An infrared imager includes a first optical component, a second optical component, and at least one thin film dielectric layer. The first optical component has multiple first parallel conductors with a first spacing pattern, aligned in a plane perpendicular to an axis. The second optical component has multiple second parallel conductors with a second spacing pattern, aligned in a plane perpendicular to the axis, angularly offset from the first direction. The thin film dielectric layer includes a refractive index change (RIC) material disposed between and in contact with the first and second parallel conductors. The first optical component, second optical component, and at least one thin film dielectric layer form an antenna array configured to detect one or more predetermined infrared wavelengths based on at least one of the first spacing pattern or the second spacing pattern or the angular offset.

A bolometer. In one embodiment a graphene sheet is configured to absorb electromagnetic waves. The graphene sheet has two contacts connected to an amplifier, and a power detector connected to the amplifier. Electromagnetic power in the evanescent electromagnetic waves is absorbed in the graphene sheet, heating the graphene sheet. The power of Johnson noise generated at the contacts is proportional to the temperature of the graphene sheet. The Johnson noise is amplified and the power in the Johnson noise is used as a measure of the temperature of the graphene sheet, and of the amount of electromagnetic wave power absorbed by the graphene sheet.

A microwave ablation system incorporates a microwave thermometer that couples to a microwave transmission network connecting a microwave generator to a microwave applicator to measure noise temperature. The noise temperature is processed to separate out components of the noise temperature including the noise temperature of the tissue being treated and the noise temperature of the microwave transmission network. The noise temperature may be measured by a radiometer while the microwave generator is generating the microwave signal or during a period when the microwave signal is turned off. The microwave ablation system may be configured as a modular system having one or more thermometry network modules that are connectable between a microwave applicator and a microwave generator. Alternatively, the modular system includes a microwave generator, a microwave applicator, and a microwave cable that incorporate a microwave thermometry network module.

A sensor antenna including a thin film material constructed in the shape of an antenna having a response, the material including a sheet resistance capable of being modified by an external stimulus where the antenna response varies over a range of sheet resistance values; method of making a sensor antenna; system including a sensor antenna; and method for operating a thin film sensor antenna including providing a thin film sensor antenna; exposing the sensor antenna to an external stimulus, simultaneously sensing the external stimulus while varying the sensor antenna response, measuring the change in the sensor antenna response, and correlating the measured response to a known change in the stimulus are disclosed.

A novel and useful method of visualization by detection of EM radiation being irradiated or reflected from objects in the imager's field of view using Finite Element Method (FEM) simulation software tools. The methodology provides a verification method of antenna operation from an electrical point of view since bolometer performance cannot be estimated using regular antenna parameters such as directivity, gain, impedance matching, etc. as the bolometer does not behave as an antenna but rather behaves as an absorber. An incident wave is triggered on the absorber and the absorption of the bolometer structure is estimated using commercially available Finite Element Method (FEM) software (e.g., ANSYS® HFSS software, CST MICROWAVE STUDIO®, etc.). How much of the energy is reflected is subsequently measured. The energy which is not reflected is considered to be absorbed by the absorber.

An absorber structure for a thermal detector, the absorber structure including edges defining a basic form, a plurality of first legs of electrically conducting material joined in an electrically conductive manner to form, between the edges of the absorber structure, a grid having openings, the first legs forming at least one continuous connection between the edges of the absorber structure; and a plurality of second legs of electrically conducting material joined in an electrically conductive manner to the first legs, wherein the second legs protrude from the first legs into the openings of the grid and terminate at points of termination located at a distance from adjacent first legs.

In one aspect, the invention provides a nanobolometer cell including a base layer, a dielectric spacer layer above and adjacent to the base layer, an ultrathin silicon film above and adjacent to the spacer layer, and at least one plasmonic optical antenna resonator above and adjacent to the silicon film.

The present invention features a novel design for a bolometric infrared detector focused on LWIR range for human body high-resolution temperature sensing, The present invention incorporates an efficient plasmonic absorber and VO.sub.2 nanobeam to facilitate improvement in both aspects—thermal resolution and spatial resolution. The present invention significantly improves the detectivity, NETD, and responsivity for a smaller form-factor detector active area.

A nanoscale bolometer for infrared (IR) thermal imaging comprises a subwavelength antenna that provides a specific detectivity approaching a fundamental, thermodynamic limit. The uncooled nanobolometer achieves performance comparable to cooled, high-performance, semiconductor photodetectors, but with significantly reduced size, weight, power, and cost.

Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.