Meanwhile, by utilizing the reflection of multiple reflectors and light splitting and combining of polarization prisms, synchronous measurement of multi-wavelength absolute distance, relative displacement and PSD position is achieved, resolving the problem that an existing laser tracker uses multiple light sources, which leads to difference in measurement datum, and consequently to the difficultly in traceback.