A self-damping shutter apparatus for use in an exposure system of a photolithography machine, comprising: at least two pieces of shutter blades (1) for cutting off light source to an exposure area when the shutter is closed; a shutter driving arm (2), for driving the shutter blades (1) to synchronically open or close; a magnetic damping brake motor (3), for driving or braking the shutter driving arm (2), and the magnetic damping brake motor (3) drives and brakes, via the shutter driving arm (2), the shutter blades (1). The self-damping shutter apparatus for use in the exposure system of the photolithography machine increases consistency of opening or closing the shutter blades, improves a light shading effect of the shutter apparatus in an exposure, and improves stability in the process of opening or closuring the shutter blades. When the shutter blades complete actions of opening or closing, current is not needed, the magnetic damping braking motor enables the shutter blades to maintain the state of opening or closing, shortens duration of control current, reduces heat dissipation, and saves energy.

A lens unit with a central axis is provided. The lens unit includes a fixed portion, a movable portion, and a first driving assembly. The fixed portion includes an outer frame and a bottom combined with the outer frame. The outer frame and the bottom are arranged along the central axis. The movable portion is movably connected to the fixed portion, and carries a lens with an optical axis. The central axis is not parallel to the optical axis. The first driving assembly is connected to the movable portion, and drives the movable portion to move relative to the fixed portion. The first driving assembly also includes a biasing element made of a shape memory alloy.

A lens unit with a central axis is provided. The lens unit includes a fixed portion, a movable portion, and a first driving assembly. The fixed portion includes an outer frame and a bottom combined with the outer frame. The outer frame and the bottom are arranged along the central axis. The movable portion is movably connected to the fixed portion, and carries a lens with an optical axis. The central axis is not parallel to the optical axis. The first driving assembly is connected to the movable portion, and drives the movable portion to move relative to the fixed portion. The first driving assembly also includes a biasing element made of a shape memory alloy.

A shutter assembly includes a first shutter blade having a first toothed arm extending therefrom and a first light transmitting aperture therein, and a second shutter blade positioned adjacent and parallel to the first shutter blade. The second shutter blade has a second toothed arm extending therefrom and a second light transmitting aperture therein. The first and second shutter blades are supported to allow parallel linear motion. A motor gear is disposed between, and meshed with, the first and second toothed arms such that rotation of the gear causes the first and second shutter blades to move linearly in opposite directions between an open position in which the first and second light transmitting apertures are in an overlapping relationship with respect to one another, and a closed position in which the first and second light transmitting apertures are in a non-overlapping relationship with respect to one another.

A blade driving device includes: a board including an opening; first and second blades opening and closing the opening; first and second actuators arranged adjacent to each other and respectively driving the first and second blades, and respectively including first and second stators, first and second rotors, and first and second coils; a printed circuit board; and solder portions electrically connecting the first and second coils with the printed circuit board; wherein the solder portions includes: first and second solder portions respectively connecting one end and another end of the first coil with the printed circuit board; and third and fourth solder portions respectively connecting one end and another end of the second coil with the printed circuit board; and the first, second, third, and fourth solder portions face one another.

A blade driving device includes: a board including an opening; first and second blades opening and closing the opening; first and second actuators arranged adjacent to each other and respectively driving the first and second blades, and respectively including first and second stators, first and second rotors, and first and second coils; a printed circuit board; and solder portions electrically connecting the first and second coils with the printed circuit board; wherein the solder portions includes: first and second solder portions respectively connecting one end and another end of the first coil with the printed circuit board; and third and fourth solder portions respectively connecting one end and another end of the second coil with the printed circuit board; and the first, second, third, and fourth solder portions face one another.

A variable aperture device is described that includes a casing, a base with a light transmission hole, conductive terminals on the base, a terminal connecting portion, a shape memory metal wire, a movable portion, and a driven portion for forming an aperture together with the movable portion. One end of the shape memory metal wire is connected to the terminal connecting portion and the movable portion is connected to the base via a first rotating shaft. A side of the movable portion far from the light transmission hole around the first rotating shaft is connected to other end of the shape memory metal wire. A side of the movable portion near the light transmission hole around the first rotating shaft is connected to an elastic structure of the terminal connecting portion and the terminal connecting portion is attached to the conductive terminal.

A variable aperture device is described that includes a casing, a base with a light transmission hole, conductive terminals on the base, a terminal connecting portion, a shape memory metal wire, a movable portion, and a driven portion for forming an aperture together with the movable portion. One end of the shape memory metal wire is connected to the terminal connecting portion and the movable portion is connected to the base via a first rotating shaft. A side of the movable portion far from the light transmission hole around the first rotating shaft is connected to other end of the shape memory metal wire. A side of the movable portion near the light transmission hole around the first rotating shaft is connected to an elastic structure of the terminal connecting portion and the terminal connecting portion is attached to the conductive terminal.

An optical element driving mechanism is provided, including a movable part, a fixed part, and a driving assembly. The movable part is for connecting the optical element. The movable part is movable relative to the fixed part. The driving assembly is used for generating a driving force to drive the movable part to move relative to the fixed part. The driving assembly further includes a first reinforcement element, for strengthening the driving force.

An optical element driving mechanism is provided and includes a first movable part, a fixed assembly and a first driving assembly. The first movable part is configured to connect a first optical element. The fixed assembly has a first opening for a light beam to pass through, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. When the first movable part is located in a first position relative to the fixed assembly, the first optical element overlaps the first opening.