A light modulation device and a single-channel spectrum detection system are provided. The light modulation device includes: a light guide plate; a dispersing component configured to disperse received light into light of different wavelengths and to diffract the light of different wavelengths into the light guide plate at different angles; and a dynamic filtering component configured to prevent light of a selected wavelength in the light guide plate from entering the dynamic filtering component such that the light of the selected wavelength emits out from the light guide plate, and to make light of non-selected wavelengths in the light guide plate enter the dynamic filtering component such that the light of the non-selected wavelengths is filtered out from the light guide plate.

A polychromator includes a substrate and a functional element having an optical spectral decomposition action. The functional element having an optical spectral decomposition action is configured to spectrally decompose electromagnetic radiation originating from an entry opening, e.g. light which originates from an optional radiation source and is reflected at a sample, so that a spectrally decomposed spectrum is obtained, and to image the spectrally decomposed spectrum onto a spatial area of the substrate. The substrate includes at least two transparent zones at different positions within the spatial area, so that two different spectral components of the spectrums are detectable at the two transparent zones.

Reflectometer, Spectrophotometer, Ellipsometer and Polarimeter Systems that utilize 1) electromagnetic radiation energy absorbing or reflecting material of spatially distributed different optical densities and 2) wavelength dependent electromagnetic radiation energy aperturing, or both, placed near the entry to said multi-element detector, to improve detector capability to monitor intensity vs. wavelength spectra entered thereinto and provide more uniform detector output, while preferably maintaining beam information content.

Methods and systems that utilize 1) electromagnetic radiation energy absorbing or reflecting material of spatially distributed different optical densities and 2) wavelength dependent electromagnetic radiation energy aperturing, or both, placed near the entry to said multi-element detector, to improve detector capability to monitor intensity vs. wavelength spectra entered thereinto and provide more uniform detector output, while preferably maintaining beam angle and plane of incidence.

A compact holographic SLM spectrometer without an optical diffraction element is provided. The compact holographic SLM spectrometer performs the basic spectrometer function using a spatial light modulator (SLM). The compact holographic SLM spectrometer includes a light source, an input element, a collimator, an SLM, an analysis and detection optics, at least one detector, and a digital and/or analog control device.

A void-arranged structure that includes a pair of principal surfaces opposing each other and a plurality of void sections that penetrate through the pair of principal surfaces. The void-arranged structure is configured of a plurality of unit structures each of which includes a first void section and a second void section having a different shape from a shape of the first void section, and the overall shape of the unit structure, when the principal surface is viewed from above, is not mirror-symmetric with respect to a predetermined imaginary plane orthogonal to the principal surface of the void-arranged structure.

A laser manufacturing system capable of fabricating 3-D resolved 2-D patterns. The system includes a pulse laser source generating a laser beam; a reflectance mirror arranged in the propagation path of the laser to reflect the laser, the mirror being controllable to adjust an emergent angle of the laser; a deformable dispersion unit located in the laser receiving path from the reflectance mirror and having an array of micromirrors controllable in response to the adjusted emergent angle to form required laser patterns from the reflected laser, the laser patterns having spatially separated optical spectral components with multiple propagation angles; and one or more focusing optical components positioned in the propagation path of the separated optical spectral components produced by the deformable dispersion unit; the focusing components recombine the optical spectral components at fabrication targets with patterns defined by the deformable dispersion unit. The laser pulse duration is shortest on or inside the fabrication target along the laser propagation path.

A polychromator includes a substrate and a functional element having an optical spectral decomposition action. The functional element having an optical spectral decomposition action is configured to spectrally decompose electromagnetic radiation originating from an entry opening, e.g. light which originates from an optional radiation source and is reflected at a sample, so that a spectrally decomposed spectrum is obtained, and to image the spectrally decomposed spectrum onto a spatial area of the substrate. The substrate includes at least two transparent zones at different positions within the spatial area, so that two different spectral components of the spectrums are detectable at the two transparent zones.

An imaging system includes a light source configured to illuminate a target and a camera configured to image light responsively emitted from the target and reflected from a spatial light modulator (SLM). The imaging system is configured to generate high-resolution, hyperspectral images of the target. The SLM includes a refractive layer that is chromatically dispersive and that has a refractive index that is controllable. The refractive index of the refractive layer can be controlled to vary according to a gradient such that light reflected from the SLM is chromatically dispersed and spectrographic information about the target can be captured using the camera. Such a system could be operated confocally, e.g., by incorporating a micromirror device configured to control a spatial pattern of illumination of the target and to modulate the transmission of light from the target to the camera via the SLM according to a corresponding spatial pattern.

An optical property measurement apparatus includes a pulse formation unit, a waveform measurement unit, and an optical system. The pulse formation unit is capable of changing a temporal waveform of pulsed light in accordance with a type of optical property to be measured. The waveform measurement unit measures a temporal waveform of the pulsed light output from a measurement object after being incident on the measurement object. The optical system has an attenuation unit with an attenuation rate with respect to one wavelength component constituting the pulsed light larger than an attenuation rate with respect to another wavelength component constituting the pulsed light. The optical system is capable of switching between a first state in which the attenuation unit is arranged on an optical path of the pulsed light output from the measurement object and a second state in which the attenuation unit is not arranged on the optical path.