A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

An elemental analysis system includes a reactor having at least one reduction reaction zone including a metal zeolite that can reduce nitrogen oxides (NO.sub.x) to molecular nitrogen (N.sub.2) by selective catalytic reduction. Correspondingly, a method of elemental analysis includes providing a reactor having at least one reduction reaction zone including a metal zeolite and reducing nitrogen oxides (NO.sub.x) to molecular nitrogen (N.sub.2) by selective catalytic reaction on the metal zeolite.

Embodiments described herein provide devices and methods for the determination of analytes. The device typically includes an absorbent material that allows for an analyte sample to be concentrated and analyzed simultaneously and within a short period of time (e.g., less than 10 seconds). Embodiments described herein can provide portable and easily operable devices for on-site, real time field monitoring with high sensitivity, selectivity, and fast response time.

A molecular detection apparatus according to an embodiment includes: a collection unit collecting a detection target gas containing a molecule to be detected; a substitution unit substituting a part of a molecular structure of at least a part of the molecule to generate a substitution product; a detector including a plurality of detection cells each having a sensor unit and an organic probe disposed at the sensor unit, the organic probe capturing the molecule or the substitution product; and a discriminator discriminating the molecule by a signal pattern based on an intensity difference of detection signals generated with the molecule or the substitution product being captured by the organic probes of the plurality of detection cells.

Embodiments concern a high-precision, measurement device operative to measure the water content in media and/or water transport rate by media with high precision and with high dynamic range concerning the flow rate value. Based on a molecular transducer principle, captured water reacts with a reactant characterized by its ability to generate gas as a reaction product. By using an electro-chemical transducing element, an electric signal is generated in accordance with a stoichiometric volume of gas produced and water transferred, which is related to the flow rate of the circulating aqueous solution.

Apparatus comprising an inlet region for receiving a gas mixture; an ionizer for supplying hydronium ions to the received gas mixture to generate ions, wherein the ionizer comprises a membrane for receiving the gas mixture, and wherein the membrane, preferably made of graphene oxide, is capable of generating hydronium ions from water; and an ion detector for detecting ions generated from the gas mixture.

A core-shell structure (a diameter is about 5 nm) is located on an Al.sub.2O.sub.3 catalyst support. Platinum (Pt metal) is a core, and a shell that surrounds the core has a solid solution structure (A.sub.1-xB.sub.xO.sub.Y) (where X is a composition that composes A and B, and Y is a composition of oxygen (O)) that is composed of platinum, palladium, and oxygen.

A gas sensor system is disclosed for detection of a compound that decomposes upon exposure to a metal oxide catalyst. The gas sensor system includes a sensor which includes a microheater, and a metal oxide catalyst that covers the microheater. The gas sensor system includes a pre-concentrator upstream from the sensor that lowers the limit of the detection of a compound.

According to one embodiment, a chemical sensor includes a sensor element. The sensor element includes a sensitive film and a treatment material. Physical properties of the sensitive film vary as bonding of a target substance to the sensitive film. The sensor element is configured to detect the variation in the physical properties. The treatment material is configured to carry out a treatment onto the target substance before the target substance bonds to the sensitive film. The treatment enhances the variation in the physical properties as compared to a case without the treatment.

Ultrasensitive, decoupled thermodynamic sensing platforms for the detection of chemical compounds in the vapor phase at trace levels are disclosed, wherein the sensors have a heating resistor decoupled from a sensing resistor. Embodiments of the decoupled sensor comprise a metallic microheater resistor on one side of substrate, and a sensor resistor coupled to a catalyst on the other side of the substrate. A sensor array may be provided including a plurality of sensors each having a different catalyst that, when exposed to an analyte, each experience an endothermic reaction, an exothermic reaction, or no reaction. A comparison of the reaction results to data comprising previously obtained reaction results may be used to determine the presence and the identity of the analyte. Advantageously, the decoupled sensors utilize less power and provide greater sensitivity than other known systems, and may be used to detect and identify a single molecule of an analyte.