A multi-beam charged particle system and a method of operating a multi-beam charged particle system can provide improved image contrast. The multi-beam charged particle system comprises a filter element or an active array element in a detection system, which can provide improved, anisotropic image contrast. The disclosure can be applied for applications of multi-beam charged particle system, where higher desired beam uniformity and throughput may be relevant.

A device and system for ultrafast electron diffraction is disclosed. The electron diffraction device includes an electron source, anode, and magnetic lens. A laser probe pulse interacts with electrons from the electron source to generate an electron probe pulse that passes through the anode and diffracts from a sample yielding a diffraction pattern. Data is configured to be collected at one instance using the diffraction pattern to yield a first snapshot of diffractive information. Snapshots may be merged to produce an atomic stroboscopic motion image history of atomic lattice changes. The electron source may include a gas jet with photo-ionizable noble gas atoms to produce photoionized, spin-polarized electrons to form the electron probe pulse when the laser probe pulse impinges upon the electron source.