H01J61/125

Excimer lamp
11373855 · 2022-06-28 · ·

An excimer lamp includes a discharge vessel in which a rare gas and a halogen are enclosed. The excimer lamp also includes at least one first electrode and at least one second electrode for generating a dielectric barrier discharge inside the discharge vessel. The discharge vessel has a discharge forming region and a non-discharge region such that discharging takes place in the discharge forming region and no discharging takes place in the non-discharge region. The discharge forming region is formed between the first electrode(s) and the second electrode(s). The non-discharge region communicates with the discharge forming region. The excimer lamp satisfies a following equation:
(Vb×Ph)/Sd≥4.50
where Vb [mm.sup.3] represents a space volume inside the discharge vessel, Sd [mm.sup.2] represents an inner surface area of the discharge vessel in the discharge forming region, and Ph [Torr] represents a halogen-atoms partial pressure enclosed in the discharge vessel.

Single-dielectric excimer lamp systems and methods

An excimer lamp includes a dielectric tube, an end cap, a conductive hollow tube, and an electrode grid. The dielectric tube has a closed end and an open end, and defines a cavity. The end cap sealingly covers the open end. The conductive hollow tube passes through the end cap and into the cavity of the dielectric tube, with a volume defined between an exterior surface of the conductive hollow tube and an interior surface of the dielectric tube. The volume is configured to hold a gas. The electrode grid is disposed on an exterior surface of the dielectric tube.

UV irradiation apparatus
11776803 · 2023-10-03 · ·

To improve startability in a UV irradiation apparatus equipped with excimer lamps. The UV irradiation apparatus includes a plurality of excimer lamps each having a light-emitting tube filled with a discharge gas containing a noble gas. The plurality of excimer lamps includes a first excimer lamp filled with the discharge gas at a first enclosed gas pressure and a second excimer lamp filled with the discharge gas at a second enclosed gas pressure lower than the first enclosed gas pressure. The first excimer lamp is placed in a position such that at least part of light emitted from the second excimer lamp is allowed to enter the first excimer lamp.

EXCIMER LAMP AND LIGHT IRRADIATION DEVICE
20220068626 · 2022-03-03 · ·

An excimer lamp is such that that an interior of a discharge vessel is filled with a first gas including krypton (Kr) or xenon (Xe); a second gas including chlorine (Cl) or bromine (Br); and a third gas which is at least one species selected from among the group consisting of argon (Ar), neon (Ne), and helium (He), and which exhibits a partial pressure P.sub.b that is not less than a partial pressure P.sub.lg of the first gas.

EXCIMER LAMP
20220068628 · 2022-03-03 · ·

An excimer lamp includes a discharge vessel in which a rare gas and a halogen are enclosed. The excimer lamp also includes at least one first electrode and at least one second electrode for generating a dielectric barrier discharge inside the discharge vessel. The discharge vessel has a discharge forming region and a non-discharge region such that discharging takes place in the discharge forming region and no discharging takes place in the non-discharge region. The discharge forming region is formed between the first electrode(s) and the second electrode(s). The non-discharge region communicates with the discharge forming region. The excimer lamp satisfies a following equation:


(Vb×Ph)/Sd≥4.50

where Vb [mm.sup.3] represents a space volume inside the discharge vessel, Sd [mm.sup.2] represents an inner surface area of the discharge vessel in the discharge forming region, and Ph [Torr] represents a halogen-atoms partial pressure enclosed in the discharge vessel.

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

UV lamp
11037778 · 2021-06-15 · ·

A gas discharge lamp and photoionization sensor employing the gas discharge lamp. The lamp includes a housing containing a working gas sealed within the housing and a primary ultra-violet transparent window through a first longitudinal end of the housing. In a first embodiment the lamp includes an arched band of elastic getter material band with longitudinally extending diametrically opposed legs wedged within the chamber defined by the housing. In a second embodiment the lamp includes a second ultra-violet transparent window within the housing held into positon against the primary ultra-violet transparent window by an arched metal support band within the housing.

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.

Metal halide lamp and manufacturing method thereof

The present disclosure relates to the technical field of electric light sources, particularly to a metal halide lamp and a manufacturing method thereof. The metal halide lamp includes an electric arc tube, an inner glass bulb, and a lamp holder fixedly connected with the inner glass bulb; the electric arc tube includes a tube body, a positive electrode located inside an electric arc cavity of the tube body and connected with a positive feedthrough inserted in a first leg portion of the tube body, and a negative electrode connected with a negative feedthrough inserted in a second leg portion of the tube body; the electric arc cavity is provided therein with an ignition gas; an outer surface of the first leg portion is provided with a conductive layer and a metal electrical connector, wherein the conductive layer has one end close to and the other end away from an electrode tip of the positive electrode, the metal electrical connector has one end connected with the other end of the conductive layer, and the other end connected with a long molybdenum rod. Security risks in manufacturing, transportation, mounting, utilization, storage, and waste disposal brought about by use of the radioactive material .sup.85Kr are avoided in the present disclosure.