A method of air refractive index correction for an absolute long distance measurement adopting a two-color method based on a single wavelength and a synthetic wavelength is provided. Two lasers emit two laser beams with a constant single wavelength and a variable wavelength, respectively, to form a synthetic wavelength chain from large to small through a laser interferometric system. Each order of the synthetic wavelength chain is used to obtain a series of the estimate values of optical distance with gradually increasing accuracy. After optical distances corresponding to a minimum synthetic wavelength and a single wavelength are obtained simultaneously, the corrected absolute distance is achieved according to the principle of the two-color method for air refractive index correction. The method can realize full-path correction of air refractive index along the actual path of the distance measurement, and has low requirements on the measurement precision of environmental parameters such as temperature and pressure.

Methods and related equipment for dynamic on-axis in-situ interferometry where the reference surface is positioned in an vacuum chamber. The systems use a wavelength shifting, or a phase shifting interferometer that allows the freedom to eliminate the need to step the cavity length physically with the reference surface, allowing the reference surface to be placed inside the vacuum chamber.

A line-field optical coherence tomography (OCT) system and method provide enhanced imaging accuracy through k-linearization of interference data. The system includes a swept laser source, a line-field sensor, and a single board computer (SBC) with processing capabilities. The system uses a frequency reference to produce a periodic reference pattern, which is detected by a subset of pixels in the line-field sensor. The SBC determines a resampling curve based on the reference pattern to correct non-linearities in the wavelength tuning of the laser. The resampling curve is applied to k-linearize the interference data, enabling the generation of high resolution transform-limited depth profiles through inverse Fourier transform. Methods are disclosed for recalculating the resampling curve periodically, continuously, or adaptively based on a linearity threshold. The system can further update the laser's tuning function dynamically to ensure consistent performance. These advancements enable precise and efficient OCT imaging for applications such as ophthalmology, angiography, and other diagnostic uses.

Systems, apparatuses, and methods are provided for correcting the detected positions of alignment marks disposed on a substrate and aligning the substrate using the corrected data to ensure accurate exposure of one or more patterns on the substrate. An example method can include receiving measurement data indicative of an interference between light diffracted from a plurality of alignment marks disposed on a substrate or reflected from the substrate. The example method can further include determining substrate deformation data based on the measurement data. The example method can further include determining alignment mark deformation data based on the measurement data. The alignment mark deformation data can include alignment mark deformation spectral pattern data, alignment mark deformation amplitude data, and alignment mark deformation offset data. Subsequently, the example method can include determining a correction to the measurement data based on the substrate deformation data and the alignment mark deformation data.