G01F1/86

Bode fingerprinting for characterizations and failure detections in processing chamber

A non-transitory computer-readable storage medium stores instructions, which when executed by a processing device of a diagnostic server, cause the processing device to perform certain operations. The operations include receiving, from a processing chamber, (i) measurement values of a combined signal that is based on an injection of an alternating signal wave onto a first output signal of a controller of the processing chamber, and (ii) measurement values of a second output signal of the controller that incorporates feedback from the processing chamber. The operations further include generating, based on the measurement values of the combined signal and the measurement values of the second output signal of the controller, a baseline bode fingerprint pertaining to a state associated with the processing chamber. The operations further include storing, in computer storage, the baseline bode fingerprint to be used in performing diagnostics of the processing chamber.

Mass flow sensor, mass flow meter including the mass flow sensor, and mass flow controller including the mass flow sensor
11543275 · 2023-01-03 · ·

A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

Device and method for monitoring material flow parameters along a passage

Described herein is a device (1) for measuring parameters of a material (3) flowing along a passage (5), the passage having two longitudinally spaced apart ends and transverse sides defined by one or more sidewalls (7, 9). The device (1) includes a laser source (15) positioned at a first location within or adjacent a side of the passage (5) and configured to generate a laser beam (17) at one or more predetermined frequencies. A beam projection element (21, 27) projects the laser beam (17) transversely across the passage (5) to irradiate the material (3) within a measuring zone (19). The measuring zone (19) includes a transverse region extending greater than 50% of the width of the passage (5). An optical imaging device (29) is positioned at a second location within or adjacent the passage (5) and configured to capture images of backscattered light from material (3) within the measuring zone (19). A processor (41) is in communication with the optical imaging device (29) and is configured to process the captured images and perform a scattering analysis to determine parameters of the material (3) through the passage (5).

Device and method for monitoring material flow parameters along a passage

Described herein is a device (1) for measuring parameters of a material (3) flowing along a passage (5), the passage having two longitudinally spaced apart ends and transverse sides defined by one or more sidewalls (7, 9). The device (1) includes a laser source (15) positioned at a first location within or adjacent a side of the passage (5) and configured to generate a laser beam (17) at one or more predetermined frequencies. A beam projection element (21, 27) projects the laser beam (17) transversely across the passage (5) to irradiate the material (3) within a measuring zone (19). The measuring zone (19) includes a transverse region extending greater than 50% of the width of the passage (5). An optical imaging device (29) is positioned at a second location within or adjacent the passage (5) and configured to capture images of backscattered light from material (3) within the measuring zone (19). A processor (41) is in communication with the optical imaging device (29) and is configured to process the captured images and perform a scattering analysis to determine parameters of the material (3) through the passage (5).

AUTOMATIC MONITORING OF SMELT FLOW EXITING A RECOVERY BOILER
20220396918 · 2022-12-15 ·

A system for automatic monitoring of smelt flow exiting a recovery boiler based on optical information. A processor is used to read at least one stationarily imaged video sequence, comprising digital image frames, including an area under examination representing at least part of the smelt flow exiting the recovery boiler. The processor is used to identify, in the area under examination, an area distinguishable based on colour and/or intensity information. The processor is used to determine, based on the identified distinguishable area, a monitored flow property of the smelt flow.

AUTOMATIC MONITORING OF SMELT FLOW EXITING A RECOVERY BOILER
20220396918 · 2022-12-15 ·

A system for automatic monitoring of smelt flow exiting a recovery boiler based on optical information. A processor is used to read at least one stationarily imaged video sequence, comprising digital image frames, including an area under examination representing at least part of the smelt flow exiting the recovery boiler. The processor is used to identify, in the area under examination, an area distinguishable based on colour and/or intensity information. The processor is used to determine, based on the identified distinguishable area, a monitored flow property of the smelt flow.

ENHANCED SUPERCRITICAL FLUID MEASUREMENT WITH VIBRATORY SENSORS

A method for inferring an inferred speed of sound of a flow fluid is disclosed. The method is conducted by a computer system (200) having a processor (210) and a memory (220), the processor (210) configured to execute instructions from the memory (220) and store data in the memory (220), the memory (220) having a SoS inference module (202). The method includes inferring, by the SoS inference module (202), the inferred speed of sound of the flow fluid based on an inferential relationship between a measured density of the flow fluid and the inferred speed of sound of the flow fluid.

ENHANCED SUPERCRITICAL FLUID MEASUREMENT WITH VIBRATORY SENSORS

A method for inferring an inferred speed of sound of a flow fluid is disclosed. The method is conducted by a computer system (200) having a processor (210) and a memory (220), the processor (210) configured to execute instructions from the memory (220) and store data in the memory (220), the memory (220) having a SoS inference module (202). The method includes inferring, by the SoS inference module (202), the inferred speed of sound of the flow fluid based on an inferential relationship between a measured density of the flow fluid and the inferred speed of sound of the flow fluid.

Methods and Apparatus for Pressure Based Mass Flow Ratio Control
20220390261 · 2022-12-08 ·

A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

Methods and Apparatus for Pressure Based Mass Flow Ratio Control
20220390261 · 2022-12-08 ·

A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.