G01C3/12

Distance measurement between gas distribution device and substrate support at high temperatures

A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.

RANGE DETECTION USING MACHINE LEARNING COMBINED WITH CAMERA FOCUS

A method for range detection is described. The method includes segmenting an image into one or more segmentation blobs captured by a monocular camera of an ego vehicle. The method includes focusing on pixels forming a selected segmentation blob of the one or more segment blobs. The method also includes determining a distance to the selected segmentation blob according to a focus function value of the monocular camera of the ego vehicle.

IMAGE PROCESSING DEVICE IN MOVING OBJECT, IMAGING DEVICE, IMAGE PROCESSING METHOD, AND RECORDING MEDIUM
20210321062 · 2021-10-14 ·

A vehicle-mounted display device in a moving object displays a video acquired by image capturing performed by an imaging unit on a display unit positioned toward an outer side of the moving object. The vehicle-mounted display device controls superimposed display of a measurement result or an analysis result, related to a subject included in the video displayed on the display unit, on the video.

RANGING METHOD, RANGING DEVICE AND RANGING SYSTEM
20210270957 · 2021-09-02 ·

The present disclosure provides a ranging method, a ranging device, and a ranging system. The method includes: acquiring a video image and a radar signal set that are collected respectively by a camera and radar at the same time; determining position information corresponding to each target object in the video image; determining one or more target object that have matched a radar signal in the video image; determining a ranging algorithm based on the position information corresponding to the target objects that have matched radar signals and the radar signals matching the target objects; and calculating a distance between a target object that does not match a radar signal in the video image and a designated vehicle according to position information corresponding to the target object that does not match a radar signal in the video image and through the ranging algorithm.

Measurement method and apparatus

A measurement method and apparatus are provided. The measurement method is applicable to an image acquisition device, and includes: acquiring image data to generate an image data file (S101); capturing an object to be measured in an image corresponding to the image data file (S102); obtaining a first distance between a horizontal line going through a lowest point of the object to be measured in the image and a horizontal line going through a center point of the image (S103); and calculating a second distance between the object to be measured and the image acquisition device based on the first distance, an installation height of the image acquisition device and a pitch angle of the image acquisition device (S104). Compared with the relevant art, the image acquisition device can measure the distance to an object to be measured while achieving relatively low production cost and easy installation. As a result, actual demands can be better satisfied.

Measurement method and apparatus

A measurement method and apparatus are provided. The measurement method is applicable to an image acquisition device, and includes: acquiring image data to generate an image data file (S101); capturing an object to be measured in an image corresponding to the image data file (S102); obtaining a first distance between a horizontal line going through a lowest point of the object to be measured in the image and a horizontal line going through a center point of the image (S103); and calculating a second distance between the object to be measured and the image acquisition device based on the first distance, an installation height of the image acquisition device and a pitch angle of the image acquisition device (S104). Compared with the relevant art, the image acquisition device can measure the distance to an object to be measured while achieving relatively low production cost and easy installation. As a result, actual demands can be better satisfied.

Apparatus and method for detecting stock-out of articles on rack and rack

The present application proposes an apparatus and method for detecting stock-out of articles on a rack and a rack. The apparatus includes: a distance detector configured to detect a distance between the article farthest from a first end and one of the first end and a second end; and a controlling and processing unit communicatively connected to the distance detector and configured to determine whether the articles are out of stock based on the distance.

Apparatus and method for detecting stock-out of articles on rack and rack

The present application proposes an apparatus and method for detecting stock-out of articles on a rack and a rack. The apparatus includes: a distance detector configured to detect a distance between the article farthest from a first end and one of the first end and a second end; and a controlling and processing unit communicatively connected to the distance detector and configured to determine whether the articles are out of stock based on the distance.

DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE SUPPORT AT HIGH TEMPERATURES
20200217657 · 2020-07-09 ·

A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.

DISTANCE MEASUREMENT BETWEEN GAS DISTRIBUTION DEVICE AND SUBSTRATE SUPPORT AT HIGH TEMPERATURES
20200217657 · 2020-07-09 ·

A substrate processing system includes a laser triangulation sensor configured to transmit and receive light through a window of an exterior wall of a substrate processing chamber. A controller is configured to: position the laser triangulation sensor such that the laser triangulation sensor transmits light onto a measurement feature arranged between a first surface of a substrate support and a second surface of a gas distribution device, where the second surface faces the first surface; and while the laser triangulation sensor transmits light onto the measurement feature, determine a first distance between the first and second surfaces based on a difference between: a second distance between the laser triangulation sensor and the first surface measured using the laser triangulation sensor; and a third distance between the laser triangulation sensor and the second surface measured using the laser triangulation sensor.