H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
H01L23/00 Details of semiconductor or other solid state devices
H01L23/48 Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements; ; Selection of materials therefor
H01L23/481 Internal lead connections, e.g. via connections, feedthrough structures