This invention minimizes the needed space for a changer device for optical elements which can be mounted in front or in the back or on either fork side of telescopes. It implements a design whose profile is circular and centrosymmetric and gravitanionally neutral in respect to the path of light of the surrounding optical devices as well as an optimized mechanical depth. This is achieved by moving the centrosymmetrically arranged optical elements individually into the optical path i.e. the central opening of the changing device in contrary to prior art designs wherein the optical elements are mounted on a revolving disk whose axis of rotation is not congruent with the optical axis. The invention minimizes the obstructing area and shape of the changing device as well as the gravitational stress on surrounding structures by incorporating a design with minimal space requirements.

The invention provides an optical coupling, comprising: a first coupling portion and a second coupling portion, the first and second coupling portions configured to mate in kinematic constraint via a first mounting interface and at least two further mounting interfaces, wherein: the first coupling portion comprises a first mounting element and the second coupling portion comprises a socket, and the first mounting element is receivable in the socket at the first mounting interface such that the first mounting interface constrains lateral displacements of the first coupling portion relative to the second coupling portion when mated; and at least one optical channel for transmitting abeam of light along an optical axis through the optical coupling, the optical channel comprising complementary light-transmitting ports in the first and second coupling portions, wherein the optical axis is not laterally removed from the first mounting interface by more than half the distance between the first mounting interface and the nearest of the further mounting interfaces.

An imaging lens assembly of an optical verification system with a FOV greater than 120 degrees, and includes optical lenses from an object side to an image side. The one of the optical lens being the closest to the object side includes: an object side surface and an image side surface of an optical zone; an object side surface of a non-optical-zone surrounding the object side surface of the optical zone; an image side surface of a non-optical zone surrounding the image side surface of the optical zone; and a first connection portion disposed between the image side surface of the optical-zone and the image side surface of the non-optical zone, wherein a first angle between a tangential direction of a surface of the first connection portion and the radial direction is in a range of 15 to 50 degrees.

An imaging lens assembly of an optical verification system with a FOV greater than 120 degrees, and includes optical lenses from an object side to an image side. The one of the optical lens being the closest to the object side includes: an object side surface and an image side surface of an optical zone; an object side surface of a non-optical-zone surrounding the object side surface of the optical zone; an image side surface of a non-optical zone surrounding the image side surface of the optical zone; and a first connection portion disposed between the image side surface of the optical-zone and the image side surface of the non-optical zone, wherein a first angle between a tangential direction of a surface of the first connection portion and the radial direction is in a range of 15 to 50 degrees.

An optical element driving system is provided. The optical element driving system includes an optical element driving mechanism and a control assembly. The optical element driving mechanism includes a movable portion, a fixed portion, and a driving assembly. The movable portion is used for connecting to an optical element. The movable portion is movable relative to the fixed portion. The movable portion is in an accommodating space in the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The control assembly provides a driving signal to the driving assembly to control the driving assembly. The driving assembly includes a first driving element, and the material of the first driving element includes shape memory alloy.

An optical element driving system is provided. The optical element driving system includes an optical element driving mechanism and a control assembly. The optical element driving mechanism includes a movable portion, a fixed portion, and a driving assembly. The movable portion is used for connecting to an optical element. The movable portion is movable relative to the fixed portion. The movable portion is in an accommodating space in the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The control assembly provides a driving signal to the driving assembly to control the driving assembly. The driving assembly includes a first driving element, and the material of the first driving element includes shape memory alloy.

An attachment position adjustable membrane, including a membrane body and at least one attachment member. The membrane body allows light to pass through, and the membrane body is provided with at least one accommodating and guiding portion. The attachment member is movably disposed in the at least one accommodating and guiding portion, wherein the at least one attachment member is movable between a first position and a second position in the accommodating and guiding portion.

An attachment position adjustable membrane, including a membrane body and at least one attachment member. The membrane body allows light to pass through, and the membrane body is provided with at least one accommodating and guiding portion. The attachment member is movably disposed in the at least one accommodating and guiding portion, wherein the at least one attachment member is movable between a first position and a second position in the accommodating and guiding portion.

A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

An optical lens assembly includes at least one dual molded lens element. The dual molded lens element has a central axis, and includes a light transmitting portion and a light absorbing portion. The light transmitting portion includes an optical effective region and a lens peripheral region, and the lens peripheral region surrounds the optical effective region. A light absorbing portion surrounds the optical effective region. The light transmitting portion and the light absorbing portion are made of different plastic materials with different colors, and the light absorbing portion includes at least three gate portions surrounding the central axis, wherein all gate portions are located on the same surface of the dual molded lens element. The light transmitting portion and the light absorbing portion of the dual molded lens element are integrally formed by the injection molding.