Deformable electrodes, deformable supercapacitors comprising the deformable electrodes, and electric circuits comprising the supercapacitors are provided. Methods of using the supercapacitors to convert mechanical energy to electrical energy are also provided. The supercapacitors include a liquid electrolyte disposed between two electrodes, at least one of which is reversibly deformable when it is compressed. The liquid electrolyte is infused into the deformable electrode and the supercapacitors are characterized in that the deformation of the deformable electrodes causes the interfacial area between the electrolyte and the deformable electrode to decrease when the electrode is deformed.

An apparatus for plasma processing includes a chamber, a substrate support having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate mounted on the electrostatic chuck in the chamber, and a radio frequency power supply configured to supply a radio frequency power to generate plasma in the chamber. Further, in the apparatus, a bias power supply supplies a bias power. A first electrical path electrically connects the bias power supply and the lower electrode, and a second electrical path that is different from the first electrical path and the lower electrode is configured to supply the bias power from the lower electrode or the first electrical path to an edge ring disposed to surround an edge of the substrate. Further, an impedance adjuster provides a variable impedance to the second electrical path.

Hydraulically-amplified, self-healing, electrostatic actuators that harness electrostatic and hydraulic forces to achieve various actuation modes. Electrostatic forces between electrode pairs of the actuators generated upon application of a voltage to the electrode pairs draws the electrodes in each pair towards each other to displace a liquid dielectric contained within an enclosed internal cavity of the actuators to drive actuation in various manners. The electrodes and the liquid dielectric form a self-healing capacitor whereby the liquid dielectric automatically fills breaches in the liquid dielectric resulting from dielectric breakdown.

An electro-hydraulic actuator includes a deformable shell defining an enclosed internal cavity and containing a liquid dielectric, first and second electrodes on first and second sides, respectively, of the enclosed internal cavity. An electrostatic force between the first and second electrodes upon application of a voltage to one of the electrodes draws the electrodes towards each other to displace the liquid dielectric within the enclosed internal cavity. The shell includes active and inactive areas such that the electrostatic forces between the first and second electrodes displaces the liquid dielectric within the enclosed internal cavity from the active area of the shell to the inactive area of the shell. The first and second electrodes, the deformable shell, and the liquid dielectric cooperate to form a self-healing capacitor, and the liquid dielectric is configured for automatically filling breaches in the liquid dielectric resulting from dielectric breakdown.

A variable capacitor includes first and second movable capacitor plate assemblies disposed in the interior of an enclosure and include a first and second movable capacitor plates. A first fixed capacitor plate and a second fixed capacitor plate are respectively disposed proximal to the first and second movable capacitor plates. The capacitor plates may comprise variably interdigitated concentric cylindrical blades, The first movable capacitor plate and the first fixed capacitor plate may be coaxial with the second movable capacitor plate and the second fixed capacitor plate. Actuators may be provided for independently advancing and retracting the first and second movable capacitor plate assemblies with respect to the first and second fixed capacitor plate assemblies to vary the capacitance of the variable capacitor by independently adjusting an amount of interdigitization of the capacitor plates of respective capacitor plate assembly pairs.

An apparatus for plasma processing includes a chamber, a substrate support having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate mounted on the electrostatic chuck in the chamber, and a radio frequency power supply configured to supply a radio frequency power to generate plasma in the chamber. Further, in the apparatus, a bias power supply supplies a bias power. A first electrical path electrically connects the bias power supply and the lower electrode, and a second electrical path that is different from the first electrical path and the lower electrode is configured to supply the bias power from the lower electrode or the first electrical path to an edge ring disposed to surround an edge of the substrate. Further, an impedance adjuster provides a variable impedance to the second electrical path.

Deformable electrodes, deformable supercapacitors comprising the deformable electrodes, and electric circuits comprising the supercapacitors are provided. Methods of using the supercapacitors to convert mechanical energy to electrical energy are also provided. The supercapacitors include a liquid electrolyte disposed between two electrodes, at least one of which is reversibly deformable when it is compressed. The liquid electrolyte is infused into the deformable electrode and the supercapacitors are characterized in that the deformation of the deformable electrodes causes the interfacial area between the electrolyte and the deformable electrode to decrease when the electrode is deformed.

Described herein is a sensor including a sensing electrode structure and a motion-responsive structure in capacitive communication with the sensing electrode structure, the sensing electrode structure and the motion-responsive structure being separated by a first dielectric layer, the motion-responsive structure comprising a liquid metal mass within a matrix in which the liquid metal mass is movable based upon movement of the sensor, and the sensing electrode structure comprising a first electrode, and a second electrode spaced from the first electrode to form a capacitor.

A high power low frequency tuner uses motor controlled rotary capacitors submerged in low loss high epsilon dielectric fluid and lengths of semi-rigid RF cable interconnecting the floating static blocks of the capacitors, the rotating blocks being grounded. And tuner calibration and tuning methods, allowing accurate tuning and perfect Smith chart impedance coverage. The full calibration lasts several hours and is reduced by the de-embedded calibration algorithm to minutes. A maximum power embodiment comprises full immersion of capacitors and interconnecting cables in circulated dielectric liquid (mineral oil) for breakdown voltage increase and heat removal.

An adjustable phase shifter includes an RF signal input, an RF signal output, a first delay line, a second delay line and a first electrowetting-activated switch disposed between the RF signal input and the RF signal output.