An apparatus to control processing conditions for a substrate. The apparatus may include a current measurement component to perform a plurality of extraction current measurements for extraction current in a processing apparatus housing the substrate, the extraction current comprising ions extracted from a plasma and directed to the substrate; and an endpoint detection component comprising logic to generate an endpoint detection signal based upon a change in extraction current during the plurality of extraction current measurements.

The present invention is directed to a method for irradiating of solids containing petroleum or petroleum derived compounds (PPDCs), such as soils, oily sludge, drill cuttings, sediments, and non-commercial petroleum industry products, with electron beams in order to physically and/or chemically alter the composition of the PPDCs. The method includes the step of separating PPDC gas and liquids in the presence of a gas driver. Optionally, the method includes the steps of treating off-gases and applying one or more amendments to PPCD-impacted solid material pre-irradiation, post-irradiation, or during electron beam irradiation.

A system for surface treatment of materials, including a target material, at least one transfer device and at least one plasma generator device. The plasma generator device includes a fluid (formula B) and generates a column of cold plasma. The target material is able to travel a path between a starting point and an end point, passing through the plasma generator device and the plasma column, along a unit vector of movement. The transfer device includes a fluid (formula A) transferred from the transfer device to the plasma generator device. The plasma column, generated from the fluids (formula A) and (formula B), has an oblong geometric shape of length (formula C), according to a longitudinal axis colinear with the vector of movement, and of width (formula D), according to a transverse axis perpendicular to the vector of movement, such that (formula E).